The SEMOZON® AX8555 Ozone Delivery System is configurable with up to four (4) independent channels to support multiple ALD tools or chambers concurrently. Each channel can be matched to the specific concentration and flow required for your specific process. It includes all subassemblies required for stand-alone operation, including power distribution, an ambient ozone safety monitor, status indicator panel, and optional integrated ozone destructs for each channel.
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|AX8555 Ozone Delivery Subsystem, 0.5 - 5 slm, 4-channel, Standalone||UNIVERSAL||0.0||1.0||0.0||0.0||0.5 - 5 slm/channel||Ozone Gas Delivery System||26 - 180 g/hr/channel (configuration dependent)@ 25 psi ozone delivery pressure and 17°C cooling water||