Compare Model Drawings, CAD & Specs Full Scale Flow Range Fitting Type Availability Price
mc20a digital metal-sealed 200 slm mass flow controllers
Mass Flow Controller, 200 slm, 8 VCR Male, DeviceNet, Viton Valve Plug
$3,850
4 Weeks
200 slm 8 VCR male
4 Weeks
mc20a digital metal-sealed 200 slm mass flow controllers
Mass Flow Controller, 200 slm, 8 VCR Male, DB15, Viton Valve Plug
$3,850
4 Weeks
200 slm 8 VCR male
4 Weeks
mc20a digital metal-sealed 200 slm mass flow controllers
Mass Flow Controller, 200 slm, 8 VCR Male, DeviceNet, Viton Valve Plug
200 slm 8 VCR male
mc20a digital metal-sealed 200 slm mass flow controllers
Mass Flow Controller, 200 slm, 4 VCR Male, DeviceNet, Viton Valve Plug
200 slm 4 VCR male
mc20a digital metal-sealed 200 slm mass flow controllers
Mass Flow Controller, 200 slm, 4 VCR Male, DB15, Viton Valve Plug
200 slm 4 VCR male
mc20a digital metal-sealed 200 slm mass flow controllers
Mass Flow Controller, 200 slm, 4 VCR Male, DB15, Viton Valve Plug
200 slm 4 VCR male

Configuration Options

Description
  mc20a digital metal-sealed 200 slm mass flow controllers MC20A Mass Flow Controller, Metal Seal, 50,000 - 200,000 sccm

Specifications

  • Fitting Type
    Swagelok® 4 VCR® male (50 slm)
    Swagelok® 8 VCR® male (50, 100, 200 slm)
  • Analog I/O Connector
    15-pin Type "D"
  • Power Requirements
    ±15 VDC (9 Watts)
  • Set Point Command Signal
    0 to 5 VDC
  • Wetted Materials
    316L S.S. VAR, 316L S.S., Elgiloy®, Nickel
  • Valve Seat Material
    Viton®, Buna-N, Kalrez®
  • External Leak Integrity
    < 1 x 10-10
  • Leak Integrity Through Closed Valve
    <1.0% of F.S. at 25 psig to vacuum
  • Compliance
    16µ inch average Ra
  • Weight
    2 lbs (0.9 kg)
  • DeviceNet Network Size
    Up to 64 nodes
  • DeviceNet MAC ID Switches Addresses
    2 switches, 10 positions
  • DeviceNet Network Topology
    Linear (trunkline/dropline) power and signal on same network cable

Features

Cost Saving Design

Cost savings to users are seen through several innovative enhancements. To reduce the number of MFCs in inventory, users can recall specific MFC gas calibrations and flow ranges from up to 20 stored gas tables, configuring the ALTA MFC right off the shelf. The ALTA represents MKS’s ongoing dedication to helping customers increase productivity while reducing system costs.

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