Jalapeño LoPro™ Heated Bellows Vacuum Isolation Valves are specifically designed to withstand internal temperatures as high as 190°C to limit contaminant buildup and reduce system maintenance. The standard heater for the Jalapeño LoPro valve is 170°C. The Jalapeño LoPro valve uses up to four heat zones, virtually eliminating any potential for hot and cold spots. The Jalapeño LoPro valve has a smaller profile and is lighter, lower in cost, and easier to maintain than similar competitive valves. With its small footprint, this valve fits as easily into existing vacuum systems as it does into new systems.
The following options are available for Jalapeño LoPro™ Heated, Low-profile Vacuum Valves
Ordering Code Example: LPJ1-25-AK-CLHR6A-120
|Configuration Option||Option Code|
|LPJ1 Vacuum Isolation Valve||LPJ1|
|No Limit Switch||N|
|Viton® Bonnet, Chemraz® Nose||
|Chemraz® Bonnet and Nose||Z|
|Angle Body Heater||R6A|
|In-line Body Heater||R6I|
|Angle Body LTA Heater||L6A|
|In-line Body LTA Heater||L6I|
|24 VAC 50/60 Hz||24A|
|100 VAC 50 Hz||100|
|120 VAC 50/60 Hz||120|
|208 VAC 50/60 Hz||208|
|240 VAC 50/60 Hz||240|
|1/8 inch NPT female||None|
Improved Process Yield & Performance
New Improved Heater Design
Enhanced Heater Safety
Semiconductor processes such as Low Pressure Chemical Vapor Deposition (LPCVD) and aluminum etching, are known for producing condensate on cool surfaces of a vacuum system. This condensation reduces conductance and will eventually flake off as particles, backflowing and contaminating your chamber and system. Consequently, the system must be shut down and the contaminated vacuum components cleaned or even replaced.
Jalapeño LoPro™ valves reduce contamination, increase system uptime and product yield, and decrease scheduled maintenance.