Mass Flow Controller, 10 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal

Technical Specs

  • Type
    Mass Flow Controller
  • Calibration Gas
    N2 (or equivalent)
  • Control Range
    0.2 - 10 sccm
  • Full Scale Flow Range
    10 sccm
  • Fitting Type
    0.25 in. tube
  • Flow Input Output Signal
    0 - 5 VDC
  • Analog I/O Connector
    15-pin D-sub
  • Seal Material
    Viton
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    10 - 40 psid (with atmospheric pressure at the MFC outlet)
  • Typical Accuracy
    ±1.0% of Full Scale (including non - linearity, hysteresis, and non - repeatability referenced to 760 mmHg and 0°C)
  • Repeatability
    <0.05% of Full Scale/°C
  • Resolution
    <0.08% of Reading/°C
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Warm-up Time
    <2 min (to within 0.2% of Full Scale of steady state performance)
  • Typical Settling Time
    <2 sec (per SEMI Guideline E17-91)
  • Operating Temperature
    0 - 50°C
  • Set Point Command Signal
    0 - 5 VDC from <20 kOhm
  • Wetted Materials
    316L stainless steel, Viton®, nickel
  • External Leak Integrity
    <1 x 10-9
  • Leak Integrity Through Closed Valve
    <1.0% of Full Scale at 40 psig inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is recommended.)
  • Compliance
    CE
  • Maximum Current Required at Start-up
    ±15 VDC (±5%) @ 200 mA
  • Typical Current Required at Steady State
    ±15 VDC (±5%) @ 100 mA
  • Valve State
    Normally closed

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