The T3B High-speed Exhaust Throttle Valves are specifically designed for applications where a simple pressure control system is desired. The T3B integrates all control, communication, and driver circuits within a throttle valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The self-tuning control algorithm and high-speed operation drives the system to set point fast and with minimum overshoot, and ensures repeatable process recipes without operator involvement.
T3B Downstream Pressure Controllers are available with the following options.
|Configuration Option||Option Code|
T3BIA Downstream Pressure Controller
|T3BIB Downstream Pressure Controller||T3BIB|
|Valve Bore/Flange Size|
|20 mm/NW25 ISO-KF||19K|
|20 mm/NW40 ISO-KF||20K|
|1 in./NW40 ISO-KF||01K|
|2 in./NW50 ISO-KF||02K|
|Non-sealing Direct Drive||2|
|Low Conductance F-seal||3|
|Up to 150°C||2|
|Up to 105°C||1|
|Seal Materials (Valve Shaft)|
|Pressure Sensor Power|
|±15 VDC @650mA total||2|
|MKS will ship the current firmware revision||VV|
The T3B Throttle Valves can operate in two modes: flapper positioning or pressure control, either of which can be user-activated through the I/O interface. All of the adjustable setup parameters, run time operation, and diagnostics information is available through the communications interface. The T3B also includes adjustable soft-start functions for set point changes to minimize turbulence and thus particle distribution in the chamber. Two alarm relay outputs are available. The T3B is compatible with all MKS Baratron capacitance manometers to allow for precise closed-loop pressure control.
The downstream pressure control technique provides wide dynamic range, works with all types of pumps, provides fast response, and is tolerant to most effluent gases.
The T3B can communicate either via Analog, RS232, or a DeviceNet interface. DeviceNet is a high-performance communication link based on a broadcast-oriented protocol called Controller Area Network (CAN). The DeviceNet protocol, managed by the Open DeviceNet Vendor Association (ODVA), is easy to install and provides a simple and economical way for instruments and controllers to be interoperable on a network. The T3B complies with the ODVA profile for a Process Control Valve.
The “intelligent instrument” concept results in valuable system space savings, improved noise immunity, and easy access to time-critical process and calibration information as well as on-board diagnostic functions.
The T3B utilizes a direct drive high-speed stepper motor. The valve driver provides high-resolution pressure control. The robust, high-torque motor provides extended uptime and reduces preventative maintenance cycles — a great advantage in demanding processes where just one hour of downtime can cost thousands of dollars. The T3B is also available in geared versions, providing additional torque, and enabling long-term operation in harsh environments.
An encoder-based position feedback system is provided for diagnostic purposes. The valve is constructed of corrosionresistant 316 stainless steel, compatible with most process gases and is available in standard ISO flange styles with bore sizes from ¾” to 10” (20-250 mm). Standard seals offered are Viton®; alternate materials can be specified for compatibility with various process chemistries and/or heated applications.