Configuration Options

Description
  mf1 compact, elastomer-sealed 10-50,000 sccm mass flow controller MF1 Mass Flow Controller, Elastomer-sealed, 10 sccm to 50 slm, Metal Sensor

Specifications

  • Full Scale Flow Range
    10, 20, 50, 100, 200, 500, 1,000, 2,000, 5,000, 10,000, 20,000, 30,000, 50,000 sccm (N2 equivalent)
  • Maximum Inlet Pressure
    10 bar(g)
  • Normal Operating Pressure Differential
    10 to 5000 sccm: 0.7 to 2.7 bar (d)
    10000 to 20000 sccm: 1.0 to 2.7 bar (d)
    (with atmospheric pressure at the MFC outlet)
  • Proof Pressure
    10 bar
  • Burst Pressure
    50 bar
  • Control Range
    2% to 100% of Full Scale
  • Typical Accuracy
    ±(0.5% of reading +0.2% of Full Scale)
  • Repeatability
    ±0.2% of Full Scale
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.04% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Pressure Coefficient
    <0.02% of reading/psi
  • Typical Settling Time
    <800 msec
  • Warm-up Time
    15 minutes
  • Operating Temperature
    0° to 40°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • External Leak Integrity
    <1 x 10-9 mbar l/sec (He) (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1 x 10-5 mbar l/sec (He) at 1.7 bar(g) inlet to atmosphere
  • Wetted Materials
    Standard: 1.4301 S.S. (V2A, ANSI 304), FKM, Nickel
    Optional: NBR, FFKM (seals and valve seal)
  • Surface Finish
    6.3µ Rz
  • Power Requirements
    ±15 VDC or +24 VDC (300mA)
  • Power Connector
    Standard Industrial Terminal, 3.81 mm pitch
  • Setup Connector
    USB Setup Interface micro-B
  • Weight
    1.6 lbs (0.7 kg)
  • Compliance
    CE

Features

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