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Description
  p250a high performance, high flow 100-250 slm mass flow controller P250A Mass Flow Controller, High Flow, Multi-gas, Multi-range, 100 - 250 slm

Specifications

  • Full Scale Flow Range
    100 to 250 slm (N2 equivalent)
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    25 to 45 psid (with atmospheric pressure at the MFC outlet)
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Control Range
    2% to 100% of Full Scale
  • Typical Accuracy
    ±1% of set point for > 20% to 100% Full Scale
    ±0.2% of Full Scale for 2% to 20% Full Scale
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Reading
  • Zero Temperature Coefficient
    < 0.05% of Full Scale/°C
  • Span Temperature Coefficient
    < 0.08% of Reading/°C
  • Inlet Pressure Coefficient
    < 0.02% of Reading/psi
  • Typical Settling Time
    < 3 sec typical above 10% Full Scale @ 50 psi
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10° to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • Temperature Display
    0 to 85°C
  • Temperature Accuracy
    ± 2°C
  • Temperature Resolution
    0.1°C
  • Display
    4 digits for value, 4 characters for unit
  • Fitting Type
    Swagelok® 8 VCR®
  • External Leak Integrity
    < 1 x 10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    < 1.0% of configured Full Scale at 40 psia to vac (<500 mTorr)
  • Wetted Materials
    316L S.S. VAR, 316 S.S., Elgiloy, 430FR, Buna-N, nickel, polyimide
  • Surface Finish
    10 µinch average Ra
  • Weight
    3 lbs (1.4 kg)
  • Compliance
    CE Compliant to 89/336/EEC
  • DeviceNet Input Power Required
    +11 to +25 VDC per DeviceNet™ specification (@ < 9 watts)
  • DeviceNet Connector
    5 pin microconnnector
  • DeviceNet Data Rate Switch Selection
    4 positions: 125, 250, 500K (Default), GM (programmable over the network)
  • DeviceNet Network Size
    Up to 64 nodes
  • DeviceNet Network Topology
    Linear (trunkline/dropline) power and signal on same network cable

Features

Short Process Steps Performance

The P250A’s performance capabilities of fast settling time (less than 2 seconds) and one (1) percent of set point accuracy exceed those of other typical high flow MFCs. Control capability extends down to 2% of the device’s configured Full Scale. These capabilities combined with the devices multi-gas/multi-range capability extend the users ability to minimize required high flow MFC inventory for MOCVD, silicon epitaxy, RTP and diffusion/ oxidation applications.

Multi-Gas / Multi-Range Capability

Utilization of the multi-gas/multi-range capability is made simple through the device’s embedded software and standard Ethernet interface that requires no special software or hardware to operate, only a standard web browser and a PC. Already stored on the device are critical gas parameters for typical high flow rate gases in use. It’s simply a matter of selecting the gas and specifying the Full Scale flow range to configure the device. This interface also allows the user to perform device diagnostics, plot flow and store data for offline analysis.

P Series Mass Flow Controller Overview

P-Series high performance MFCs feature full digital control architecture for fast response to setpoint over the operable device range. The embedded web browser application allows changes in gas type and full scale flow, which reduces overall costs by minimizing the number and variety of MFCs that must be kept in inventory.

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