SEMOZON® AX8550 2-Channel, Standalone Ozone Delivery Systems

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semozon ax8550 2-channel, standalone ozone gas delivery system

Overview

The SEMOZON® AX8550 2-Channel, Standalone Ozone Delivery System provides maximum uptime and minimum complexity with its modular design. All modules are housed in a vented 19-inch rack. These advanced Ozone delivery systems may be configured with one or two SEMOZON® AX8400 series ozone generators with a choice of common or independent, dual-channel gas flow control.

Closed-loop concentration monitoring and control
Interface to tool and back pressure control
Overcurrent and ground fault protection
Cooling water distribution panel has filter, pressure indication & flow control

Products

		Compare	Model	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Flow Rate	Type	Ozone Output	Availability	Featured Item	Price		Brand
		AX8550 Ozone Delivery Subsystem, 0 - 35 slm, 2-channel, Standalone Contact Us	AX8550 Ozone Delivery Subsystem, 0 - 35 slm, 2-channel, Standalone	UNIVERSAL	0.0	1.0	0.0		0.0	30 slm per channel	Ozone Gas Delivery System	375 g/hr per channel	Contact Us

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Specifications

Type

Ozone Gas Delivery System
Ozone Output

375 g/hr per channel
Flow Rate

30 slm per channel
Feed Gas

Oxygen: Grade 6 or better with less than 1 ppm water, hydrocarbons, and halocarbons, dew point .40°F, Nitrogen: Grade 5 or better
Operating Temperature

10 - 40°C (50 - 104°F)
Control Interface

PLC with digital and analog input/output modules
Cooling Water Temperature Required

17° - 23°C (63° - 73°F)
Cooling Water Minimum Flow Required

9.5 lpm (2.5 gpm) Recommended flow/channel
Voltage Requirements

200 - 230 VAC, 3Ø
Current Requirements

50A max
Frequency

50/60 Hz
Nominal O2 Inlet Pressure

4.1 bargauge (60 psig)
Nominal N2 inlet pressure

4.8 bargauge (70 psig)

Maximum Number of O2 Generators

2
Number Independent Channels

2
Flow Control

Upstream
Gas Flow Control/Indication

O2 and N2 Rotameters (MFCs optional)
Ozone Pressure Control

Manual
Nominal delivery pressure

1.4 - 3.1. bargauge (20 - 45 psig)
Gas Mixing

Internal
Ozone Concentration Control

Open Loop or Closed Loop
Ozone Concentration Monitor

Standard (gas phase)
Dimensions

916 x 611 x 1559 mm (36 x 24 x 61.4 in) (length x width x height)
Weight

340 kg (750 lbs) (approximate)
Compliance

SEMI S2 - 0302, CE Mark, NRTL tested to UL and CSA standards (AX8550 Systems)

Specifications

Type

Ozone Gas Delivery System
Ozone Output

375 g/hr per channel
Flow Rate

30 slm per channel
Feed Gas

Oxygen: Grade 6 or better with less than 1 ppm water, hydrocarbons, and halocarbons, dew point .40°F, Nitrogen: Grade 5 or better
Operating Temperature

10 - 40°C (50 - 104°F)
Control Interface

PLC with digital and analog input/output modules
Cooling Water Temperature Required

17° - 23°C (63° - 73°F)
Cooling Water Minimum Flow Required

9.5 lpm (2.5 gpm) Recommended flow/channel
Voltage Requirements

200 - 230 VAC, 3Ø
Current Requirements

50A max
Frequency

50/60 Hz
Nominal O2 Inlet Pressure

4.1 bargauge (60 psig)
Nominal N2 inlet pressure

4.8 bargauge (70 psig)

Maximum Number of O2 Generators

2
Number Independent Channels

2
Flow Control

Upstream
Gas Flow Control/Indication

O2 and N2 Rotameters (MFCs optional)
Ozone Pressure Control

Manual
Nominal delivery pressure

1.4 - 3.1. bargauge (20 - 45 psig)
Gas Mixing

Internal
Ozone Concentration Control

Open Loop or Closed Loop
Ozone Concentration Monitor

Standard (gas phase)
Dimensions

916 x 611 x 1559 mm (36 x 24 x 61.4 in) (length x width x height)
Weight

340 kg (750 lbs) (approximate)
Compliance

SEMI S2 - 0302, CE Mark, NRTL tested to UL and CSA standards (AX8550 Systems)