SEMOZON® AX8555 4-channel, Standalone Ozone Delivery Systems

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Overview

The SEMOZON® AX8555 Ozone Delivery System is configurable with up to four (4) independent channels to support multiple ALD tools or chambers concurrently. Each channel can be matched to the specific concentration and flow required for your specific process. It includes all subassemblies required for stand-alone operation, including power distribution, an ambient ozone safety monitor, status indicator panel, and optional integrated ozone destructs for each channel.

Highest Ozone Concentration
Ultra clean Ozone
Compact footprint
Low cost of ownership

Products

		Compare	Model	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Availability	Featured Item	Price		Brand
		AX8555 Ozone Delivery Subsystem, 0.5 - 5 slm, 4-channel, Standalone Contact Us	AX8555 Ozone Delivery Subsystem, 0.5 - 5 slm, 4-channel, Standalone	UNIVERSAL	0.0	1.0	0.0		0.0	Contact Us

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Specifications

Type

Ozone Gas Delivery System
Ozone Output

26 - 180 g/hr per channel
Flow Rate

0.5 - 5 slm per channel
Feed Gas

Oxygen, Nitrogen (20 - 100 ppm of total flow), Carbon Dioxide (1000 - 2000 ppm of total flow)
Feed Gas Supply Pressure

60 psig (4.2 kg/cm²) nominal, 75 psig (5.3 kg/cm²) maximum, N2/CO2 pressure 10 psi higher than O2 pressure
Feed Gas Purity

99.9995% minimum
Operating Temperature

41 - 104°F (5 - 40°C)
Cooling Water Temperature Required

63 - 73°F (17 - 23°C)
Cooling Water Filtration Required

20µm
Cooling Water Quality Required

Demineralized
Cooling Water Minimum Flow Required

1.0 gpm (2.3 - 3.8 slm) minimum to 1.6 gpm max. per channel (depending on configuration)
Cooling Water Connections Required

1/2 in. compression (Swagelok®)
Cooling Water Flow Control/Indication Required

Variable - area flow meter with valve
Cooling Water Pressure Indication Required

Inlet pressure gauge
Voltage Requirements

208 volts AC (±10%), three phase

Current Requirements

15 Amps RMS, 30 Amps service, 31 Amps RMS, 50 amps service (depending on configuration) minimum of 10,000 A.I.C.
Frequency

50/60 Hz
Pressure Indication

Inlet pressure gauge for each gas
Exhaust Flow Rate

150 cfm (70.8 l/s)
Exhaust Type

SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure

0.10 in. (2.54 mm) H2O minimum measured at the bottom of the duct flange adapter on cabinet
Control Air Pressure

70 - 100 psig
Control Air Type

CDA or dry nitrogen, 40µm filtered
Control Air Fitting

1/4 in. compression (Swagelok®)
Exhaust Connection

6 - in. diameter duct opening
Dimensions

24 x 75 x 36 in. (610 x 1575 x 914 mm) (width x height x depth)
Relative Humidity

30 - 90% (non - condensing)
Weight

600 lbs.(272 kg) for system with one generator,880 lbs.(400 kg) for system with four generators
Compliance

CE, S2 - 0302, F47
Altitude

Up to 3280 ft. (1000 m) above mean sea level

Specifications

Type

Ozone Gas Delivery System
Ozone Output

26 - 180 g/hr per channel
Flow Rate

0.5 - 5 slm per channel
Feed Gas

Oxygen, Nitrogen (20 - 100 ppm of total flow), Carbon Dioxide (1000 - 2000 ppm of total flow)
Feed Gas Supply Pressure

60 psig (4.2 kg/cm²) nominal, 75 psig (5.3 kg/cm²) maximum, N2/CO2 pressure 10 psi higher than O2 pressure
Feed Gas Purity

99.9995% minimum
Operating Temperature

41 - 104°F (5 - 40°C)
Cooling Water Temperature Required

63 - 73°F (17 - 23°C)
Cooling Water Filtration Required

20µm
Cooling Water Quality Required

Demineralized
Cooling Water Minimum Flow Required

1.0 gpm (2.3 - 3.8 slm) minimum to 1.6 gpm max. per channel (depending on configuration)
Cooling Water Connections Required

1/2 in. compression (Swagelok®)
Cooling Water Flow Control/Indication Required

Variable - area flow meter with valve
Cooling Water Pressure Indication Required

Inlet pressure gauge
Voltage Requirements

208 volts AC (±10%), three phase

Current Requirements

15 Amps RMS, 30 Amps service, 31 Amps RMS, 50 amps service (depending on configuration) minimum of 10,000 A.I.C.
Frequency

50/60 Hz
Pressure Indication

Inlet pressure gauge for each gas
Exhaust Flow Rate

150 cfm (70.8 l/s)
Exhaust Type

SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure

0.10 in. (2.54 mm) H2O minimum measured at the bottom of the duct flange adapter on cabinet
Control Air Pressure

70 - 100 psig
Control Air Type

CDA or dry nitrogen, 40µm filtered
Control Air Fitting

1/4 in. compression (Swagelok®)
Exhaust Connection

6 - in. diameter duct opening
Dimensions

24 x 75 x 36 in. (610 x 1575 x 914 mm) (width x height x depth)
Relative Humidity

30 - 90% (non - condensing)
Weight

600 lbs.(272 kg) for system with one generator,880 lbs.(400 kg) for system with four generators
Compliance

CE, S2 - 0302, F47
Altitude

Up to 3280 ft. (1000 m) above mean sea level