πPC PC99 Integrated Upstream Pressure Controller with Mass Flow Meter

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Overview

The πPC PC99 Baratron capacitance manometer technology for pressure measurement and patented thermal flow meter to monitor gas mass flow. Both are integrated along with a proportioning control valve and the latest in control electronics providing fast and accurate pressure control with critical flow monitoring as a system diagnostic. The PC99 can be configured to be capable of controlling pressures as low as 20 torr; critical to backside wafer pressure control or as high as 100 psia for process gas pressure control. The valve and flow meter can be configured for Full Scale flow rates from 10 sccm to 30 slm depending on process conditions.

Integral Baratron® Capacitance Manometer technology
Patented mass flow sensor for exceptional long-term accuracy and zero stability
Metal-sealed, cleanroom manufactured for critical high purity application needs
Fast response to set point with minimal overshoot
Two alarm trip points for process limit control (Analog only)

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		Description
		P99A Integrated Pressure Controller with Mass Flow Meter, PC99

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PC99 Pressure Controllers with MFM are available with the following options.

Configuration Option	Option Code
PC99 Pressure Controller with MFM	PC99A
Pressure Range Full Scale
1000 Torr	13T
2000 Torr	23T
100 psia	12P
Full Scale Flow Rate
10 sccm	A
20 sccm	B
50 sccm	C
100 sccm	D
200 sccm	E
500 sccm	F
1000 sccm	G
2000 sccm	H
5000 sccm	J
10000 sccm	K
20000 sccm	L
30000 sccm	M
Fittings
Swagelok 4 VCR	R
C-Seal	C
W-seal (1.125 in.)	H
Communications
DeviceNet	6
RS-485, 9 pin D (No Display)	5
15 Pin D (Analog I/O) (No Display)	B
Orifice Size
A (50 sccm)	A
#1 (200 sccm)	1
#2 (1000 sccm)	2
#3 (5000 sccm)	3
#4 (10,000 sccm)	4
#5 (20,000 sccm)	5
#6 (30,000 sccm)	6
Valve Seal Material/Operation
Metal/NC (≤5000 sccm orifice only)	M
Teflon/NC	T
Teflon/NO	P
Firmware
Current to date firmware revision	20

Specifications

Type

PC99 Absolute Pressure Controller with Mass Flow Meter
Pressure Range

1000 Torr, 2000 Torr, 100 Psia
Fitting Type

Swagelok 4 VCR Male, 1-1/8” surface mount (C-seal, W-seal)
Valve Position

Normally Closed or Normally Open
Valve Seat

PTFE (Teflon) or Sapphire (Metal)
Flow Rate

(sccm) 50, 200, 1000, 5000, 10000, 20000, 30000
Trip Points

Two open collector transistors, adjustable from 0 to 100% of Full Scale
Rated Current: 30VDC/250mA
State: On, above, or below trip point
Hysteresis: 3% of Full Scale (factory set)
Status: LEDs Red when the transistor is on
Pressure Readout Units

(For all Torr Full Scale ranges) Torr, kPa; (For Psi Full Scale Range) Psi, kPa
Pressure Resolution

0.1 Torr for 0 to 100 Torr, 1 Torr for >1000 Torr, 0.1 Psi for 0 to 100 Psi
Pressure Control Accuracy

± 0.2% of Full Scale (< 10% Full Scale); ± 1.0% of Reading (≥ 10% Full Scale)
Transducer Over Pressure Limit

2x Full Scale for all ranges
Maximum Differential Pressure

45 Psid
Burst Pressure

1500 Psig
Control Mode

Downstream
Pressure Measurement Accuracy

± 1.0% of Reading
Zero Temperature Coefficient

± 0.02% of Full Scale /°C
Span Temperature Coefficient

± 0.04% of Reading /°C
Control Range

> 2 to 100% of Full Scale
Typical Response Time

< 1.0 second
Operating Temperature

10 to 50°C (50 to 122°F)
Storage Temperature

-20 to 80°C (-4 to 176°F)
Storage Humidity

0 to 95% relative humidity, non-condensing
External Leak Integrity

<1 x 10^-10
Leak Integrity Through Closed Valve

<1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere)
Flow Measurement Range

2% to 100% of Full Scale
Flow Repeatability

± 0.2% of Full Scale

Flow Resolution

0.1% of Full Scale
Flow Accuracy

± 1.0% of Reading >10% of Full Scale (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
Flow Span Temperature Coefficient

< 0.08% of Reading/°C
Flow Zero Temperature Coefficient

<0.05% of Full Scale/°C
Wetted Materials

Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy, KM-45, Inconel® 718, 825 Incoloy®
Optional: (Valve Seat) PTFE (Teflon) or Sapphire (Metal)
Surface Finish

5 µinches, average Ra
Input Power

+15 to +24 VDC @ 350mA max
Connector

15-pin Type “D” Male
Set Point

0 to 10 VDC (Default), 0 to 5 VDC (User Switchable)
Flow Output Signal

0 to 5 VDC
Analog Output Minimum Impedance

< 1 Ω
Power Required

DeviceNet: +11 to +25 VDC per DeviceNet specification (@ <3.5 watts)
RS485: +15 to +24 VDC @ 350mA max
Connector-Interface

DeviceNet: 5 pin microconnnector (DeviceNet)
RS485: 9 pin Type D male
Data Rate Switch

DeviceNet: 4 positions: 125, 250, 500K (Default), PGM (programmable over the network)
RS485: 3 positions: 9.6, 19.2, 38.4K (Default)
DeviceNet Communication Rate

125 - 500 Kbps (user selectable)
RS485CommunicationRate

9.6 - 38.4 Kbps (user selectable)
MAC ID Switches

DeviceNet: 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers; 7,0 to 9,9 are software ID numbers; (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3)
RS485: 2 switches, 10 positions; 0,0 to 9,9. Available MAC ID’s are 3,2 to 9,9.
Network Topology

