UHV Ultra-high Vacuum Isolation Valves are lightweight and have a compact profile, enabling it to fit easily into vacuum systems where space is tight. MKS has optimized the welded stainless steel bellows stroke length to ensure a long cycle life while maintaining high conductance.
|Model||Drawings, CAD & Specs||Availability||Price|
|UHV-25-ACC-ELVN UHV Isolation Valve, NW25, 2.75 in., Angle Ports, Viton/Copper, Pneumatic||$635||
|UHV-40-ACC-ELVN UHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Pneumatic||$680||
|UHV-40-ACC-EMVM UHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Manual||$530||
|UHV-40-ICC-ELVN UHV Isolation Valve, NW40, 2.75 in. CF, Inline Ports, Viton/Copper, Pneumatic||$755||
Another standard feature is a TIG fusion-welded body made of high grade, corrosion resistant 304 stainless steel for significantly fewer entrapment areas, resulting in less contaminants. The body is available with a choice of bead blasted or electropolished finishes.
The UHV Valve is a compact vacuum valve designed for use in ultra-high vacuum systems, for physical vapor deposition, high energy physics, mass spectrometry and other applications that require an ultraclean environment.