Model Drawings, CAD & Specs Availability Price
Vacuum Isolation Valve, High Speed, Fast Closing

Specifications

  • Type
    High Speed, Fast Closing Vacuum Valve
  • Port Size
    Various, NW16 to NW160
  • Closing Time
    <50 to 600 msec, depending on configuration

Features

Applications

In most applications, there are two isolation valves in the vacuum foreline; one near the chamber exit for process isolation and one directly upstream of the pump for preventative maintenance work.

The Rapid Isolation Valve can be triggered a number of ways, including:

  • Power to the pump - many pumps have accessory relays which can be easily tapped.

  • Programmable Automation Controller (PAC) or equivalent device providing logic.

  • Pressure Sensors, based either on a threshold pressure or a rate-of-rise.

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