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liquozon vario3 ozonated water delivery system with recirculation
Ozonated Water Delivery System, 32-140 ppm, 2-60 lpm, Optional Recirculation, LIQUOZON® DI-O3

Specifications

  • Type
    Ozone Water Delivery System
  • Ozone Concentration
    32 - 140 ppm
  • Flow Rate
    2 - 60 lpm
  • Feed Gas
    O2
  • Dopant Gas
    CO2
  • Wetted Surfaces
    Liquid: PFA, PTFE, quartz glass
    Gas: 316L stainless steel, PFA, PTFE
  • Control Interfaces
    Binary in/out, RS232/RS485, analog 4 - 20 mA in/out, USB
  • Dimensions
    1810 x 800 x 610 mm (71.2 x 31.5 x 24.1 inches)Approximate (height x width x depth), Overall height including exhaust duct and adjustable feet: Approx. 2000 mm (79 inches)
  • Weight
    315-400 kg, depending on configuration
  • Compliance
    CE, SEMI S2-0302, SEMI F47, SEMI S2

Features

Leading Technology

  • MKS proprietary contacting system allows >80% ozone mass transfer
  • <4% concentration accuracy at constant flow rates typical
  • Green idle modes reduce excess water usage

Process

  • Wide operation window with tight process control
  • Analog and digital bidirectional communication with remote control
  • High purity ozone environment

Reliability & Maintenance

  • High unit to unit reliability and repeatability
  • Market proven components with long life-spans
  • Easy installation and operation

DI-O3 Performance and Operation

Specified achievable dissolved ozone concentration in UPW for a system pressure of 2.5 barg, a cooling water temperature and UPW temperature of 20°C. At higher UPW temperatures, lower system pressure or higher cooling water temperature, the maximum performance will decrease.

DI-O3 Flow [L/min] DI-O3 Concentration [ppm=mg/L]
minimum maximum
2 38 90
10 19 90
20 12 80
30 8 62
40 6 47
50 5 37
60 4 31

Facilities Requirements

O2: ≥Grade 4 (purity ≥99.99%)

  • Inlet Pressure: 4.5 - 7.6 barg (65 - 110 psig), at least higher 3 bar than system pressure
  • Flow Rate: ≤15 slm, typical 9 slm, according to SEMI E12 (0°C/1.01325 bar)

Dopant Gas CO2: ≥Grade 4.5 (purity ≥99.995%)

  • Inlet Pressure: 5.0 - 7.6 barg (73 - 110 psig)
  • Flow Rate: Typical 0.15 - 0.5 slm, depending on the configuration

Ultra-Pure Water (UPW)

  • Half Life Time of O3 in UPW: >12 min @ 20°C, (which is standard in semiconductor fabs)
  • UPW IN Pressure (full flow): 1 - 5 barg (14.5 - 73 psig) 0.8 bar higher than system pressure
  • Temperature: 15 - 25°C (59 - 77°F), rated 20°C (68°F)

Cooling Water

  • Quality: Demineralized, filtration ≤20 µm
  • Temperature: 17 - 23°C (63 - 73°F), rated 20°C (68°F)
  • Pressure: Maximum 5.0 barg (73 psig) differential pressure ≥3 bar
  • Flow Rate: Typical 3.0 - 10.0 L/min (0.8 - 2.6 gpm), depending on the configuration

Power: 3/PE~, 200 - 208 V ±10%, 50/60 Hz, 850 - 8000 W

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