Compare Model Drawings, CAD & Specs Full Scale Flow Range Fitting Type Availability Price
mc20a digital metal-sealed 200 slm mass flow controllers
MC20A01322LM26V10
Mass Flow Controller, 200 slm, 8 VCR Male, DeviceNet, Viton Valve Plug
$3,850
4 Weeks
 MC20A01322LM26V10 Mass Flow Controller, 200 slm, 8 VCR Male, DeviceNet, Viton Valve Plug 200 slm 8 VCR male
4 Weeks
 $3,850
mc20a digital metal-sealed 200 slm mass flow controllers
MC20A01322LM2BV
Mass Flow Controller, 200 slm, 8 VCR Male, DB15, Viton Valve Plug
$3,850
4 Weeks
 MC20A01322LM2BV Mass Flow Controller, 200 slm, 8 VCR Male, DB15, Viton Valve Plug 200 slm 8 VCR male
4 Weeks
 $3,850
mc20a digital metal-sealed 200 slm mass flow controllers
MC20A01322LM2EV
Mass Flow Controller, 200 slm, 8 VCR Male, DeviceNet, Viton Valve Plug
Contact Us
 MC20A01322LM2EV Mass Flow Controller, 200 slm, 8 VCR Male, DeviceNet, Viton Valve Plug 200 slm 8 VCR male
Contact Us
mc20a digital metal-sealed 200 slm mass flow controllers
MC20A01322LR26V10
Mass Flow Controller, 200 slm, 4 VCR Male, DeviceNet, Viton Valve Plug
Contact Us
 MC20A01322LR26V10 Mass Flow Controller, 200 slm, 4 VCR Male, DeviceNet, Viton Valve Plug 200 slm 4 VCR male
Contact Us
mc20a digital metal-sealed 200 slm mass flow controllers
MC20A01322LR2BV
Mass Flow Controller, 200 slm, 4 VCR Male, DB15, Viton Valve Plug
Contact Us
 MC20A01322LR2BV Mass Flow Controller, 200 slm, 4 VCR Male, DB15, Viton Valve Plug 200 slm 4 VCR male
Contact Us
mc20a digital metal-sealed 200 slm mass flow controllers
MC20A01322LR2EV
Mass Flow Controller, 200 slm, 4 VCR Male, DB15, Viton Valve Plug
Contact Us
 MC20A01322LR2EV Mass Flow Controller, 200 slm, 4 VCR Male, DB15, Viton Valve Plug 200 slm 4 VCR male
Contact Us

Configuration Options

Description
  mc20a digital metal-sealed 200 slm mass flow controllers MC20A Mass Flow Controller, Metal Seal, 50,000 - 200,000 sccm
 Show Configuration Options

Specifications

  • Fitting Type
    Swagelok® 4 VCR® male (50 slm)
    Swagelok® 8 VCR® male (50, 100, 200 slm)
  • Analog I/O Connector
    15-pin Type "D"
  • Power Requirements
    ±15 VDC (9 Watts)
  • Set Point Command Signal
    0 to 5 VDC
  • Wetted Materials
    316L S.S. VAR, 316L S.S., Elgiloy®, Nickel
  • Valve Seat Material
    Viton®, Buna-N, Kalrez®
  • External Leak Integrity
    < 1 x 10-10
  • Leak Integrity Through Closed Valve
    <1.0% of F.S. at 25 psig to vacuum
  • Compliance
    16µ inch average Ra
  • Weight
    2 lbs (0.9 kg)
  • DeviceNet Network Size
    Up to 64 nodes
  • DeviceNet MAC ID Switches Addresses
    2 switches, 10 positions
  • DeviceNet Network Topology
    Linear (trunkline/dropline) power and signal on same network cable

Features

Cost Saving Design

Cost savings to users are seen through several innovative enhancements. To reduce the number of MFCs in inventory, users can recall specific MFC gas calibrations and flow ranges from up to 20 stored gas tables, configuring the ALTA MFC right off the shelf. The ALTA represents MKS’s ongoing dedication to helping customers increase productivity while reducing system costs.

Resources

Need help?

Contact an Applications Specialist by sending us an email