The SEMOZON® AX8550 2-Channel, Standalone Ozone Delivery System provides maximum uptime and minimum complexity with its modular design. All modules are housed in a vented 19-inch rack. These advanced Ozone delivery systems may be configured with one or two SEMOZON® AX8400 series ozone generators with a choice of common or independent, dual-channel gas flow control.
Closed-loop concentration monitoring and control
Interface to tool and back pressure control
Overcurrent and ground fault protection
Cooling water distribution panel has filter, pressure indication & flow control