Compare Model Drawings, CAD & Specs Availability Price
o3mega ozone gas delivery with electronic gas & pressure control
Ozone Delivery Subsystem, 0.5 - 20 slm, Electronic Gas & Pressure Control, O3MEGA


  • Type
    Rack Mounted
  • Ozone Output
    25 - 225 g/hr
  • Flow Rate
    0.5 - 20 slm
  • Feed Gas
    Oxygen: Grade 6 or better O2
    Nitrogen: 20 – 100 ppm grade 5 or better N2
    CO2: 1000 – 2000 ppm grade 5 or better CO2
  • Operating Temperature
    20 – 40°C (68 – 104°F)
  • Nominal Cell Pressure (Delivery)
    0.7 – 3.1 bargauge (10 – 45 psig)
  • Control Interface
    Front Panel Control and Remote Operation
  • Cooling Water Temperature Required
    17 – 23°C (63 – 73°F)
  • Cooling Water Filtration Required
    100 microns
  • Cooling Water Quality Required
    Resistivity ≥ 50 KΩ/cm
  • Cooling Water Minimum Flow Required
    0.95 – 7.60 l/min minimum (configuration dependent)
  • Voltage Requirements
    208 VAC, 3 Ø
  • Current Requirements
    Nominal Current 5A – 12A max (configuration dependent)
  • Frequency
    50/60 Hz
  • Dimensions
    482 x 429 x 267 mm (19 x 16.89 x 10.5 in)
  • Weight
    40 kg (88 lb)
  • Altitude
    SEMI S2-0302, SEMI F47, UL 61010-1, CAN/CSA-61010-1


60% Less Space Required than Competing Offerings

  • Full ozone delivery subsystem in a generator sized package
  • Easily incorporated into your tool
  • No tool maintenance shadow footprint
  • Also available for AX8555 stand-alone multi-channel remote delivery system

High Ozone Output

  • Concentration up to 20wt% (300 g/m3)
  • Flow rates from 0.5 to 20 slm
  • Patented ozone cells with advanced cooling

No Manual Set-up or Adjustment

  • Full electronic control including closed loop ozone concentration control with integrated process monitor
    • MFC control for O2 & dopant gas
    • Electronic pressure control for stable operation during process point change
  • Flexible remote interface including discreet analog signals, RS232 and TOOLweb® for seamless integration and system monitoring

Ultraclean Ozone for Advanced Applications

  • Extremely low levels of dopant gas reduces contaminants
  • Can be used with both N2 and CO2
  • Lowest levels of NOx compounds at ultrahigh concentrations

Clean, Safe Alternative to Conventional Chemical Processing

  • High redox potential
  • Can be generated at the point-of-use
  • Green chemical, easily converted back to oxygen

Low Cost of Ownership

  • Uniquely configurable for optimum ozone output - flow, output, pressure
  • No consumables, no preventive maintenance
  • No chemical disposal costs

60% More Compact

The O3MEGA system retains the compact size of MKS AX8400 Series ozone generators and includes not only ozone generation but concentration monitoring, flow control and pressure control. The result- it is 60% more compact than competing ozone delivery systems. It is also the first ozone delivery system that can be designed directly into your tool structure or be integrated into a stand-alone MKS AX8555 multi-channel ozone delivery system.

Patented Ozone Generator Cell Technology

The O3MEGA system uses MKS patented ozone generator cell technology to convert pure oxygen into ozone through silent electrical discharge and achieves the highest ozone concentration levels available. MKS ozone generators are the highest purity ultra high concentration ozone generators on the market. The combination of generator design, high purity wetted materials and extremely minute levels of dopant gas (far below the levels required for competitive ozone generators), result in ultraclean ozone and the lowest levels of contaminants, e.g. NOx compounds, available at ultra high concentrations.

Need help?

Contact an Applications Specialist by sending us an email