The O3MEGA is a compact, integrated ozone solution that incorporates field-proven, high concentration, ultraclean ozone generation technology, an integrated ozone concentration monitor, flow control for both O2 and dopant gas species, as well as an electronic pressure controller. Designed for maximum flexibility, O3MEGA subsystems are the smallest, most complete ozone delivery system available.
60% Less Space Required than Competing Offerings
High Ozone Output
No Manual Set-up or Adjustment
Ultraclean Ozone for Advanced Applications
Clean, Safe Alternative to Conventional Chemical Processing
Low Cost of Ownership
The O3MEGA system retains the compact size of MKS AX8400 Series ozone generators and includes not only ozone generation but concentration monitoring, flow control and pressure control. The result- it is 60% more compact than competing ozone delivery systems. It is also the first ozone delivery system that can be designed directly into your tool structure or be integrated into a stand-alone MKS AX8555 multi-channel ozone delivery system.
The O3MEGA system uses MKS patented ozone generator cell technology to convert pure oxygen into ozone through silent electrical discharge and achieves the highest ozone concentration levels available. MKS ozone generators are the highest purity ultra high concentration ozone generators on the market. The combination of generator design, high purity wetted materials and extremely minute levels of dopant gas (far below the levels required for competitive ozone generators), result in ultraclean ozone and the lowest levels of contaminants, e.g. NOx compounds, available at ultra high concentrations.