Improved Process Yield & Performance

• Isolates pump lines and traps downstream
• Reduces particle generation with slow pump downs
• Stops unwanted sublimation of process by-products, heaters keep valve clean
• Reported increase in time between maintenance cycles from 2 weeks to 12 weeks or 20 runs to 145 runs

New Improved Heater Design

• Tighter temperature control eEnhanced Heater Safety
• nabled by microprocessor and thermocouple
• Improved reliability of heater control system due to noarc relay circuit
• Improved temperature uniformity with optimized design of multiple heating zones
• Special temperature settings available on request
• Reduced power consumption
• Low temperature alert option warns when heater is cold

Enhanced Heater Safety

• UL listed and CE tested and marked for both electrical and thermal safety
• Passes SEMI S9-95 strain relief test of 35 pounds
• Integral thermal fuse
• Ground Fault Equipment Leakage Circuit Interrupter power cord option eliminates shock hazard
• Patented design retains heat and improves thermal safety

Valve Features

• Square cap design for ease of maintenance
• Compact, low profile design
• Bellows-sealed poppet valve
• Bellows are formed for less particle trapping and a longer cycle life
• Spring-to-close, air-to-open pneumatic valve
• Greater sealing force leads to better seal integrity in contaminated conditions
• High purity, corrosion resistant, 304 stainless steel body
• May easily be accommodated into existing systems

Semiconductor processes such as Low Pressure Chemical Vapor Deposition (LPCVD) and aluminum etching, are known for producing condensate on cool surfaces of a vacuum system. This condensation reduces conductance and will eventually flake off as particles, backflowing and contaminating your chamber and system. Consequently, the system must be shut down and the contaminated vacuum components cleaned or even replaced.

Jalapeño LoPro™ valves reduce contamination, increase system uptime and product yield, and decrease scheduled maintenance.