Configuration Options

Description
  mf1 compact, elastomer-sealed 10-50,000 sccm mass flow controller MF1 Mass Flow Controller, Elastomer-sealed, 10 sccm to 50 slm, Metal Sensor

Specifications

  • Full Scale Flow Range
    10, 20, 50, 100, 200, 500, 1,000, 2,000, 5,000, 10,000, 20,000, 30,000, 50,000 sccm (N2 equivalent)
  • Maximum Inlet Pressure
    10 bar(g)
  • Normal Operating Pressure Differential
    10 to 5000 sccm: 0.7 to 2.7 bar (d)
    10000 to 20000 sccm: 1.0 to 2.7 bar (d)
    (with atmospheric pressure at the MFC outlet)
  • Proof Pressure
    10 bar
  • Burst Pressure
    50 bar
  • Control Range
    2% to 100% of Full Scale
  • Typical Accuracy
    ±(0.5% of reading +0.2% of Full Scale)
  • Repeatability
    ±0.2% of Full Scale
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.04% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Pressure Coefficient
    <0.02% of reading/psi
  • Typical Settling Time
    <800 msec
  • Warm-up Time
    15 minutes
  • Operating Temperature
    0° to 40°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • External Leak Integrity
    <1 x 10-9 mbar l/sec (He) (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1 x 10-5 mbar l/sec (He) at 1.7 bar(g) inlet to atmosphere
  • Wetted Materials
    Standard: 1.4301 S.S. (V2A, ANSI 304), FKM, Nickel
    Optional: NBR, FFKM (seals and valve seal)
  • Surface Finish
    6.3µ Rz
  • Weight
    1.6 lbs (0.7 kg)
  • Compliance
    CE
  • Power Requirements
    ±15 VDC or +24 VDC (300mA)
  • Power Connector
    Standard Industrial Terminal, 3.81 mm pitch
  • Setup Connector
    USB Setup Interface micro-B

Features

Compact Footprint

The small 2.8 x 1 inch (77 x 25 mm) footprint enables compact gas supply systems with improved performance compared to existing mass flow controllers. The MF1 employs the latest design in thermal sensors for mass flow measurement, with fast acting proportioning valve and control circuitry for fast settling time. The control valve is normally closed. Mass Flow Meter (MFM) versions of the MF1 are also available.

Multiple Available Process Interfaces

Various process interfaces are available for easy compatibility with tool controllers including:

  • Analog
  • USB
  • PROFIBUS-DP
  • Modbus/ RS485
  • Modbus TCP
  • EtherCAT
  • PROFINET

Need help?

Contact an Applications Specialist by sending us an email