UHV Ultra-high Vacuum Isolation Valves
Overview
UHV Ultra-high Vacuum Isolation Valves are lightweight and have a compact profile, enabling it to fit easily into vacuum systems where space is tight. MKS has optimized the welded stainless steel bellows stroke length to ensure a long cycle life while maintaining high conductance.
- NW25 - NW40
- Ultra-high vacuum system applications
- Metal bonnet seal limits outgassing and permeation for a lower base pressure
- Spring-to-close, air-to-open pneumatic valve
Products
| Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|
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UHV Isolation Valve, NW25, 2.75 in., Angle Ports, Viton/Copper, Pneumatic
$701
15 Weeks
|
UHV-25-ACC-ELVN UHV Isolation Valve, NW25, 2.75 in., Angle Ports, Viton/Copper, Pneumatic |
15 Weeks
|
$701 |
|
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UHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Pneumatic
$750
15 Weeks
|
UHV-40-ACC-ELVN UHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Pneumatic |
15 Weeks
|
$750 |
|
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|
UHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Manual
$585
15 Weeks
|
UHV-40-ACC-EMVM UHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Manual |
15 Weeks
|
$585 |
|
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UHV Isolation Valve, NW40, 2.75 in. CF, Inline Ports, Viton/Copper, Pneumatic
$833
15 Weeks
|
UHV-40-ICC-ELVN UHV Isolation Valve, NW40, 2.75 in. CF, Inline Ports, Viton/Copper, Pneumatic |
15 Weeks
|
$833 |
|
Configuration Options
Please see the UHV Valve datasheet for available product options.
Specifications
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TypeUltra-high Vacuum Valve
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Vacuum RangeAtmosphere to 10-9 Torr
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Body ConfigurationOffset Inline
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Port SizeNW25, NW40
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Flange SizeISO-KF 25, ISO-KF 40, CF 2.75 in. depending on configuration
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Flange TypeISO-KF, CF, or Tube
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ActuationManual or Pneumatic
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Limit SwitchOptional
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SealViton
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Bonnet SealCopper or Viton
Features
TIG Fusion-welded body
Another standard feature is a TIG fusion-welded body made of high grade, corrosion resistant 304 stainless steel for significantly fewer entrapment areas, resulting in less contaminants. The body is available with a choice of bead blasted or electropolished finishes.
UHV Applications
The UHV Valve is a compact vacuum valve designed for use in ultra-high vacuum systems, for physical vapor deposition, high energy physics, mass spectrometry and other applications that require an ultraclean environment.
Resources
Literature
- Ultra High Vacuum Valves (512.1 kB, PDF)
Manuals
- UHV Valve Manual (675.8 kB, PDF)
Ultra-High Velocity