MKS Introduces the Granville-Phillips® Series 500 Cold Cathode Gauge
Provides high accuracy, wide pressure range, increased lifetime
Andover, MA, January 7, 2015 - MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, has introduced the Granville-Phillips® Series 500 Cold Cathode Gauge which sets a new accuracy standard (±10%) for wide pressure range CC gauges. The Series 500 features a longer lifetime than traditional CC gauges and fast, reliable starting. Its patent-pending method for determining pressure dosage over time provides for predictive maintenance, and USB connectivity assures ease of setup and pressure monitoring.
The Series 500's unprecedented accuracy is based on innovative technology and time-tested calibration techniques. It offers a wide measurement range from 10-10 to 10-2 Torr, and includes electronics, digital and analog interfaces. The USB interface and GP Connect software provides setup and diagnostics, including screens for setting up the gauge, graphing the pressure trend, and checking usage statistics.
Applications include R&D, coating, semiconductor, analytical, high energy physics, general vacuum, and other applications requiring long life and accuracy.
For more information:
Visit the 500 Cold Cathode Gauge Module page, or
Download the 500 Series data sheet
Note to editors: To download a photo of the Series 500 Cold Cathode Gauges, please go to the MKS web site: http://www.mksinst.com/photos.
MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, control and information technology, power and reactive gas generation, and vacuum technology. Our primary served markets are manufacturers of capital equipment for semiconductor devices, and for other thin film applications including flat panel displays, solar cells, light emitting diodes, data storage media, and other advanced coatings. We also leverage our technology in other markets with advanced manufacturing applications including medical equipment, pharmaceutical manufacturing, energy generation, and environmental monitoring.