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Portable Vacuum Calibration System


  • Type
    Portable Vacuum Calibration System
  • Transfer Standard
    AA06A absolute sensors (NIST traceable)
  • Accuracy
    0.08% of Reading (± temp. coefficients)
    Optional 0.05% of Reading (± temp. coefficients) for 1, 10, 100, or 1000 mmHg Full Scale
  • Resolution
    1 x 10-6
  • Fitting Type
    Test Gas Inlet: 0.25 in. Swagelok® bulkhead
    Test Port (3): Swagelok 8 VCR® male (3)
  • Operating Temperature
  • Readout
    MKS 670, 5½-digit LCD (one per standard)
    Unit under test readout electronics: PDR2000
  • Power Requirements
    110 VAC, 60 Hz; 220 VAC, 50 Hz; 15 Amps
  • Warm-up Time
    4 hours. However, use of the internal 500 VA UPS will keep the Transfer Standards warmed up and ready for immediate use for at least 60 minutes.
  • Weight
    Approximately 250 lbs (110 kg)
  • Pressure Control
    Manual needle valve to control gas inlet; manual isolation valve and metering bypass valve for pressure throttle control
  • Compliance
  • High Vacuum Gauge
    IMAG ionization gauge and controller provides 1 x 10-3 to 1 x 10-9 mmHg measurement
  • Standby Power
    500 V.A. uninterruptible power supply keeps three Transfer Standards warmed up and ready to use for up to 60 min.
  • Test/Calibration
    5-10 psig dry filtered N2
  • Vacuum Pumping System
    Mechanical Pump: Oil free 4 stage diaphragm pump operated as dual two stage diaphragm pumps
    High Vacuum Pump: Hybrid turbo/drag air-cooled
    Normal Base Pressure: <5 x 10-7 mmHg


PVS6F Vacuum Calibration System Operation

The PVS6F is a CE compliant version of the popular PVS6E. Standard features include a narrow chassis for ease of movement through confined areas, clean room compatibility, dry pumping system, and two-channel display/readout for the unit under test. Product Features The PVS6F pumping system consists of an air-cooled hybrid turbomolecular pump, backed by a dual two stage diaphragm pump. A high vacuum gauge is provided to monitor system performance and base pressure to ensure pressure is low enough for proper zeroing of the transfer standards. The PVS6F provides manual pressure control capability for complete user flexibility. The PVS6F has an uninterruptible power supply with sufficient storage to keep the transfer standards warmed up and ready to use for up to 60 minutes, allowing ample time to transport the PVS6F to the process system.

The PVS6F can perform off-line calibratrions (Figure 1) as well as in situ on-chamber calibrations (Figure 2).

Figure 1

Figure 2

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