Tools required: clean tweezers; clean smooth-jaw, needle-nose pliers
Do not bend the anode or the leaf spring on the ion current feedthrough pin when assembling or disassembling the Sensor.
Depending on the degree of contamination and application of the Sensor, the internal parts may be cleaned - either ultrasonically, with mild abrasives, or chemically.
Do not touch any vacuum exposed part after cleaning unless wearing gloves.
Ultrasonically clean using high quality detergents compatible with aluminum such as ALCONOx®.
Scrub with a mild abrasive to remove most contamination. Scotch-Brite® or fine emery cloth may be effective. Rinse with alcohol.
Clean aluminum and ceramic parts chemically in a wash (not recommended for semiconductor processing), such as a 5 to 20% sodium hydroxide solution, at room temperature (20°C) for one minute. Follow with a preliminary rinse of deionized water. Remove smut (the black residue left on aluminum parts) in a 50 to 70% nitric acid dip for about 5 minutes.
Chemical cleaning should not be used to clean the anode; mild abrasives or ultrasonic cleaning are acceptable.
Do not damage the leaf spring while cleaning the Sensor.
Each of the above cleaning methods should be followed with multiple rinses of deionized water.
Dry all internal components and the sensor body in a clean oven set at 150°C. The two ceramic spacers, are slightly porous and will require longer drying time in the oven to drive off the absorbed water.
Wear gloves and assemble with clean tools.
We suggest you measure the resistance between the ion current feedthrough pin and the grid washer to verify that the leaf spring is in contact with the cathode. The measurement should indicate a short circuit between them. There should be an open circuit between the ion current feedthrough pin and both the high voltage feedthrough pin and sensor body.
The I-Mag sensor is ready for installation. If it is not immediately installed, cover the flange with clean, vacuum grade aluminum foil and cap with a flange protector.