MKS Demonstrates Controls Workbench Software at Semicon West

Compatible with MKS Automation Platform and MultiTherm™ Product Family

screen capture - CWB Software

Andover, Mass., June 29, 2016 -- MKS Instruments, Inc. (NASDAQ:MKSI), a global provider of technologies that enable advanced processes and improve productivity, will introduce and demonstrate Controls Workbench (CWB) software at Semicon West, 2016. CWB provides a single interface for controlling, tuning, monitoring, and configuring, multiple MKS controllers, including the MKS Automation Platform and the MultiTherm product family. CWB leverages multivariate analytics for advanced auto tuning that improves process performance compared to existing tuning approaches. Ideal for vacuum and temperature control applications, CWB features user customizable dashboards that allow for easy process visualization and remote process control.

When used with MultiTherm products, Controls Workbench software provides support for advanced options that include model-based temperature control, cascading loops and PID gain scheduling. It communicates to MKS devices such as mass flow controllers (MFCs) and capacitance manometers using Modbus TCP/IP, enabling Ethernet communication to all compatible devices, while enabling custom visualizations with device specific views and charts for individual processes or across an entire plant or fab. Controls Workbench software offers built-in data logging, charting, and data exporting; advanced process diagnostic capabilities; incorporation of PLC and IEC 61131-3 projects and recipes; and the ability to remotely activate, pause or stop process routines.

Note to editors: To download a photo of the Controls Workbench software, MultiTherm™ 2000 Modular Temperature Controller or Automation Platform, please go to the MKS web site: http://www.mksinst.com/photos.

Learn more: Visit the Controls Workbench Software web page

About MKS:
MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor, and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, control and information technology, power and reactive gas generation, vacuum technology, photonics, lasers, optics and motion control. Our primary served markets include semiconductor capital equipment, industrial manufacturing, environmental, medical, life sciences and scientific research.