MKS Instruments Handbook
Semiconductor Devices and Process Technology
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The Semiconductor Devices and Process Technology handbook presents the fundamental device physics, materials, and fabrication processes used to manufacture semiconductors, as well as the technologies, instruments, and equipment that are used to monitor, control, and automate the fabrication processes. This comprehensive 200+ page text was initially conceived as training material for our employees. As it has evolved, we want to share it with you, our customers, suppliers, and partners in the semiconductor industry at no charge, with the hope that you will find it informative and of some value to your work.
Acknowledgements
Office of the CTO
Josh Ding, Ph.D.
Chief Technology Officer, Flow Solutions
Atul Gupta, Ph.D.
Head of Technology, Plasma & Reactive Gas Solutions
Jim Kafka, Ph.D.
Chief Technology Officer, Lasers
John TC Lee, Ph.D.
Chief Operating Officer & Senior Vice President
Aaron Radomski
Chief Technology Officer, Power Solutions
Erik Saarmaa, J.D.
Chief IP Counsel, Intellectual Property
Eric Snyder
Vice President, Quality & Reliability
Philip Sullivan, Ph.D.
Fellow & Chief Technology Officer, Pressure & Vacuum Measurement Solutions
Robin Swain, Ph.D.
General Manager, Integrated Solutions Business
Eric Taranto
Vice President Analytical & Control Solutions & Integrated Solutions Business
Ruben Zadoyan, Ph.D.
Chief Technology Officer, Newport Products
Former CTO Members
Gerardo Brucker, Ph.D.
Chief Scientist, Pressure & Vacuum Measurement Solutions
Steve Walther, Ph.D.
former Chief Technology Officer, Plasma & Reactive Gas Solutions
Kevin Wenzel, Ph.D.
former Chief Technology Officer, Plasma & Reactive Gas Solutions
Peter Zemek, Ph.D.
former Chief Technology Officer, Process & Environmental Analysis Solutions
Contributing Editors
Shannon Whidden
TechLink Writers Group
Tom K. Whidden, Ph.D.
TechLink Writers Group
Special Thanks
Anne Devine
Graphic Designer
Jane Lawlor
Senior Marketing Specialist, Creative Design
MaryAnn Naddy
Senior Director, Corporate Marketing (retired)
Ultra-High Velocity