The πPC PC90 pressure controller provides pressure measurement and control of process critical pressures utilizing MKS Instruments’ industry leading Baratron capacitance manometer technology. The πPC is available with a Full Scale pressure from as low as 1000 torr up to 100 psia. Baratron capacitance manometers - well-known for their percent of Reading accuracy, stability and resolution – provide precise measurements at lower pressures and over a wider dynamic range than strain gage transducers. πPC is available in either an upstream or downstream pressure control configuration making it well suited for controlling process chamber backpressure or process gas delivery pressure.
πPC Absolute Pressure Controllers are available with the following options.
|Configuration Option||Option Code|
PC90 Absolute Pressure Controller
|Pressure Range Full Scale|
|Swagelok 4 VCR male||W|
|RS-485 (9 pin D) (No Display)||5|
|15 Pin D (Analog I/O) (No Display)||B|
|A (50 sccm)||A|
|#1 (200 sccm)||1|
|#2 (1000 sccm)||2|
|#3 (5000 sccm)||3|
|#4 (10000 sccm)||4|
|#5 (20000 sccm)||5|
|#6 (30000 sccm)||6|
|#7 (50000 sccm)||7|
|Valve Seal Material/Operation|
|Metal/NC (≤5000 sccm orifice only)||M|
|Teflon/NO (≤30000 sccm orifice only)||P|
|Firmware DeviceNet Version only|
|MKS will ship firmware revision current to date||20|
The πPC Pressure Controller is a self-contained, compact, closed-loop electronic pressure control system designed for a wide range of pressure and flow conditions. It contains a capacitance manometer, normally closed or normally open control valve and closed–loop control electronics. The πPC is available in either an upstream or downstream pressure control configuration making it well suited for controlling process chamber backpressure or process gas delivery pressure. With either digital (DeviceNet or RS-485) or analog I/O and its Ethernet setup and diagnostics capabilities, the πPC is easily integrated into the process tool.