MKS Mass Flow Controller Modules are a compact and high density solution for integrating MKS MFCs with the MKS Automation Platform PAC or CM modules. MFC modules support either 15 or 9 pin analog mass flow controllers. The MFC Module has a direct 1:1 pin mapping of the MFC's, so connected mass flow controllers are fully powered and controlled through the MFC slice. Each MFC Module supports integrating 4 MKS mass flow controllers.
|Compare||Model||Drawings, CAD & Specs||Availability||Price|
|AS11890G-02 Mass Flow Controller Module, DB15, 4 Channel||$790||
|AS11890G-11 Mass Flow Controller Module, DB9, 4 Channel||$790||
These modules are part of the MKS Automation Platform that provides a modular, scalable and configurable solution to meet your automation and control requirements. Designed to provide a complete automation solution to improve operational and productivity efficiencies, the Automation Platform enables faster implementations, provides lowest total cost of ownership, and improves utilization of existing tools and assets.