The technology designed into the SEMOZON AX8415 is the basis of this generator’s versatility. Ozone is used by the electronics industry in the formation of CVD and ALD thin films, oxide growth, photoresist removal and multiple cleaning applications. The AX8415 has the capability to support all these applications by producing the highest concentrations of ultra clean ozone with or without the addition of nitrogen as a dopant gas. Removing the minute amount of nitrogen used in the formation of ozone eliminates the formation of NOx compounds, if required for a given application.
The unique features and benefits of the SEMOZON AX8415 position it as a direct replacement for the industry leading SEMOZON AX8407 ozone generator, (the forerunner to the AX8415). The form factor and connections required to produce and control ozone generation on the AX8415 are exactly the same as the AX8407. The superior performance of AX8415 is immediately available for all applications qualified with the AX8407 ozone generator.