SEMOZON® AX8580 Fully Integrated Modular Ozone Delivery System
Overview
- Fully integrated, modular system equipped with up to (4) AX8415 generators for the highest concentration at the highest flow
- Individually controlled generator outputs support up to (4) channels or combined into a single channel chamber process tool
- Highest ozone concentrations >400g/Nm3 at the highest flow rates for improved thin film quality
- Improved operating performance and extended lifetime due to cooling improvements and optional in-rack chiller
- Compatible with or without nitrogen for ultra-clean ozone
- Optional integrated ozone destruct for protection from unintended ozone exposure
Products
| Compare | Model | Drawings, CAD & Specs | Availability | Price | |||
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AX8580 Ozone Delivery System, 50 slm per channel, Fully Integrated Modular |
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Specifications
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TypeOzone Gas Delivery System
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Ozone Output>400g/Nm3
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Flow Rate2.5 gpm per generator
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Feed GasOxygen, Nitrogen
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Feed Gas Supply Pressure70 ±2 psig (483 ±13.5 kPa, 4.92 ±0.14 kg/cm2) nominal, 80 ±2 psig (551 ±13.5 kPa, 5.62 ±0.14 kg/cm2) maximum N2 pressure 10 psi higher than O2 pressure
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Feed Gas Purity99.9995% minimum
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Operating Temperature5 - 40°C (41 - 104°F)
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Cooling Water Temperature Required5 - 17°C
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Cooling Water Filtration Required100 microns
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Cooling Water Quality Required1 - 3 MΩcm DI
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Cooling Water Minimum Flow Required2.5 gpm per generator
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Cooling Water Connections Required1 in. compression (Swagelok®)
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Cooling Water Heat Load Required5 kw per generator
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Voltage Requirements208 volts AC (±10%), three phase
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Current Requirements65 Amps max (fully populated system)
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Frequency50/60 Hz
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Exhaust Flow RateTwo-generator system requires 125 CFM (3.5m3/min), Four-generator system requires 250 CFM (7m3/min), Static Pressure 125CFM (3.5m3/min) requires 0.1 in. H20 minimum (25 Pa), measured 3 ft inside the customer provided exhaust air duct, 250 CFM (7m3/min)
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Exhaust TypeSEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
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Exhaust Static Pressure0.07 in. H20 minimum (17.4 Pa), measured at duct entrance to cabinet
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Control Air Pressure70 - 100 psig (483 - 689 kPa)
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Control Air TypeCDA or dry nitrogen, 40µ filtered
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Control Air Fitting0.25 in. compression (Swagelok®)
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Exhaust Connection6 in. diameter duct opening standard
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Dimensions26 x 82 x 38 in. (661 x 2083 x 965 mm) (width x height x depth)
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Relative Humidity30 - 90% (non - condensing)
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Weight705 lbs (320 Kg) for system with one generator 1 channel and BMT safety monitor, 1015 lbs (461 Kg) for system with four generator 1 channel and BMT safety monitor, 1045 lbs (480 Kg) for system with two generator 1 channel and BMT safety monitor and chiller
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ComplianceETL 9700614, SEMI S2-0715
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AltitudeUp to 1000 m (3280 ft) above mean sea level
Resources
Drawings And Cad
- AX8580 Dimensional Drawing (825.4 kB, PDF)
Literature
- SEMOZON® AX8580 Fully Integrated Modular Ozone Delivery System (633.4 kB, PDF)
Ultra-High Velocity