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πPC PC99 Integrated Downstream Pressure Controller with Mass Flow Meter

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pipc pc90, pc99 integrated pressure controller

Overview

The PC99 can be configured to be capable of controlling pressures as low as 20 torr; critical to backside wafer pressure control or as high as 100 psia for process gas pressure control. The valve and flow meter can be configured for Full Scale flow rates from 10 sccm to 30 slm depending on process conditions.

Specifications

Type

PC99 Absolute Pressure Controller with Mass Flow Meter
Pressure Range

1000 Torr, 2000 Torr, 100 Psia
Fitting Type

Swagelok 4 VCR Male, 1-1/8” surface mount (C-seal, W-seal)
Valve Position

Normally Closed or Normally Open
Valve Seat

PTFE (Teflon) or Sapphire (Metal)
Flow Rate

(sccm) 50, 200, 1000, 5000, 10000, 20000, 30000
Trip Points

Two open collector transistors, adjustable from 0 to 100% of Full Scale
Rated Current: 30VDC/250mA
State: On, above, or below trip point
Hysteresis: 3% of Full Scale (factory set)
Status: LEDs Red when the transistor is on
Pressure Readout Units

(For all Torr Full Scale ranges) Torr, kPa; (For Psi Full Scale Range) Psi, kPa
Pressure Resolution

0.1 Torr for 0 to 100 Torr, 1 Torr for >1000 Torr, 0.1 Psi for 0 to 100 Psi
Pressure Control Accuracy

± 0.2% of Full Scale (< 10% Full Scale); ± 1.0% of Reading (≥ 10% Full Scale)
Transducer Over Pressure Limit

2x Full Scale for all ranges
Maximum Differential Pressure

45 Psid
Burst Pressure

1500 Psig
Control Mode

Downstream
Pressure Measurement Accuracy

± 1.0% of Reading
Zero Temperature Coefficient

± 0.02% of Full Scale /°C
Span Temperature Coefficient

± 0.04% of Reading /°C
Control Range

> 2 to 100% of Full Scale
Typical Response Time

< 1.0 second
Operating Temperature

10 to 50°C (50 to 122°F)
Storage Temperature

-20 to 80°C (-4 to 176°F)
Storage Humidity

0 to 95% relative humidity, non-condensing
External Leak Integrity

<1 x 10^-10
Leak Integrity Through Closed Valve

<1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere)
Flow Measurement Range

2% to 100% of Full Scale
Flow Repeatability

± 0.2% of Full Scale

Flow Resolution

0.1% of Full Scale
Flow Accuracy

± 1.0% of Reading >10% of Full Scale (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
Flow Span Temperature Coefficient

< 0.08% of Reading/°C
Flow Zero Temperature Coefficient

<0.05% of Full Scale/°C
Wetted Materials

Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy, KM-45, Inconel® 718, 825 Incoloy®
Optional: (Valve Seat) PTFE (Teflon) or Sapphire (Metal)
Surface Finish

5 µinches, average Ra
Input Power

+15 to +24 VDC @ 350mA max
Connector

15-pin Type “D” Male
Set Point

0 to 10 VDC (Default), 0 to 5 VDC (User Switchable)
Flow Output Signal

0 to 5 VDC
Analog Output Minimum Impedance

< 1 Ω
Power Required

DeviceNet: +11 to +25 VDC per DeviceNet specification (@ <3.5 watts)
RS485: +15 to +24 VDC @ 350mA max
Connector-Interface

DeviceNet: 5 pin microconnector (DeviceNet)
RS485: 9 pin Type D male
Data Rate Switch

DeviceNet: 4 positions: 125, 250, 500K (Default), PGM (programmable over the network)
RS485: 3 positions: 9.6, 19.2, 38.4K (Default)
DeviceNet Communication Rate

125 - 500 Kbps (user selectable)
RS485CommunicationRate

9.6 - 38.4 Kbps (user selectable)
MAC ID Switches

DeviceNet: 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers; 7,0 to 9,9 are software ID numbers; (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3)
RS485: 2 switches, 10 positions; 0,0 to 9,9. Available MAC ID’s are 3,2 to 9,9.
Network Topology

DeviceNet: Linear (trunkline/dropline) power and signal on same network cable
RS485: Master/slave
Network Size

DeviceNet: Up to 64 nodes
RS485: Up to 32 nodes
Indicators

DeviceNet: LED network status (green/red) LED module status (green/red), Scrolling LED displays (piPC Type, Pressure Full Scale, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31)) Push Button Display toggles between (Pressure in TORR & KPA or PSI & KPA, Flow, Temperature and Scrolling display)
RS485: LED network status (green/red) LED module status (green/red)
Temperature Readout Units

