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o3mega ozone gas delivery with electronic gas & pressure control
Ozone Delivery Subsystem, 0.5 - 20 slm, Electronic Gas & Pressure Control, O3MEGA

Specifications

  • Type
    Rack Mounted
  • Ozone Output
    25 - 225 g/hr
  • Flow Rate
    0.5 - 20 slm
  • Feed Gas
    Oxygen: Grade 6 or better O2
    Nitrogen: 20 – 100 ppm grade 5 or better N2
    CO2: 1000 – 2000 ppm grade 5 or better CO2
  • Operating Temperature
    20 – 40°C (68 – 104°F)
  • Nominal Cell Pressure (Delivery)
    0.7 – 3.1 bargauge (10 – 45 psig)
  • Control Interface
    Front Panel Control and Remote Operation
  • Cooling Water Temperature Required
    17 – 23°C (63 – 73°F)
  • Cooling Water Filtration Required
    100 microns
  • Cooling Water Quality Required
    Resistivity ≥ 50 KΩ/cm
  • Cooling Water Minimum Flow Required
    0.95 – 7.60 l/min minimum (configuration dependent)
  • Voltage Requirements
    208 VAC, 3 Ø
  • Current Requirements
    Nominal Current 5A – 12A max (configuration dependent)
  • Frequency
    50/60 Hz
  • Dimensions
    482 x 429 x 267 mm (19 x 16.89 x 10.5 in)
  • Weight
    40 kg (88 lb)
  • Altitude
    SEMI S2-0302, SEMI F47, UL 61010-1, CAN/CSA-61010-1

Features

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