Digital Metal-sealed 200 slm Mass Flow Controllers
Overview
- Reduces process cycle times due to fast gas settling times
- Enables better chamber matching through increased MFC accuracy
- Increases tool uptime through reduction on “No Problem Found” MFC replacements
- Reduces MFC inventory through multi-gas, multi-range capability
- Reduces gas panel size due to smallest footprint for high flow MFCs
Products
| Compare | Model | Drawings, CAD & Specs | Availability | Price | |||
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Mass Flow Controller, 200 slm, 8 VCR Male, DeviceNet, Viton Valve Plug
$3,850
4 Weeks
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MC20A01322LM26V10 Mass Flow Controller, 200 slm, 8 VCR Male, DeviceNet, Viton Valve Plug |
4 Weeks
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$3,850 |
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MC20A01322LM2BV Mass Flow Controller, 200 slm, 8 VCR Male, DB15, Viton Valve Plug |
4 Weeks
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$3,850 |
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MC20A01322LM2EV Mass Flow Controller, 200 slm, 8 VCR Male, DeviceNet, Viton Valve Plug |
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MC20A01322LR26V10 Mass Flow Controller, 200 slm, 4 VCR Male, DeviceNet, Viton Valve Plug |
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MC20A01322LR2BV Mass Flow Controller, 200 slm, 4 VCR Male, DB15, Viton Valve Plug |
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MC20A01322LR2EV Mass Flow Controller, 200 slm, 4 VCR Male, DB15, Viton Valve Plug |
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Configuration Options
Please see the MC20A datasheet for product options.
Specifications
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Fitting TypeSwagelok® 4 VCR® male (50 slm)
Swagelok® 8 VCR® male (50, 100, 200 slm) -
Analog I/O Connector15-pin Type "D"
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Power Requirements±15 VDC (9 Watts)
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Set Point Command Signal0 to 5 VDC
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Wetted Materials316L S.S. VAR, 316L S.S., Elgiloy®, Nickel
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Valve Seat MaterialViton®, Buna-N, Kalrez®
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External Leak Integrity< 1 x 10-10
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Leak Integrity Through Closed Valve<1.0% of F.S. at 25 psig to vacuum
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Compliance16µ inch average Ra
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Weight2 lbs (0.9 kg)
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DeviceNet Network SizeUp to 64 nodes
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DeviceNet MAC ID Switches Addresses2 switches, 10 positions
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DeviceNet Network TopologyLinear (trunkline/dropline) power and signal on same network cable
Resources
Literature
Manuals
- ALTA MC20 DeviceNet™ Mass Flow Controller Manual (1 MB, PDF)
- MC20A Analog I/O Mass Flow Controller Manual (755.3 kB, PDF)
- MC20A ALTA™ Mass Flow Controller Pin-outs (74.3 kB, PDF)
Ultra-High Velocity