The MultiGas™ 2032 Purity Analyzer is an FTIR based analyzer capable of ppb contaminant detection in high purity bulk process gases. Bulk gas production quality has been improved with the MultiGas 2032 Purity Analyzer for such gases as NH3 , NF3 , and hydrogen. It is composed of a 2102 Process FTIR Spectrometer, high-optical-throughput sampling cell, and applications-specific analysis software. These integrated components, along with automated bake-out functionality, provide unmatched precision and accuracy for bulk gas contaminant monitoring.
The MultiGas 2032 Purity analyzer features robust quantitative analysis software, which can analyze and report impurity concentrations. The gas temperature and pressure are maintained at pre-determined levels and monitored for process fluctuations.
Through advanced spectral analysis, the MultiGas 2032 Purity analyzer can provide highly accurate sample readings without baseline variations or instrument drift. Interferograms are collected at high resolution, deconvolved, and then compared to the sample spectrum to determine the component spectra. These spectra, along with the calibration curves for the impurities, are used to derive the impurity concentration. This analysis is completely automated, and performed by classical least squares regression. Data display formats include concentration histories in graphical and tabular formats, the measured spectrum and spectral residuals.
The residual spectrum is a visual indicator of potential quantitative errors which simplifies QA/QC. The spectral residuals represent the ''left-over'' spectral information, after all the reference spectra have been subtracted at their calculated values. Once spectra have been collected and saved, these spectra may be reprocessed at any time using the same or different calibration sets.
The 2102 Process FTIR Spectrometer is a compact process spectrometer capable of operating at spectral resolutions up to 0.5 cm-1 resolution.
This spectrometer is coupled to a patented low volume (200 mL) multi-pass gas cell with a 5.11 meter effective pathlength. The patented design of this cell incorporates aspheric, aberration-correcting mirrors which provide more than twice the optical throughput of a conventional multipass gas cell. For purity analysis, ambient temperature and pressure are monitored to ensure optimal sensitivity
For compatibility with high purity applications, the gas cell body is constructed of nickel-plated 316 SS. The gas inlet and outlet connections are also 316 SS, and feature VCR® fittings. In addition, proprietary technology provides an ultra-low contamination seal for the gas cell mirrors and windows.
The analyzer also features automated bake-out functionality, which is unique to the MultiGas 2032 Purity. This automated bakeout sequence features single push button operation to dry the analyzer.
Low-level detection limits for the 5.11 meter gas cell and a mercury-cadmium-telluride (MCT) detector at 0.5 cm-1 resolution for typical gases in pure corrosives:
|Name||Formula||Bulk Media||Typical Detection Limit*|
|Water||H2O||NH3 , NF3 , N2O, PH3 , AsH3||20 ppb|
|Carbon Dioxide||CO2||NH3 and NF3||5 ppb|
|Carbon Monoxide||CO||NH3 and NF3||6 ppb|
|Hydrofluoric Acid||HF||NF3||9 ppb|
|Nitrous Oxide||N2O||NF3||3 ppb|
* With 20/20™ cell and 2 minute measurement