°C
Temperature Accuracy

± 2°C
Temperature Resolution

0.1°C
Temperature Display Range

0 to 100°C
Weight

< 3 lbs (1.36 kg)

Specifications

Type

PC99 Absolute Pressure Controller with Mass Flow Meter
Pressure Range

1000 Torr, 2000 Torr, 100 Psia
Fitting Type

Swagelok 4 VCR Male, 1-1/8” surface mount (C-seal, W-seal)
Valve Position

Normally Closed or Normally Open
Valve Seat

PTFE (Teflon) or Sapphire (Metal)
Flow Rate

(sccm) 50, 200, 1000, 5000, 10000, 20000, 30000
Trip Points

Two open collector transistors, adjustable from 0 to 100% of Full Scale
Rated Current: 30VDC/250mA
State: On, above, or below trip point
Hysteresis: 3% of Full Scale (factory set)
Status: LEDs Red when the transistor is on
Pressure Readout Units

(For all Torr Full Scale ranges) Torr, kPa; (For Psi Full Scale Range) Psi, kPa
Pressure Resolution

0.1 Torr for 0 to 100 Torr, 1 Torr for >1000 Torr, 0.1 Psi for 0 to 100 Psi
Pressure Control Accuracy

± 0.2% of Full Scale (< 10% Full Scale); ± 1.0% of Reading (≥ 10% Full Scale)
Transducer Over Pressure Limit

2x Full Scale for all ranges
Maximum Differential Pressure

45 Psid
Burst Pressure

1500 Psig
Control Mode

Downstream
Pressure Measurement Accuracy

± 1.0% of Reading
Zero Temperature Coefficient

± 0.02% of Full Scale /°C
Span Temperature Coefficient

± 0.04% of Reading /°C
Control Range

> 2 to 100% of Full Scale
Typical Response Time

< 1.0 second
Operating Temperature

10 to 50°C (50 to 122°F)
Storage Temperature

-20 to 80°C (-4 to 176°F)
Storage Humidity

0 to 95% relative humidity, non-condensing
External Leak Integrity

<1 x 10^-10
Leak Integrity Through Closed Valve

<1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere)
Flow Measurement Range

2% to 100% of Full Scale
Flow Repeatability

± 0.2% of Full Scale

Flow Resolution

0.1% of Full Scale
Flow Accuracy

± 1.0% of Reading >10% of Full Scale (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
Flow Span Temperature Coefficient

< 0.08% of Reading/°C
Flow Zero Temperature Coefficient

<0.05% of Full Scale/°C
Wetted Materials

Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy, KM-45, Inconel® 718, 825 Incoloy®
Optional: (Valve Seat) PTFE (Teflon) or Sapphire (Metal)
Surface Finish

5 µinches, average Ra
Input Power

+15 to +24 VDC @ 350mA max
Connector

15-pin Type “D” Male
Set Point

0 to 10 VDC (Default), 0 to 5 VDC (User Switchable)
Flow Output Signal

0 to 5 VDC
Analog Output Minimum Impedance

< 1 Ω
Power Required

DeviceNet: +11 to +25 VDC per DeviceNet specification (@ <3.5 watts)
RS485: +15 to +24 VDC @ 350mA max
Connector-Interface

DeviceNet: 5 pin microconnector (DeviceNet)
RS485: 9 pin Type D male
Data Rate Switch

DeviceNet: 4 positions: 125, 250, 500K (Default), PGM (programmable over the network)
RS485: 3 positions: 9.6, 19.2, 38.4K (Default)
DeviceNet Communication Rate

125 - 500 Kbps (user selectable)
RS485CommunicationRate

9.6 - 38.4 Kbps (user selectable)
MAC ID Switches

DeviceNet: 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers; 7,0 to 9,9 are software ID numbers; (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3)
RS485: 2 switches, 10 positions; 0,0 to 9,9. Available MAC ID’s are 3,2 to 9,9.
Network Topology

DeviceNet: Linear (trunkline/dropline) power and signal on same network cable
RS485: Master/slave
Network Size

DeviceNet: Up to 64 nodes
RS485: Up to 32 nodes
Indicators

DeviceNet: LED network status (green/red) LED module status (green/red), Scrolling LED displays (piPC Type, Pressure Full Scale, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31)) Push Button Display toggles between (Pressure in TORR & KPA or PSI & KPA, Flow, Temperature and Scrolling display)
RS485: LED network status (green/red) LED module status (green/red)
Temperature Readout Units

°C
Temperature Accuracy

± 2°C
Temperature Resolution

0.1°C
Temperature Display Range

0 to 100°C
Weight

< 3 lbs (1.36 kg)