Overview

The SEMOZON® AX8580 Ozone Delivery System generates and delivers high flow, high concentration, ultra-clean ozone for advanced thin film applications. The SEMOZON AX8580 is specifically designed for use with an increasing number of semiconductor process applications such as ALD, CVD and TEOS/Ozone CVD.

• Fully integrated, modular system equipped with up to (4) AX8415 generators for the highest concentration at the highest flow
• Individually controlled generator outputs support up to (4) channels or combined into a single channel chamber process tool
• Highest ozone concentrations >400g/Nm3 at the highest flow rates for improved thin film quality
• Improved operating performance and extended lifetime due to cooling improvements and optional in-rack chiller
• Compatible with or without nitrogen for ultra-clean ozone
• Optional integrated ozone destruct for protection from unintended ozone exposure