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revolution remote plasma source
Remote Plasma Source, 6 slm, O2 Flow, , R*evolution III

Specifications

  • Type
    AX7695 Integrated Remote Plasma Source
  • Ignition Gas Supply
    100% O2 or Ar, or 90% O2/10% N2 (contact MKS for ignition with other gases)
  • Process Gas Supply
    Up to 6.0 slm of 100% O2, or 90% O2/10% N2 (contact MKS for ignition with other gases)
  • Operating Pressure
    Ignition: 0.5 to 2.0 Torr @ 1.0 to 6.0 slm (pressure measured at R*evolution III outlet)
    Process: 0.5 to 2.0 Torr @ 1.0 to 6.0 slm
  • Output
    Ready, AC line, Plasma On, Power Monitor
  • Inputs
    Plasma On/Off, Power Set
  • Duty Cycle
    100%
  • Interlocks
    Internal thermal switch and internal water flow switch to protect against insufficient cooling
  • Wetted Materials
    6061-T6 Aluminum, Kalrez®, SiO2, 316L SS, Nickel, Fluorosilicone
  • Control Interface
    Discrete I/O, 9 and 25 pin D connectors, RS-232, DeviceNet™ and Ethernet (MKS TOOLweb®-enabled)
  • Power Requirements
    180 to 228 VAC, 50/60 Hz, 30A, 3 phase
  • Cooling Water
    1.75 gpm, < 30°C
  • Operating Temperature
    Ambient 40°C max.
  • Dimensions
    15.7 inches long, 13.7 inches wide, 12.14 inches high (399 mm x 348 mm x 308 mm nominal)
  • Weight
    85 lb. (38.6 Kg)
  • Compliance
    CE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1

Features

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