The PFC-20, Low Pressure πMFC mass flow controller provides maximum utilization of Safe Delivery Source gases. Implementation of the Low Pressure πMFC increases tool uptime by reducing the frequency of source gas cylinder changes. It offers accurate and precise control of low gas flows over a wide pressure range with source gas delivery pressure as low as 4 Torr. The patented valve and sensor designs offer exceptional zero stability and accuracy for all flow conditions while maintaining the ability to rapidly achieve set point and repeatably control the gas flow.
P2A Metal-sealed 20 sccm Mass Flow Controllers are available with the following options.
|P2A Mass Flow Controller||P2A|
|Gas (Per Semi Standard E52-0703)|
|Arsenic Pentaflouride (AsF5)||096|
|Boron Triflouride (BF3)||048|
|Germanium Tetraflouride (GeF4)||099|
|Hydrogen Selenide (H2Se)||023|
|Phosphorus Triflouride (PF3)||062|
|Silicon Tetraflouride (SiF4)||088|
|Other Gas Options||See Here|
|Flow Range Full Scale|
|2 sccm||Consult Factory|
|Fittings (compatible with)|
|4 VCR Male||R|
|9 pin D connector||A|
|15 pin D connector||B|
|Normally Closed, Teflon®||T|
Most gases used in the semiconductor industry are supplied at a constant pressure, typically above atmosphere, and are delivered to a process at or below atmosphere. Ion implant gases are now mostly supplied at sub-atmospheric pressure using SDS or VAC source gas technology.
These SDS gases are supplied at a sub-atmospheric pressure that decreases as the gas is consumed. This is a critical difference for the mass flow controller, as inlet pressure, was typically constant. Changing inlet pressure can impact an MFC’s capability to both meter and control flow accurately, as well as achieve set-point within an allowable time. The wider the range of inlet pressure that an MFC can control and meet performance criteria is critical to SDS gas utilization and tool uptime.
The πMFC-LP was specifically designed for SDS source gases and similar applications. It controls rapidly and accurately from initial SDS pressures of 650 Torr down to pressures well below 10 Torr at the MFC. The digital control electronics have been tuned to provide typical response times of less than 2 seconds. With its ability to accurately meter and control gas flow over this wide pressure range, the SDS source utilization is maximized resulting in fewer bottle changeouts, increased up-time and ultimately lower cost of ownership.
The πMFC multi-gas feature allows the user to configure an MFC off-the-shelf for its intended gas further lowering costs through reduced inventory requirements. This feature is enabled through a web browser utility accessed through the device’s Ethernet port. The configuration utility uses a standard web browser – no special software is required.
P-Series high performance MFCs feature full digital control architecture for fast response to setpoint over the operable device range. The embedded web browser application allows changes in gas type and full scale flow, which reduces overall costs by minimizing the number and variety of MFCs that must be kept in inventory.
|2||Flow Signal Output|
|9||Valve Test Point|
|1||Valve Test Point|
|2||Flow Signal Output|
|8||Set Point Input|