The PPCMA pressure controller with integrated mass flow meter provides pressure measurement and control while monitoring mass flow rates for critical process applications (e.g. backside wafer cooling) in a compact package. The PPCMA utilizes leading Baratron® capacitance manometer technology for pressure measurement and patented thermal flow meter to monitor gas mass flow. Both are integrated along with a proportioning control valve and the latest in control electronics providing fast and accurate pressure control with critical flow monitoring as a system diagnostic.
PPCMA Pressure Controllers with MFM are available with the following options.
|Configuration Option||Option Code|
PPCMA Pressure Controller with MFM
|Pressure Range Full Scale|
|Full Scale Flow Rate|
|Swagelok 4 VCR||R|
|A (50 sccm)||A|
|#1 (200 sccm)||1|
|#2 (1000 sccm)||2|
|#3 (5000 sccm)||3|
|Customer must specify firmware version at time of order||10|
The PPCMA can be configured for 10 to 1000 Torr Full Scale pressure with a control range from 5 to 100% of Full Scale. The PPCMA pressure controller is suitable for transport chamber pressure control, critical backside wafer pressure control and process gas panel pressure balancing as well as run-vent pressure control applications. The valve and flow meter can be configured for Full Scale flow rates from 5 to 5000 sccm Full Scale depending on process conditions.
The PPCMA is available with either digital (DeviceNet™ or EtherCAT®) I/O allowing for straightforward integration into new or retrofit applications. In-situ tuning and component diagnostics are enhanced through the device’s micro USB user interface accessible via virtually any PC with a web browser.