Configuration Options

Description
     V100-VALVE Standard Vacuum Valve, NW100 Port

Specifications

  • Type
    Large Standard Single-stage Vacuum Isolation Valves
  • Vacuum Range
    15 psig to 10-9 Torr
  • Body Configuration
    Angle, Inline
  • Port Size
    NW100
  • Flange Size
    MF100, CF 6 inch, KF100, 4 inch tube
  • Helium Leak Rate
    1.0 x 10-9 std cc/sec
  • Actuation
    Manual or Pneumatic
  • Body, Nosepiece and Bellows Termination Material
    Type 304 stainless steel
  • Bellows Material
    Type 321 stainless steel
  • Nose Seal
    Viton®, Buna, Kalrez, or Chemraz
  • Bonnet Seal
    Viton®, Buna, Kalrez, or Chemraz
  • Cylinder Volume
    1.6 x 10-2 ft3 (4.6 x 10-4 m3)
  • Limit Switch Rating
    5A - 250 VAC
  • Single Pole, Single Throw
    5A - 30 VDC
  • Blow-By Pressure
    32 psia (2.2 x 105 N/m2 abs)
  • Actuation Time
    Opening: 2, Closing: 2
  • Maximum Internal Spring Closing Pressure
    30 psia (2.0 x 105 N/m2 abs)
  • Maximum Bakeout Temperature
    150°C
  • Conductance
    Minimum: 50 psig (4.5 x 105 N/m2 abs)
    Maximum: 100 psig (7.9 x 105 N/m2 abs)
  • Pneumatic Air Supply Fitting
    1/8 in. NPT-F

Features

Applications

Series 150/160 and V-100 valves are designed to insure product quality, reliability and value. They function reliably in applications ranging from semiconductor manufacturing to plasma physics research to nuclear accelerators. MKS manufactures its valves with interchangeable parts, inspecting them at every step.

Need help?

Contact an Applications Specialist by sending us an email