Compare Model Drawings, CAD & Specs Frequency Maximum Power Output Availability Price
Microwave Power Generator, 1.8 kW, 2455 MHz, SmartPower AX2500
$22,900
5 Weeks
AX2518 Microwave Power Generator, 1.8 kW, 2455 MHz, SmartPower AX2500 2440 - 2470 MHz 1.8 kW
5 Weeks
$22,900
Microwave Power Generator, 3.0 kW, 2455 MHz, SmartPower AX2500
$30,500
5 Weeks
AX2530 Microwave Power Generator, 3.0 kW, 2455 MHz, SmartPower AX2500 2440 - 2470 MHz 3.0 kW
5 Weeks
$30,500

Specifications

  • Type
    Intelligent Microwave Generator
  • Frequency
    2440 - 2470 MHz
  • Power Regulation
    Better than 1% of output power (line and load)
  • Ripple
    AX2518: ±1% of output power
    AX2530: ±1% of output power
  • Ambient Temperature
    Up to 40°C maximum
  • Microwave Connections
    WR284F waveguide with CPR284F flanges
  • Remote Control
    Analog, RS485, DeviceNet™
  • Power Requirements
    200/208 VAC ±10%, 3 phase, 50/60 Hz
  • Compliance
    CE, ETL, Semi S2-93A, F47
  • Cooling
    Water, 1.5 gpm, 30°C maximum @ 30 psid minimum, air
  • Output Accuracy
    AX2518: ±1.5% (from 20-100% of max. power)
    AX2530: ±1.5% (from 20-100% of max. power)
  • Generator to Head Distance
    Up to 100 feet maximum
  • Power Head Dimensions
    10 inches H x 7.62 inches W x 14.5 inches D (254 x 193.5 x 368.3mm)
  • Dimensions
    7.0 inches H x 19 inches W x 23 inches L (178 x 483 x 584mm)

Features

Modular Architecture

All generators share a common, modular architecture and accurate power measurement, feedback and control for increased process control and reproduceability. All models have feedback-controlled power regulation of 0.1% of output power (line and load) and ripple of <±1% of output power. PrecisionPower™ technology improves accuracy of power control to <±1.5% of maximum power for increasing process consistency and yield. In addition, the PrecisionPower™ technology allows magnetrons to be replaced in the field, substantially reducing cost of ownership.

Microwave Plasma Subsystem
SmartPower® generator microwave power accuracy during plasma operation. Forward power within ±1.5% of maximum power. Tests performed using AX7610 applicator. Reflected power minimized with SmartMatch to less than 1% in less than 2 sec.

Intelligent Diagnostics

The AX2500 Series SmartPower® control technology monitors the generator’s operating system and provides power shutdown protection and intelligent diagnostics. The simple messages displayed on the SmartPower® generator front panel give the user all the information needed to understand system status, reduce MTTR and ensure maximum uptime.

Need help?

Contact an Applications Specialist by sending us an email