Mass Flow Controller Modules

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industrial automation mass flow controller module

Overview

MKS Mass Flow Controller Modules are a compact and high density solution for integrating MKS MFCs with the MKS Automation Platform PAC or CM modules. MFC modules support either 15 or 9 pin analog mass flow controllers. The MFC Module has a direct 1:1 pin mapping of the MFC's, so connected mass flow controllers are fully powered and controlled through the MFC slice. Each MFC Module supports integrating 4 MKS mass flow controllers.

Supports 15 or 9 pin analog mass flow controllers
Direct 1:1 pin mapping of mass flow controllers
Supports integration of 4 MKS mass flow controllers

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Products

		Compare	Description	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Connector	Availability	Featured Item	Price		Brand
		AS11890G-02 Mass Flow Controller Module, DB15, 4 Channel $872 Contact Us	AS11890G-02 Mass Flow Controller Module, DB15, 4 Channel	UNIVERSAL	0.0	1.0	0.0		0.0	15 pin D-sub	Contact Us		$872
		AS11890G-11 Mass Flow Controller Module, DB9, 4 Channel $794 Contact Us	AS11890G-11 Mass Flow Controller Module, DB9, 4 Channel	UNIVERSAL	0.0	1.0	0.0		0.0	9 pin D-sub	Contact Us		$794

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Specifications

Type

Mass Flow Controller Module
ADC Native Resolution

14-bits
Auxiliary Power Supply

24 V ±5%
This input will be used to power MFCs connected through IO connector.
Each power output to MFC should be protected separately.
Power Consumption

24 V ±5%
Anti-alias HW Filtering

200Hz ±20%, 6dB/octave minimum
Analog Input Minimum Input CMRR

50dB, 0-1kHz
Analog Input Maximum Integral Non-linearity

±2LSB (14bit @ 14v)
Analog Input Number of AO Channels

16 , Single Ended (4 for each MFC: Valve test point, Flow signal output, Optional input, Pressure output)
Analog Input Voltage Range

-2V to 14V
Analog Input Maximum Error Over Full Range

±0.05% of FS (over 20 - 30°C)
Analog Input Sampling Rate

6.25 kHz (160µSec , for all 16 channels)
(ADC oversampling is set to x32)
Analog Input Protection

ESD to IEC 61000-4-2 ±4kV contact, short to 24V, +15V, or -15V
Analog Output Number of AO Channels

4 Single Ended (1 for each MFC: Set Point Input)
Analog Output DAC Native Resolution

14-bits
Analog Output Maximum Output Current

5mA, into a 2kOhm, 10nF load
Analog Output Output Accuracy at 25°C Ambient

±0.1% of FS @5v, ±0.05% of Full Scale @10v
Analog Output Settling Time

±2.5mV in 1msec into 2kOhm, 10nF load

Analog Output Protection

ESD to IEC 61000-4-2 ±4kV contact, short to 24V, +15V, or -15V
Digital Output Maximum Voltage Drop when ON

0.2V into 30kOhm Impedance
Digital Output Number of DO Channels

12 (3 for each MFC: valve open, valve close, flow zero)
Digital Output Maximum Leakage Current OFF

30µA
Digital Output Minimum available current ON

6mA
Digital Output Protection

5V TVS, resettable Fuse (25mA PTC)
Logic Level

5V TTL tri state DO for valve override function
Active HIGH and LOW.
HIGH opens MFC control valve
Low closes the valve and floating allows for set point to control
5V TTL Active Low for valve close
Valve open or Flow zero functions referenced to signal ground
Minimum Input Impedance

150 kOhm
Maximum Power Consumption per Module

Assuming each MFC consumes 250mA and all AOs are fully loaded ≥24V_IO@1.5Amp, 24V_CORE@ 0.15Amp
Timing

Valve override 100msec + response time (Digital Output)
Operational Environment Temperature

0 to +55°C
Storage Temperature

-40 to 85°C
Altitude

Up to 2000 meters
Humidity

5 to 85% non-condensing
Dimensions

52.5 x 125 x 92.3 mm (W x H x D)
Mounting

DIN rail
Compliance

UL, CE, RoHS

Specifications

Type

Mass Flow Controller Module
ADC Native Resolution

14-bits
Auxiliary Power Supply

24 V ±5%
This input will be used to power MFCs connected through IO connector.
Each power output to MFC should be protected separately.
Power Consumption

24 V ±5%
Anti-alias HW Filtering

200Hz ±20%, 6dB/octave minimum
Analog Input Minimum Input CMRR

50dB, 0-1kHz
Analog Input Maximum Integral Non-linearity

±2LSB (14bit @ 14v)
Analog Input Number of AO Channels

16 , Single Ended (4 for each MFC: Valve test point, Flow signal output, Optional input, Pressure output)
Analog Input Voltage Range

-2V to 14V
Analog Input Maximum Error Over Full Range

±0.05% of FS (over 20 - 30°C)
Analog Input Sampling Rate

6.25 kHz (160µSec , for all 16 channels)
(ADC oversampling is set to x32)
Analog Input Protection

ESD to IEC 61000-4-2 ±4kV contact, short to 24V, +15V, or -15V
Analog Output Number of AO Channels

4 Single Ended (1 for each MFC: Set Point Input)
Analog Output DAC Native Resolution

14-bits
Analog Output Maximum Output Current

5mA, into a 2kOhm, 10nF load
Analog Output Output Accuracy at 25°C Ambient

±0.1% of FS @5v, ±0.05% of Full Scale @10v
Analog Output Settling Time

±2.5mV in 1msec into 2kOhm, 10nF load

Analog Output Protection

ESD to IEC 61000-4-2 ±4kV contact, short to 24V, +15V, or -15V
Digital Output Maximum Voltage Drop when ON

0.2V into 30kOhm Impedance
Digital Output Number of DO Channels

12 (3 for each MFC: valve open, valve close, flow zero)
Digital Output Maximum Leakage Current OFF

30µA
Digital Output Minimum available current ON

6mA
Digital Output Protection

5V TVS, resettable Fuse (25mA PTC)
Logic Level

5V TTL tri state DO for valve override function
Active HIGH and LOW.
HIGH opens MFC control valve
Low closes the valve and floating allows for set point to control
5V TTL Active Low for valve close
Valve open or Flow zero functions referenced to signal ground
Minimum Input Impedance

150 kOhm
Maximum Power Consumption per Module

Assuming each MFC consumes 250mA and all AOs are fully loaded ≥24V_IO@1.5Amp, 24V_CORE@ 0.15Amp
Timing

Valve override 100msec + response time (Digital Output)
Operational Environment Temperature

0 to +55°C
Storage Temperature

-40 to 85°C
Altitude

Up to 2000 meters
Humidity

5 to 85% non-condensing
Dimensions

52.5 x 125 x 92.3 mm (W x H x D)
Mounting

DIN rail
Compliance

UL, CE, RoHS

Features

MKS Automation Platform

These modules are part of the MKS Automation Platform that provides a modular, scalable and configurable solution to meet your automation and control requirements. Designed to provide a complete automation solution to improve operational and productivity efficiencies, the Automation Platform enables faster implementations, provides lowest total cost of ownership, and improves utilization of existing tools and assets.