LIQUOZON® VariO3 Ozonated Water Delivery System is the next step in wet processing with dissolved ozone, for the semiconductor and display industries. A compact standalone system providing ultra-pure ozonated water (DIO3) with closed loop control of ozone concentration and pressure; where both parameters are kept stable under changing flow conditions. The VariO3 was designed for easy integration with the production tools used in today’s advanced electronics industries.
Faster, Easier Installation, System Integration and Operation
Clean, Safe Alternative to Conventional Chemical Processing
Low Cost of Ownership
The LIQUOZON VariO3 system delivers ozonated ultrapure water (DIO3) at a pressure of up to 3.7 barg (0.37 MPag) and at flow rates of up to 32 L/min, (60 L/min with XF High Flow option). The integrated analyzer for dissolved ozone is used for accurate closed loop control of the DIO3 concentration. The XF High Flow mixing function not only increases the flow rate, but improves the concentration control accuracy and gives the advantage of very fast set point changes.
An internal, single-channel ozone gas monitor, which shuts down the LIQUOZON VariO3 should an ozone leak occur, is an available option. The UPW inlet booster pump allows operation with low UPW facility supply pressure, is another available option.
In order to reduce the environmental impact and to lower the cost of ownership, the system supports recirculation. The recirculation of pressurized DIO3 through a loop automatically controls return flow to the LIQUOZON system.
The LIQUOZON VariO3 is configured to accept the installation of liquid filters either at the UPW inlet or the DIO3 outlet. Up to two 10 or 20 inch liquid filters are possible.
The regular DIO3 flow rate and the type of ozone gas generator define mainly the DIO3 concentration range (see concentration vs. flow diagram). The specifications refer to a UPW temperature of 20°C at a system pressure of 2.5 barg. At higher UPW temperature or at lower system pressure the maximum performance will decrease.
The LIQUOZON VariO3 is designed to deliver a constant ozone in-water concentration under stable controlled pressure even for varying DIO3 demands.
LIQUOZON VariO3 incorporates an ozone gas generator with (depending on the performance requirement) based on MKS’s SEMOZON technology.
SEMOZON generators produce ozone from oxygen by dielectric barrier discharge. A small amount of high-purity carbon dioxide (CO2) is used as a dopant gas. The CO2 considerably increases the lifetime of ozone in the UPW. With CO2 there is no possibility of formation of NOx compounds. Highly efficient transfer of O3 gas into the UPW is accomplished by special MKS designed ozone contactors. The surplus O3 gas is converted back to O2 in the integrated ozone gas destruct unit.
High-quality, ozone resistant materials and the unique doping technique ensure ultra-clean ozonated water delivery for high purity semiconductor and flat panel applications.