DeviceNet: Linear (trunkline/dropline) power and signal on same network cable
RS485: Master/slave
Network Size

DeviceNet: Up to 64 nodes
RS485: Up to 32 nodes
Indicators

DeviceNet: LED network status (green/red) LED module status (green/red), Scrolling LED displays (piPC Type, Pressure Full Scale, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31)) Push Button Display toggles between (Pressure in TORR & KPA or PSI & KPA, Flow, Temperature and Scrolling display)
RS485: LED network status (green/red) LED module status (green/red)
Temperature Readout Units

°C
Temperature Accuracy

± 2°C
Temperature Resolution

0.1°C
Temperature Display Range

0 to 100°C
Weight

< 3 lbs (1.36 kg)

Specifications

Type

PC99 Absolute Pressure Controller with Mass Flow Meter
Pressure Range

1000 Torr, 2000 Torr, 100 Psia
Fitting Type

Swagelok 4 VCR Male, 1-1/8” surface mount (C-seal, W-seal)
Valve Position

Normally Closed or Normally Open
Valve Seat

PTFE (Teflon) or Sapphire (Metal)
Flow Rate

(sccm) 50, 200, 1000, 5000, 10000, 20000, 30000
Trip Points

Two open collector transistors, adjustable from 0 to 100% of Full Scale
Rated Current: 30VDC/250mA
State: On, above, or below trip point
Hysteresis: 3% of Full Scale (factory set)
Status: LEDs Red when the transistor is on
Pressure Readout Units

(For all Torr Full Scale ranges) Torr, kPa; (For Psi Full Scale Range) Psi, kPa
Pressure Resolution

0.1 Torr for 0 to 100 Torr, 1 Torr for >1000 Torr, 0.1 Psi for 0 to 100 Psi
Pressure Control Accuracy

± 0.2% of Full Scale (< 10% Full Scale); ± 1.0% of Reading (≥ 10% Full Scale)
Transducer Over Pressure Limit

2x Full Scale for all ranges
Maximum Differential Pressure

45 Psid
Burst Pressure

1500 Psig
Control Mode

Downstream
Pressure Measurement Accuracy

± 1.0% of Reading
Zero Temperature Coefficient

± 0.02% of Full Scale /°C
Span Temperature Coefficient

± 0.04% of Reading /°C
Control Range

> 2 to 100% of Full Scale
Typical Response Time

< 1.0 second
Operating Temperature

10 to 50°C (50 to 122°F)
Storage Temperature

-20 to 80°C (-4 to 176°F)
Storage Humidity

0 to 95% relative humidity, non-condensing
External Leak Integrity

<1 x 10^-10
Leak Integrity Through Closed Valve

<1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere)
Flow Measurement Range

2% to 100% of Full Scale
Flow Repeatability

± 0.2% of Full Scale

Flow Resolution

0.1% of Full Scale
Flow Accuracy

± 1.0% of Reading >10% of Full Scale (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
Flow Span Temperature Coefficient

< 0.08% of Reading/°C
Flow Zero Temperature Coefficient

<0.05% of Full Scale/°C
Wetted Materials

Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy, KM-45, Inconel® 718, 825 Incoloy®
Optional: (Valve Seat) PTFE (Teflon) or Sapphire (Metal)
Surface Finish

5 µinches, average Ra
Input Power

+15 to +24 VDC @ 350mA max
Connector

15-pin Type “D” Male
Set Point

0 to 10 VDC (Default), 0 to 5 VDC (User Switchable)
Flow Output Signal

0 to 5 VDC
Analog Output Minimum Impedance

< 1 Ω
Power Required

DeviceNet: +11 to +25 VDC per DeviceNet specification (@ <3.5 watts)
RS485: +15 to +24 VDC @ 350mA max
Connector-Interface

DeviceNet: 5 pin microconnnector (DeviceNet)
RS485: 9 pin Type D male
Data Rate Switch

DeviceNet: 4 positions: 125, 250, 500K (Default), PGM (programmable over the network)
RS485: 3 positions: 9.6, 19.2, 38.4K (Default)
DeviceNet Communication Rate

125 - 500 Kbps (user selectable)
RS485CommunicationRate

9.6 - 38.4 Kbps (user selectable)
MAC ID Switches

DeviceNet: 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers; 7,0 to 9,9 are software ID numbers; (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3)
RS485: 2 switches, 10 positions; 0,0 to 9,9. Available MAC ID’s are 3,2 to 9,9.
Network Topology

DeviceNet: Linear (trunkline/dropline) power and signal on same network cable
RS485: Master/slave
Network Size

DeviceNet: Up to 64 nodes
RS485: Up to 32 nodes
Indicators

DeviceNet: LED network status (green/red) LED module status (green/red), Scrolling LED displays (piPC Type, Pressure Full Scale, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31)) Push Button Display toggles between (Pressure in TORR & KPA or PSI & KPA, Flow, Temperature and Scrolling display)
RS485: LED network status (green/red) LED module status (green/red)
Temperature Readout Units

°C
Temperature Accuracy

± 2°C
Temperature Resolution

0.1°C
Temperature Display Range

0 to 100°C
Weight

< 3 lbs (1.36 kg)

Features

Digital or Analog I/O

The PC99 is available with either digital (DeviceNet or RS-485) or analog I/O allowing for straightforward integration into new or retrofit applications. In-situ tuning and component diagnostics are enhanced through the device’s standard Ethernet user interface accessible via virtually any PC with a web browser. The PC99’s bright, 4 digit rotatable display provides easy viewing of the device’s IP address as well as process pressure, flow, and temperature.