Digital Metal-sealed 200 slm Mass Flow Controllers
Overview
- Reduces process cycle times due to fast gas settling times
- Enables better chamber matching through increased MFC accuracy
- Increases tool uptime through reduction on “No Problem Found” MFC replacements
- Reduces MFC inventory through multi-gas, multi-range capability
- Reduces gas panel size due to smallest footprint for high flow MFCs
Products
| Compare | Model | Drawings, CAD & Specs | Availability | Price | |||
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Mass Flow Controller, 200 slm, 8 VCR Male, DeviceNet, Viton Valve Plug
$3,850
4 Weeks
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MC20A01322LM26V10 Mass Flow Controller, 200 slm, 8 VCR Male, DeviceNet, Viton Valve Plug |
4 Weeks
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$3,850 |
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MC20A01322LM2BV Mass Flow Controller, 200 slm, 8 VCR Male, DB15, Viton Valve Plug |
4 Weeks
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$3,850 |
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MC20A01322LM2EV Mass Flow Controller, 200 slm, 8 VCR Male, DeviceNet, Viton Valve Plug |
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MC20A01322LR26V10 Mass Flow Controller, 200 slm, 4 VCR Male, DeviceNet, Viton Valve Plug |
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MC20A01322LR2BV Mass Flow Controller, 200 slm, 4 VCR Male, DB15, Viton Valve Plug |
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MC20A01322LR2EV Mass Flow Controller, 200 slm, 4 VCR Male, DB15, Viton Valve Plug |
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Configuration Options
Please see the MC20A datasheet for product options.
Specifications
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Fitting TypeSwagelok® 4 VCR® male (50 slm)
Swagelok® 8 VCR® male (50, 100, 200 slm) -
Analog I/O Connector15-pin Type "D"
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Power Requirements±15 VDC (9 Watts)
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Set Point Command Signal0 to 5 VDC
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Wetted Materials316L S.S. VAR, 316L S.S., Elgiloy®, Nickel
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Valve Seat MaterialViton®, Buna-N, Kalrez®
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External Leak Integrity< 1 x 10-10
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Leak Integrity Through Closed Valve<1.0% of F.S. at 25 psig to vacuum
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Compliance16µ inch average Ra
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Weight2 lbs (0.9 kg)
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DeviceNet Network SizeUp to 64 nodes
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DeviceNet MAC ID Switches Addresses2 switches, 10 positions
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DeviceNet Network TopologyLinear (trunkline/dropline) power and signal on same network cable
Features
Cost Saving Design
Cost savings to users are seen through several innovative enhancements. To reduce the number of MFCs in inventory, users can recall specific MFC gas calibrations and flow ranges from up to 20 stored gas tables, configuring the ALTA MFC right off the shelf. The ALTA represents MKS’s ongoing dedication to helping customers increase productivity while reducing system costs.
Resources
Literature
Manuals
- ALTA MC20 DeviceNet™ Mass Flow Controller Manual (1 MB, PDF)
- MC20A Analog I/O Mass Flow Controller Manual (755.3 kB, PDF)
- MC20A ALTA™ Mass Flow Controller Pin-outs (74.3 kB, PDF)
Ultra-High Velocity