Sorry, this family of products is no longer available. For recommended replacements see mass-flow-controllers.
Digital Metal-sealed 200 slm Mass Flow Controllers
Overview
ALTA Mass Flow Controllers (MFC) feature fast gas settling times to meet the productivity demands of next generation process tools. To facilitate better chamber matching, the ALTA features improved accuracy to 1% of set point.
Specifications
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Fitting TypeSwagelok® 4 VCR® male (50 slm)
Swagelok® 8 VCR® male (50, 100, 200 slm) -
Analog I/O Connector15-pin Type "D"
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Power Requirements±15 VDC (9 Watts)
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Set Point Command Signal0 to 5 VDC
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Wetted Materials316L S.S. VAR, 316L S.S., Elgiloy®, Nickel
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Valve Seat MaterialViton®, Buna-N, Kalrez®
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External Leak Integrity< 1 x 10-10
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Leak Integrity Through Closed Valve<1.0% of F.S. at 25 psig to vacuum
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Compliance16µ inch average Ra
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Weight2 lbs (0.9 kg)
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DeviceNet Network SizeUp to 64 nodes
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DeviceNet MAC ID Switches Addresses2 switches, 10 positions
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DeviceNet Network TopologyLinear (trunkline/dropline) power and signal on same network cable
Resources
Literature
- MC20 ALTA™ Mass Flow Controller (archived) (354.3 kB, PDF)
Manuals
- ALTA MC20 DeviceNet™ Mass Flow Controller Manual (1 MB, PDF)
- MC20A Analog I/O Mass Flow Controller Manual (755.3 kB, PDF)
- MC20A ALTA™ Mass Flow Controller Pin-outs (74.3 kB, PDF)
Drawings & CADs
- MC20 ALTA™ Mass Flow Controller Dimensional Drawing (87.4 kB, PDF)
- MC20 Mass Flow Controller 3D Model Files
Ultra-High Velocity