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liquozon vario3 ozonated water delivery system with recirculation
Ozonated Water Delivery System, 32-140 ppm, 2-60 lpm, Optional Recirculation, LIQUOZON® VariO3


  • Type
    LIQUOZON® VariO3 Ozone Water Delivery System
  • Ozone Concentration
    32 - 140 ppm
  • Flow Rate
    2 - 60 lpm
  • Operating Pressure
    Without DIO3 Outlet Pump: Adjustable range 1.0 to 3.0 barg (depends on UPW supply pressure)
    With DIO3 Outlet Pump: Adjustable range 1.4 to 3.7 barg (depends on UPW supply and system pressure)
  • Feed Gas
  • Feed Gas Quality
    ≥ Grade 4 (purity ≥99.99%), dew point <-40°C
  • Feed Gas Flow Rate
    Between 5 and 15 slm (depends on the ozone generator type)
  • Feed Gas Inlet Pressure
    4.5-7.6 barg (0.45-0.76 MPag, 65-110 psig), at least 3 bar higher than system pressure
  • Dopant Gas
  • Dopant Gas Quality
    ≥ Grade 4.5 (purity ≥99.995 %) or better
  • Dopant Gas Flow Rate
    Typ. 0.15 - 0.2 slm
  • Dopant Gas Inlet Pressure
    5.0-7.6 barg (0.50-0.76 MPag, 73 - 110 psig)
  • UPW Quality
    Half Life Time of O3 in UPW: >12 min @ 20°C
  • UPW Pressure
    1-5 barg (0.1-0.5 MParg, 14.5-73 psig) at least 0.8 bar higher than system pressure; various pump options have divergent pressure requirements.
  • UPW Temperature
    15 - 25°C (59 - 77°F), rated 20°C (68°F)
  • Cooling Water Flow Recommended
    Typ. 3.0 - 7.0 L/min (0.8 - 1.8 gpm)
  • Cooling Water Inlet Pressure
    Max. 5.0 barg (0.50 MPag, 73 psig) differential pressure ≥3 bar (depending on type)
  • Cooling Water Temperature
    17 - 23°C (63 - 73°F), rated 20°C (68°F)
  • Cooling Water Quality
    Demineralized, filtration ≤ 20 µm
  • Wetted Surfaces
    Liquid: PFA, PTFE, quartz glass
    Gas: 316L stainless steel, PFA, PTFE
  • Control Interfaces
    Binary in/out (dry contacts), RS232, RS485, analog 4-20 mA in/out, USB (RS232 Com Port emulation)
  • Power
    3/PE~, 200-208 V ±10%, 50/60 Hz, 850-5750 W (depending on type)
  • Dimensions
    1810 x 800 x 610 mm (71.2 x 31.5 x 24.1 inches) Approximate (H x W x D)
    Overall height including exhaust duct and adjustable feet: Approx. 2000 mm (79 inches)
  • Weight
    Approximately 323 kg (including water)
  • Compliance
    CE, SEMI S2-0302, SEMI F47, SEMI S2


Faster, Easier Installation, System Integration and Operation

  • No analyzer or cabinet drain connection required
  • Simple operation via Touch Screen
  • Integrated booster pump overcomes low UPW supply pressure and ensures sufficient pressure for multi-chamber single wafer tools
  • Configured for sub-fab installation
  • Reduced dead volume by optional recirculation
  • Accepts internal DIO3 filter cartridge if needed

Clean, Safe Alternative to Conventional Chemical Processing

  • High redox potential of ozone
  • Ozone generated at point-of-use
  • Green chemical easily converted back to oxygen
  • Avoids chemical disposal

Low Cost of Ownership

  • Reduced chemical consumption and disposal costs
  • Lower UPW consumption by recirculation or use of idle states during process breaks
  • Low oxygen, CDA, cooling water and exhaust consumption
  • Maximum efficiency, supporting batch, single wafer or multiple process tools

Proven Reliability

  • Industry leading ozone generating technology
  • MTBF > 20,000 hours

LIQUOZON® VariO3 System

The LIQUOZON VariO3 system delivers ozonated ultrapure water (DIO3) at a pressure of up to 3.7 barg (0.37 MPag) and at flow rates of up to 32 L/min, (60 L/min with XF High Flow option). The integrated analyzer for dissolved ozone is used for accurate closed loop control of the DIO3 concentration. The XF High Flow mixing function not only increases the flow rate, but improves the concentration control accuracy and gives the advantage of very fast set point changes.

An internal, single-channel ozone gas monitor, which shuts down the LIQUOZON VariO3 should an ozone leak occur, is an available option. The UPW inlet booster pump allows operation with low UPW facility supply pressure, is another available option.

In order to reduce the environmental impact and to lower the cost of ownership, the system supports recirculation. The recirculation of pressurized DIO3 through a loop automatically controls return flow to the LIQUOZON system.

The LIQUOZON VariO3 is configured to accept the installation of liquid filters either at the UPW inlet or the DIO3 outlet. Up to two 10 or 20 inch liquid filters are possible.

Concentration and Flow

The regular DIO3 flow rate and the type of ozone gas generator define mainly the DIO3 concentration range (see concentration vs. flow diagram). The specifications refer to a UPW temperature of 20°C at a system pressure of 2.5 barg. At higher UPW temperature or at lower system pressure the maximum performance will decrease.

The LIQUOZON VariO3 is designed to deliver a constant ozone in-water concentration under stable controlled pressure even for varying DIO3 demands.

Ozone Generation

LIQUOZON VariO3 incorporates an ozone gas generator with (depending on the performance requirement) based on MKS’s SEMOZON technology.

SEMOZON generators produce ozone from oxygen by dielectric barrier discharge. A small amount of high-purity carbon dioxide (CO2) is used as a dopant gas. The CO2 considerably increases the lifetime of ozone in the UPW. With CO2 there is no possibility of formation of NOx compounds. Highly efficient transfer of O3 gas into the UPW is accomplished by special MKS designed ozone contactors. The surplus O3 gas is converted back to O2 in the integrated ozone gas destruct unit.

High-quality, ozone resistant materials and the unique doping technique ensure ultra-clean ozonated water delivery for high purity semiconductor and flat panel applications.

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