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vision 2000-p xd high sensitivity rga for select pressure & pvd
Process Monitor, High Sensitivity, Select Pressure and PVD Applications

Specifications

  • Mass Range
    1-100 amu standard; 1-200 and 1-300 amu optional
  • Detector
    Dual (Faraday and secondary electron multiplier)
  • Maximum Analyzer Operating Pressure
    7.6e-3 Torr (1e-2 mbar) at the ion source inlet (standard), higher pressure optional
  • Minimum Detectable Partial Pressure
    <2e-11 Torr (for total pressures <1 x e-4 Torr on inlet)
  • Minimum Detectable Concentration
    <15ppb (specified with Argon or Nitrogen for non-interfering peaks)
  • Mass Stability
    Better than ±0.1 amu over 8 hours
  • Resolution
    Better than 10% valley between peaks of equal height throughout the mass range
  • Bakeout Temperature and Bakeout Jacket
    Included for 180°C bakeout
  • Ion Source
    High conductance closed ion source
  • Filaments
    Replaceable twin Tungsten or Thoria filaments
  • Mass Filter
    Double filter (1'' “RF only” pre-filter with 4'' main filter)
  • Weight
    33 lbs. (15 kg) to bolt on Process System
  • Power Requirements
    88-264 VAC, 47/63 Hz, 600 Watts
  • Operating Temperature
    Electronics: 10-40°C, 80% RH (non-condensing)
  • LED Status Indication
    Interlock status, filament emission, SEM, power and communications
  • I/O Capability
    4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control.
  • Other Facilities
    Leak check headset socket, external filament trip socket, instrument reset
  • Software
    Process Eye Professional fully network compatible control platform generating under 32bit or 64bit Microsoft® Windows® XP, Vista, Server 2008 or Windows 7* (*recommended)
  • Communication
    Ethernet CAT-5e
  • PC Requirements
    Intel® Pentium IV® or AMD Athlon XP 1.2GHz, 1GB RAM, 120 GB hard drive
  • Simultaneous Multi-Sensor
    Process Eye Professional client/server configuration offers flexible multi-sensor operation process system and customer requirements.
  • Shipping Weight
    44 lbs (20 Kg); can vary depending upon configuration.
  • Compliance
    CE
  • Mounting Flange
    DN35CF (70mm/2.75'' OD) Conflat® flange
  • Vacuum Hardware
    60 l/s turbomolecular pump with high conductance analyzer housing, inlet system, right angle valve, automated vacuum controller (RVC) completely interlocked and integrated.
  • Mobile RGA Platform
    Optional RGA trolley to improve versatility (footprint 18x24'', 455x604 mm)
  • Pneumatics
    60-80 psig CDA
  • Foreline Pump
    Dry diaphragm standard; Other options available.
  • Analyzer Housing Base Pressure
    Better than 5e-9 Torr after bakeout

Features

V-lens™ Technology

V-lens Ion Optics Technology - Trajectories of negative ions (green), positive ions (red), neutral ions (blue) in the V-lens ion optics, reducing metastable decay

Degas processes typically employ inert gases such as Argon or Nitrogen. The use of these gases can be challenging as they generate an elevated baseline in RGAs due to large amounts of chemical background noise caused by metastable decay. This results in reduced sensitivity which can be problematic for manufacturers who want to identify changes in trace gases (which are indicative of issues during the manufacturing process) quickly and easily.

V-lens technology, a unique enabling solution, helps to overcome this issue by providing a consistently low mass independent baseline and detection levels in the low ppb range. This is achieved with unique ion optics that utilize a patented double-focusing and deflection mechanism that significantly reduces background and enhances sensitivity (see figure).

The result is a gas analyzer with limits of detection in the low ppb range without compromise to any other aspect of instrument performance.

This state-of-the-art RGA technology is integrated with Process Eye Professional control platform, a recipe based, user-configurable software program. The combination of V-lens, a closed ion source, and automated inlet allows for sensitive and reproducible monitoring of the complete ALD, CVD, or Etch process cycle.

By maximizing the ratio between ALD, CVD, or Etch chamber gas signals and the gas background in the differentially pumped analyzer housing, the V-lens and closed ion source enables low ppm-level detection for trace contaminants in the process gas.

Data acquired from purified Argon at atmospheric pressure without V-lens technology

Reduced baseline and improved sensitivity typically observed when using a QMS with V-lens technology

Closed Ion Source

The Vision 2000-P XD incorporates a closed ion source and a custom inlet valve with an optimized high conductance, low surface area path to the PVD process chamber. With this source, the system is able to monitor the complete PVD process cycle, from base vacuum to process pressures of up to 0.01 mbar, without the need for a pressure reduction inlet. By maximizing the ratio between process gas signals and the gas background in the differentially pumped Vision 2000-P XD analyzer housing, the closed ion source in combination with V-lens enables low ppb levels of detection for trace contaminants in the process gas.

Remote Vacuum Controller

Each Vision 2000-P XD system incorporates a Remote Vacuum Controller (RVC) module that provides failsafe protection for both the process tool and the RGA. Furthermore, it allows full operation and control of RGA system components (filaments, pumps, inlet valves, etc.) from the system PC.

Process Eye™ Professional Control Platform

The Vision 2000-P XD analyzer uses Process Eye Professional. This highly flexible, modular application uses recipes to specify how the instrument scans, displays data, and responds to the acquired data. Recipes, user configurable using the “Recipe Wizard,” allow customized warnings and alarm levels, triggered whenever the process exceeds preset levels.

Associated bar chart spectra and recently captured spectra are stored in a data buffer for easy review. Recipes can be linked together for the optimum monitoring of various phases of a particular process, or to facilitate automatic calibration using pre-defined calibration recipes. The single button push (or external signal) initiation of a Process Eye Professional recipe eliminates the need for highly skilled, full-time operators.

The flexibility of Process Eye Professional allows recipes to be configured that will:

  • Define data acquisition and data display parameters, along with any on-line data processing required to convert data into relevant units and information
  • Display data in simultaneous “bar chart” and “data trend” formats, allowing the comprehensive and clear investigation of significant trend events
  • Incorporate custom warnings and alarms, triggered or terminated when data highlights that process conditions have deviated from normal conditions
  • Monitor and display other parameters as trends (temperature, gas flow rate, power, pressure, etc.)
  • In addition, Process Eye Professional provides “live history” for quick on-line review of data trend events. Recently captured bar chart spectra are stored in a data buffer and can be reviewed by moving a cursor over the associated trend plot.

Standard bar chart with log pressure axis

Simultaneous log bar chart/trend analysis display, illustrating wide dynamic range scanning. Power supply potentials versus time is also shown.

TOOLweb® RGA

Using the TOOLweb RGA sensor integration option for process tools, the Vision 2000-P XD can be used as a degas chamber sensor in a completely automated process environment (see figure). TOOLweb RGA maintains a constant monitoring of tool activities with all sensor data being framed by wafer logistics before alarm models are applied. Full alarm and data reporting to the FAB host and FDC are available allowing real-time monitoring of chamber conditions and flagging of any process excursions from ideal conditions.

TOOLweb RGA homepage screen for a tool with Vision 2000-P XD degas modules

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