Configuration Options

Description
  pipc pc90, pc99 integrated upstream pressure controller PC90 Integrated Pressure Controller, Closed Loop, Process-Critical

Specifications

  • Type
    πPC PC90 Absolute Pressure Controller
  • Pressure Range
    1000 Torr, 2000 Torr, 100 Psia Full Scale
  • Fitting Type
    Swagelok 4 VCR Male, 1-1/8” surface mount (C-seal, W-seal)
  • Valve Position
    Normally Closed or Normally Open
  • Valve Seat
    PTFE (Teflon) or Sapphire (Metal)
  • Flow Rate
    50, 200, 1000, 5000, 10000, 20000, 30000, 50000 sccm
  • Trip Points
    Two open collector transistors, adjustable from 0 to 100% of Full Scale
    Rated Current: 30VDC / 250mA
    State: On, above, or below trip point
    Hysteresis: 3% of Full Scale (factory set)
    Status: LEDs Red when the transistor is on
  • Pressure Readout Units
    (For all Torr Full Scale ranges) Torr, kPa; (For Psi Full Scale Range) Psi, kPa
  • Pressure Resolution
    0.1 Torr for 0 to 100 Torr, 1 Torr for >100 Torr, 0.1 Psi for 0 to 100 Psi
  • Pressure Control Accuracy
    ± 0.2% of Full Scale (< 10% Full Scale); ± 1.0% of Reading (≥ 10% Full Scale)
  • Transducer Over Pressure Limit
    2x Full Scale for all ranges
  • Maximum Differential Pressure
    45 Psid
  • Burst Pressure
    1500 Psig
  • Control Mode
    Upstream or Downstream
  • Pressure Measurement Accuracy
    ± 1.0% of Reading
  • Zero Temperature Coefficient
    ± 0.02% of Full Scale /°C
  • Span Temperature Coefficient
    ± 0.04% of Reading /°C
  • Control Range
    > 2 to 100% of Full Scale
  • Typical Response Time
    < 1.0 second
  • Operating Temperature
    10° to 50°C (50° to 122°F)
  • Storage Temperature
    -20° to 80°C (-4° to 176°F)
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • External Leak Integrity
    < 1 x 10-10
  • Leak Integrity Through Closed Valve
    < 1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere)
  • Wetted Materials
    Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy, KM-45, Inconel® 718, 825 Incoloy®
    Optional: (Valve Seat) PTFE (Teflon) or Sapphire (Metal)
  • Surface Finish
    5 µinches, average Ra
  • Input Power
    +15 to +24 VDC @ 350mA max
  • Connector
    15-pin Type “D” Male
  • Set Point
    0 to 10 VDC (Default), 0 to 5 VDC (User Switchable)
  • Analog Output Minimum Impedance
    < 1 Ω
  • Power Required
    DeviceNet: +11 to +25 VDC per DeviceNet specification (@ <3.5 watts)
    RS-485: +15 to +24 VDC @ 350mA max
  • Connector-Interface
    DeviceNet: 5 pin microconnector (DeviceNet)
    RS-485: 9 pin Type D male
  • Data Rate Switch
    DeviceNet: 4 positions: 125, 250, 500K (Default), PGM (programmable over the network)
    RS-485: 3 positions: 9.6, 19.2, 38.4K (Default)
  • DeviceNet Communication Rate
    125 Kbps, 250 Kbps, 500 Kbps (user selectable)
  • RS485CommunicationRate
    9.6 Kbps, 19.2 Kbps, 38.4 Kbps (user selectable)
  • MAC ID Switches
    DeviceNet: 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers; 7,0 to 9,9 are software ID numbers; (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3)
    RS-485: 2 switches, 10 positions; 0,0 to 9,9. Available MAC ID’s are 3,2 to 9,9.
  • Network Topology
    DeviceNet: Linear (trunkline/dropline) power and signal on same network cable
    RS-485: Master/slave
  • Network Size
    DeviceNet: Up to 64 nodes
    RS-485: Up to 32 nodes
  • Indicators
    DeviceNet: LED network status (green/red) LED module status (green/red), Scrolling LED displays (piPC Type, Pressure Full Scale, IP address) Push-Button Display toggles between (Pressure in TORR & KPA or PSI & KPA, Temperature and Scrolling display)
    RS-485: LED network status (green/red) LED module status (green/red)
  • Temperature Readout Units
    °C
  • Temperature Accuracy
    ± 2°C
  • Temperature Resolution
    0.1°C
  • Temperature Display Range
    0 to 100°C
  • Weight
    < 3 lbs (1.36 kg)

Features

Wide Range of Pressure and Flow

The πPC Pressure Controller is a self-contained, compact, closed-loop electronic pressure control system designed for a wide range of pressure and flow conditions. It contains a capacitance manometer, normally closed or normally open control valve and closed–loop control electronics. The πPC is available in either an upstream or downstream pressure control configuration making it well suited for controlling process chamber backpressure or process gas delivery pressure. With either digital (DeviceNet or RS-485) or analog I/O and its Ethernet setup and diagnostics capabilities, the πPC is easily integrated into the process tool.

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