SEMOZON® AX8550 2-Channel, Standalone Ozone Delivery Systems
Overview
- Closed-loop concentration monitoring and control
- Interface to tool and back pressure control
- Overcurrent and ground fault protection
- Cooling water distribution panel has filter, pressure indication & flow control
Products
| Compare | Model | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
|
AX8550 Ozone Delivery Subsystem, 0 - 35 slm, 2-channel, Standalone |
|
Resources
Application Notes
- Ozone Data Conversion Tables (289.1 kB, PDF)
Drawings And Cad
- SEMOZON® AX8550 Ozone Delivery System Dimensions (119.8 kB, PDF)
Literature
- SEMOZON® AX8550 2-Channel, Standalone Ozone Delivery System (257.6 kB, PDF)
Technical Papers
- Ozone/TEOS CVD Oxide Deposition Using DLI (751.1 kB, PDF)
Ultra-High Velocity