SEMOZON® AX8575 Multi-Channel Ozone Delivery System with In-rack Chiller

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Overview

The SEMOZON® AX8575 is a fully integrated, high output ozone gas delivery system that can be configured as a multi-channel system delivering ozone for up to 4 channels supporting multiple chambers or multiple tools. It has an optional in-rack chiller for ultra-high concentrations.

Concentrations up to 350g/Nm3 at higher flow rates to meet new process requirements.
Fast & easy installation with minimal connections.
Supports single or multiple process tools for efficiency and lower cost of operation.
Flexible - each channel can be process matched individually.

Products

		Compare	Model	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Flow Rate	Type	Ozone Output	Availability	Featured Item	Price		Brand
		AX8575 Ozone Delivery Subsystem, 40 slm Ozone Delivery Subsystem, In-rack Chiller Contact Us	AX8575 Ozone Delivery Subsystem, 40 slm Ozone Delivery Subsystem, In-rack Chiller	UNIVERSAL	0.0	1.0	0.0		0.0	40 slm (max.)	Ozone Gas Delivery System	up to 350g/Nm³	Contact Us