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Jalapeño LoPro™ Heated Bellows Vacuum Isolation Valves
Overview
Jalapeño LoPro™ Heated Bellows Vacuum Isolation Valves are specifically designed to withstand internal temperatures as high as 190°C to limit contaminant buildup and reduce system maintenance. The standard heater for the Jalapeño LoPro valve is 170°C. The Jalapeño LoPro valve uses up to four heat zones, virtually eliminating any potential for hot and cold spots. The Jalapeño LoPro valve has a smaller profile and is lighter, lower in cost, and easier to maintain than similar competitive valves. With its small footprint, this valve fits as easily into existing vacuum systems as it does into new systems.
- NW25 - NW50
- Uniform heating reduces byproduct buildup to maintain throughput
- 1,000,000 cycle rating (clean environments)
Products
Configuration Options
Jalapeño LoPro™ Heated Isolation Valves are available with the following options.
| Configuration Option | Option Code |
|---|---|
| LPJ1 Vacuum Isolation Valve | LPJ1 |
| Flange Size | |
| NW25 | 25 |
| NW40 | 40 |
| NW50 | 50 |
| Body Configuration | |
| Angle | A |
| Inline | I |
| Flange Type | |
| ISO-KF | K |
| Actuator Type | |
| Normally Closed | C |
| Limit Switch | |
| Limit Switch | L |
| No Limit Switch | N |
| Seal Type | |
| Viton® Bonnet, Chemraz® Nose | H |
| Chemraz® Bonnet and Nose | Z |
| Heater | |
| No Heater | XXX |
| Angle Body Heater | R6A |
| In-line Body Heater | R6I |
| Angle Body LTA Heater | L6A |
| In-line Body LTA Heater | L6I |
| Solenoid | |
| 12 VDC | 12D |
| 24 VDC | 24D |
| 24 VAC 50/60 Hz | 24A |
| 100 VAC 50 Hz | 100 |
| 120 VAC 50/60 Hz | 120 |
| 208 VAC 50/60 Hz | 208 |
| 240 VAC 50/60 Hz | 240 |
| 1/8 inch NPT female | None |
Specifications
-
TypeHeated, Low-profile Vacuum Isolation Valve
-
Vacuum RangeAtmosphere to below 10-9 Torr
-
Body ConfigurationAngle, Inline
-
Port SizeNW25, NW40, NW50
-
Helium Leak Rate1.0 x 10-9 std cc/sec
-
Cylinder Volume1.2 - 6.4 in3, depending on configuration
-
Cylinder Air Pressure90 psig ± 30 psig
-
Limit Switch Rating5A - 250 VAC
-
Single Pole, Single Throw5A - 30 VDC
-
Electrical Duty Cycle100 volts 72%, 120 volts 50%
-
Blow-By Pressure80 - 45 psia, depending on configuration
-
Actuation Time40 - 160 msec, depending on configuration
-
Maximum Internal Spring Closing Pressure38 - 60 psia, depending on configuration
-
Heater Nominal Set Point170°C (338°F)
-
Heater Interior Range135°-180°C (275°-356°F)
-
Heater MaterialsMolded silicone foam, fiberglass reinforced silicone, Teflon insulated wire
-
Heater Exterior Range60°-70°C (140°-158°F)
-
Heater Foam Thickness0.5 in. (12.7 mm)
-
Heater ComplianceCE, UL E52951 2JR
-
Heater ConnectorsMidget Twist-Lock, nylon, NEMA ML-1
-
Heater Weight Range0.5 to 1.5 lb. (0.23 to .68 kg)
-
Power Cord Current12 A maximum
-
LTA Monitor EnclosureBlack plastic
-
LTA Power Requirements90-130 VAC input, 12 VDC ±3 VDC output
-
LTA Power Consumption0.3 W
-
LTA Relay Contact RatingSPDT, 2 A @ 50 VAC resistive, 1 A @ 30 VDC
-
LTA Input/Output Wiring1 Thermal switch line IN
2 Thermal switch line OUT
3 Normally closed
4 Common
5 Normally open -
LTA Dimensions2.58 x 4.76 x 1.46 (inches)
66 x 121 x 37 (mm) -
LTA ComplianceCE
-
Typical Life1,000,000 cycles
Features
Improved Process Yield & Performance
- Isolates pump lines and traps downstream
- Reduces particle generation with slow pump downs
- Stops unwanted sublimation of process by-products, heaters keep valve clean
- Reported increase in time between maintenance cycles from 2 weeks to 12 weeks or 20 runs to 145 runs
New Improved Heater Design
- Tighter temperature control eEnhanced Heater Safety
- nabled by microprocessor and thermocouple
- Improved reliability of heater control system due to noarc relay circuit
- Improved temperature uniformity with optimized design of multiple heating zones
- Special temperature settings available on request
- Reduced power consumption
- Low temperature alert option warns when heater is cold
Enhanced Heater Safety
- UL listed and CE tested and marked for both electrical and thermal safety
- Passes SEMI S9-95 strain relief test of 35 pounds
- Integral thermal fuse
- Ground Fault Equipment Leakage Circuit Interrupter power cord option eliminates shock hazard
- Patented design retains heat and improves thermal safety
Valve Features
- Square cap design for ease of maintenance
- Compact, low profile design
- Bellows-sealed poppet valve
- Bellows are formed for less particle trapping and a longer cycle life
- Spring-to-close, air-to-open pneumatic valve
- Greater sealing force leads to better seal integrity in contaminated conditions
- High purity, corrosion resistant, 304 stainless steel body
- May easily be accommodated into existing systems
Applications
Semiconductor processes such as Low Pressure Chemical Vapor Deposition (LPCVD) and aluminum etching, are known for producing condensate on cool surfaces of a vacuum system. This condensation reduces conductance and will eventually flake off as particles, backflowing and contaminating your chamber and system. Consequently, the system must be shut down and the contaminated vacuum components cleaned or even replaced.
Jalapeño LoPro™ valves reduce contamination, increase system uptime and product yield, and decrease scheduled maintenance.
Resources
Manuals
- Jalapeño Vacuum Valve Manual Supplement (94 kB, PDF)
Literature
- Jalapeño LoPro™ Heated, Low-profile Vacuum Valves (255.3 kB, PDF)
Ultra-High Velocity