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Purity FTIR Gas Analyzer, MultiGas™ 2032, Real-Time Trace Impurity Detection


  • Measurement Technique
    FTIR Spectrometry
  • Measurable Gases & Vapors
    Most molecules except for N2, H2, and O2
  • Measurable Range
    Full scale concentration setting between 10ppb and 100% full scale
  • FTIR
    2102 Process FTIR
  • Spectral Resolution
    0.5 – 128 cm-1
  • Scan Speed
    2 scans/sec @ 0.5 cm-1
  • Scan Time
    1-300 sec
  • Infrared Source
    Silicon Carbide @ 1200°C
  • Reference Laser
    Helium Neon (15798.2 cm-1)
  • Detector
    LN2 -cooled MCT; TE -cooled MCT
  • Purge Pressure
    20 psig (1.5 bar) max.
  • Spectrometer Purge Flow
    4 L/min of purified ultra pure N2
  • Optics Purge Flow
    4 L/min of purified ultra pure N2
  • Pressure Transducer
    Baratron Capacitance Manometer
  • Purge Connection
    ¼ inch VCR type
  • Computer Requirements
    Desktop or notebook Intel Pentium® PC under Microsoft® Windows® 95/98/NT/2000/Me and xGA display (1024 x 768)
  • Communication
    GPIB, RS232/422/485
  • Enclosure
    19 inch rack mount chassis
  • Dimensions
    17.5 in. W x 12.5 in. H x 25.5 in. D
  • Power Requirements
    120 or 240 VAC, 50/60 Hz, 6 amps
  • Weight
    125 lbs. (57 kg)
  • Sample Temperature
    Ambient to 60°C (calibration temperature dependent)
  • Sample Flow
    0.2 – 10 L/min
  • Sample Pressure
    0.01 – 8 atm (calibration pressure dependent)
  • Gas Cell Materials
    Welded 316 stainless steel
  • Fittings
    ¼ inch VCR®
  • Tubing
    Heated ¼ inch stainless steel
  • Mirrors
    Nickel plated aluminum substrate, with rugged gold coating
  • Windows
    CaF2, KBr, ZnSe (others available)
  • O-rings
    Viton® (others available)


Spectral Analysis

Ammonia Spectrum with Water Quantification Region

The MultiGas 2032 Purity analyzer features robust quantitative analysis software, which can analyze and report impurity concentrations. The gas temperature and pressure are maintained at pre-determined levels and monitored for process fluctuations.

Through advanced spectral analysis, the MultiGas 2032 Purity analyzer can provide highly accurate sample readings without baseline variations or instrument drift. Interferograms are collected at high resolution, deconvolved, and then compared to the sample spectrum to determine the component spectra. These spectra, along with the calibration curves for the impurities, are used to derive the impurity concentration. This analysis is completely automated, and performed by classical least squares regression. Data display formats include concentration histories in graphical and tabular formats, the measured spectrum and spectral residuals.

The residual spectrum is a visual indicator of potential quantitative errors which simplifies QA/QC. The spectral residuals represent the ''left-over'' spectral information, after all the reference spectra have been subtracted at their calculated values. Once spectra have been collected and saved, these spectra may be reprocessed at any time using the same or different calibration sets.

System Hardware

The 5.11 m pathlength, 200 mL volume, long path gas cell measures 8½'' x 2'' x 3½''.

The 2102 Process FTIR Spectrometer is a compact process spectrometer capable of operating at spectral resolutions up to 0.5 cm-1 resolution.

This spectrometer is coupled to a patented low volume (200 mL) multi-pass gas cell with a 5.11 meter effective pathlength. The patented design of this cell incorporates aspheric, aberration-correcting mirrors which provide more than twice the optical throughput of a conventional multipass gas cell. For purity analysis, ambient temperature and pressure are monitored to ensure optimal sensitivity

For compatibility with high purity applications, the gas cell body is constructed of nickel-plated 316 SS. The gas inlet and outlet connections are also 316 SS, and feature VCR® fittings. In addition, proprietary technology provides an ultra-low contamination seal for the gas cell mirrors and windows.

The analyzer also features automated bake-out functionality, which is unique to the MultiGas 2032 Purity. This automated bakeout sequence features single push button operation to dry the analyzer.

System Calibration

The MultiGas software features multi-point calibration curves that minimize errors due to spectral non-linearity. These impurity calibrations are provided with each instrument. Software utilities verify instrument performance to prevent calibration drift.

Graphical User Interface for Calibration
Residual Spectra: Calibration subtracted from sample demonstrates analysis quality


Continuous monitoring of trace contaminants in high purity bulk gases in production environments, including:

  • H2O, CO, CO2, N2O and CH4 in NH3
  • H2O, CO, CO2, N2O and HF in NF3
  • H2O, CO, CO2, HF, HCI, NH3, CH2CI2 and CHCI3 in H2
  • H2O, CO, CO2, CH4, and NH3 in N2O

Detection Limits

High resolution allows differentiation - speciates between water and NF3

Low-level detection limits for the 5.11 meter gas cell and a mercury-cadmium-telluride (MCT) detector at 0.5 cm-1 resolution for typical gases in pure corrosives:

Name Formula Bulk Media Typical Detection Limit*
Water H2O NH3 , NF3 , N2O, PH3 , AsH3 20 ppb
Carbon Dioxide CO2 NH3 and NF3 5 ppb
Carbon Monoxide CO NH3 and NF3 6 ppb
Hydrofluoric Acid HF NF3 9 ppb
Methane CH4 NH3 15 ppb
Nitrous Oxide N2O NF3 3 ppb

* With 20/20™ cell and 2 minute measurement

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