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paragon 8.0 slm nf3 flow intelligent remote plasma source
Remote Plasma Source, 8 slm, NF3 Flow, Paragon

Specifications

  • Type
    AX7710MKS-01 Remote Plasma Source
  • Gas Supply During Ignition
    100% Ar for ignition only
  • Gas Supply Post Ignition
    Up to 8 slm of NF3 (post ignition NF3 can be added and the Ar removed)
  • NF3 Operation Reactant Output
    >95% dissociation across operating space, 1-10T, 1-8 slm
  • O2: NF3 Mix Operation Reactant Output
    >95% dissociation across operating space, 1-10T, 1-8 slm
  • Process Gas Feed & Exhaust
    Inlet Gas Connection KF40
    Outlet Gas Connection KF50
  • Duty Cycle
    2 sec on time minimum to 100% (process times >45 minutes)
  • Gas Flow
    During Ignition: 1 to 8 Torr @ 1 to 5 slm for Ar
    Post Ignition: 1 to 10 Torr @ 1 to 8 slm for NF3
  • Control Interface
    EtherCAT and analog I/O 25 pin D
  • Wetted Materials
    PEO coating, 6061-T6 Aluminum, Chemraz®, Alumina
  • Operating Temperature
    Ambient air 40°C max.
  • Cooling Water Required
    2.0 gpm, <30°C
  • Power Requirements
    208 VAC, 50/60 Hz, 35A, 3 phase (50A Service recommended)
  • Dimensions
    18.40 x 9.50 x 10.50 inches (467 x 241 x 267 mm nominal)
  • Weight
    54 lb. (24.5 Kg)
  • Compliance
    CE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1

Features

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