The πPC PC99 Baratron capacitance manometer technology for pressure measurement and patented thermal flow meter to monitor gas mass flow. Both are integrated along with a proportioning control valve and the latest in control electronics providing fast and accurate pressure control with critical flow monitoring as a system diagnostic. The PC99 can be configured to be capable of controlling pressures as low as 20 torr; critical to backside wafer pressure control or as high as 100 psia for process gas pressure control. The valve and flow meter can be configured for Full Scale flow rates from 10 sccm to 30 slm depending on process conditions.
PC99 Pressure Controllers with MFM are available with the following options.
|Configuration Option||Option Code|
PC99 Pressure Controller with MFM
|Pressure Range Full Scale|
|Full Scale Flow Rate|
|Swagelok 4 VCR||R|
|W-seal (1.125 in.)||H|
|RS-485, 9 pin D (No Display)||5|
|15 Pin D (Analog I/O) (No Display)||B|
|A (50 sccm)||A|
|#1 (200 sccm)||1|
|#2 (1000 sccm)||2|
|#3 (5000 sccm)||3|
|#4 (10,000 sccm)||4|
|#5 (20,000 sccm)||5|
|#6 (30,000 sccm)||6|
|Valve Seal Material/Operation|
|Metal/NC (≤5000 sccm orifice only)||M|
|Current to date firmware revision||20|
The PC99 is available with either digital (DeviceNet or RS-485) or analog I/O allowing for straightforward integration into new or retrofit applications. In-situ tuning and component diagnostics are enhanced through the device’s standard Ethernet user interface accessible via virtually any PC with a web browser. The PC99’s bright, 4 digit rotatable display provides easy viewing of the device’s IP address as well as process pressure, flow, and temperature.