Configuration Options

Description
     LPJ1 Vacuum Isolation Valve, Low-profile, Heated, Single Stage

Specifications

  • Type
    Heated, Low-profile Vacuum Isolation Valve
  • Vacuum Range
    Atmosphere to below 10-9 Torr
  • Body Configuration
    Angle, Inline
  • Port Size
    NW25, NW40, NW50
  • Helium Leak Rate
    1.0 x 10-9 std cc/sec
  • Cylinder Volume
    1.2 - 6.4 in3, depending on configuration
  • Cylinder Air Pressure
    90 psig ± 30 psig
  • Limit Switch Rating
    5A - 250 VAC
  • Single Pole, Single Throw
    5A - 30 VDC
  • Electrical Duty Cycle
    100 volts 72%, 120 volts 50%
  • Blow-By Pressure
    80 - 45 psia, depending on configuration
  • Actuation Time
    40 - 160 msec, depending on configuration
  • Maximum Internal Spring Closing Pressure
    38 - 60 psia, depending on configuration
  • Heater Nominal Set Point
    170°C (338°F)
  • Heater Interior Range
    135°-180°C (275°-356°F)
  • Heater Materials
    Molded silicone foam, fiberglass reinforced silicone, Teflon insulated wire
  • Heater Exterior Range
    60°-70°C (140°-158°F)
  • Heater Foam Thickness
    0.5 in. (12.7 mm)
  • Heater Compliance
    CE, UL E52951 2JR
  • Heater Connectors
    Midget Twist-Lock, nylon, NEMA ML-1
  • Heater Weight Range
    0.5 to 1.5 lb. (0.23 to .68 kg)
  • Power Cord Current
    12 A maximum
  • LTA Monitor Enclosure
    Black plastic
  • LTA Power Requirements
    90-130 VAC input, 12 VDC ±3 VDC output
  • LTA Power Consumption
    0.3 W
  • LTA Relay Contact Rating
    SPDT, 2 A @ 50 VAC resistive, 1 A @ 30 VDC
  • LTA Input/Output Wiring
    1 Thermal switch line IN
    2 Thermal switch line OUT
    3 Normally closed
    4 Common
    5 Normally open
  • LTA Dimensions
    2.58 x 4.76 x 1.46 (inches)
    66 x 121 x 37 (mm)
  • LTA Compliance
    CE
  • Typical Life
    1,000,000 cycles

Features

Improved Process Yield & Performance

  • Isolates pump lines and traps downstream
  • Reduces particle generation with slow pump downs
  • Stops unwanted sublimation of process by-products, heaters keep valve clean
  • Reported increase in time between maintenance cycles from 2 weeks to 12 weeks or 20 runs to 145 runs

New Improved Heater Design

  • Tighter temperature control eEnhanced Heater Safety
  • nabled by microprocessor and thermocouple
  • Improved reliability of heater control system due to noarc relay circuit
  • Improved temperature uniformity with optimized design of multiple heating zones
  • Special temperature settings available on request
  • Reduced power consumption
  • Low temperature alert option warns when heater is cold

Enhanced Heater Safety

  • UL listed and CE tested and marked for both electrical and thermal safety
  • Passes SEMI S9-95 strain relief test of 35 pounds
  • Integral thermal fuse
  • Ground Fault Equipment Leakage Circuit Interrupter power cord option eliminates shock hazard
  • Patented design retains heat and improves thermal safety

Valve Features

  • Square cap design for ease of maintenance
  • Compact, low profile design
  • Bellows-sealed poppet valve
  • Bellows are formed for less particle trapping and a longer cycle life
  • Spring-to-close, air-to-open pneumatic valve
  • Greater sealing force leads to better seal integrity in contaminated conditions
  • High purity, corrosion resistant, 304 stainless steel body
  • May easily be accommodated into existing systems

Applications

Semiconductor processes such as Low Pressure Chemical Vapor Deposition (LPCVD) and aluminum etching, are known for producing condensate on cool surfaces of a vacuum system. This condensation reduces conductance and will eventually flake off as particles, backflowing and contaminating your chamber and system. Consequently, the system must be shut down and the contaminated vacuum components cleaned or even replaced.

Jalapeño LoPro™ valves reduce contamination, increase system uptime and product yield, and decrease scheduled maintenance.

Need help?

Contact an Applications Specialist by sending us an email