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liquozon stream 140 slm ozone water delivery system
Ozonated Water Delivery System, 140 slm, LIQUOZON® Stream

Specifications

  • Type
    LIQUOZON® Stream 140 slm Ozone Water Delivery System
  • Ozone Concentration
    25 - 115 ppm, depending on configuration
  • Flow Rate
    5 - 140 L/min, depending on configuration
  • Feed Gas
    O2
  • Feed Gas Quality
    ≥Grade 4 (purity≥99.99 %), dew point <-40°C
  • Feed Gas Flow Rate
    20 slm (approximate)
  • Feed Gas Inlet Pressure
    5.0 - 7.6 barg (0.50 - 0.76 MPag)
  • Dopant Gas
    CO2
  • Dopant Gas Quality
    ≥Grade 4.5 (purity≥99.995 %)
  • Dopant Gas Flow Rate
    0.5 slm (typical)
  • Dopant Gas Inlet Pressure
    5.0 - 7.6 barg (0.50 - 0.76 MPag)
  • UPW Quality
    Half Life Time of O3 in UPW: >12 min @ 20°C
  • UPW Pressure
    1.0 barg - 4.0 barg
  • UPW Purity
    According to the process demands. Typically with filtration, demineralization, reverse osmosis, deionization (< 0.1 ppb Metals, < 10 particles/ml of 0.1 µm size, free of organics)
  • UPW Temperature
    15 - 25°C (59 - 77°F), rated 20°C (68°F)
  • Cooling Water Flow Recommended
    9.0 L/min (typical)
  • Cooling Water Inlet Pressure
    5.0 barg (0.50 MPag)
  • Cooling Water Temperature
    Rated 20°C, range 17-23°C
  • Cooling Water Quality
    Demineralized, filtration (≤20 µm)
  • Ambient Temperature
    15 - 25°C (59 - 77°F), rated 20°C (68°F)
  • Wetted Surfaces
    Liquid: PFA, PTFE, quartz glass
    Gas: 316L stainless steel, PFA , PTFE
  • Control Interfaces
    Binary in/out (dry contacts), RS232
  • Power
    3/PE~ 200 - 208 V ± 10%
  • Dimensions
    610 x 1011 x 1,977 mm (24 x 39.8 x 77.8 inches) (W x L x H)
  • Weight
    420 - 450 kg, depending on configuration
  • Compliance
    CE, SEMI S2-0302, SEMI F47, SEMI S2

Features

Reliable System Performance

  • Constant ozone concentration and operating pressure at varying flow rates
  • Overcomes issues arising from poor UPW facility pressure
  • Ensures sufficient pressure for multi chamber single wafer tools
  • Industry leading ozone technology
  • MTBF > 20,000 hours

Space Saving Footprint

  • Extreme compact size compared to dissolved ozone production

Faster, Easier Installation and Operation

  • No analyzer or cabinet drain connection required
  • Simple operation via Touch Screen
  • Allows subfab installation

Clean, Safe Alternative

  • High redox potential of ozone
  • Can be generated at point-of-use
  • Green chemical which is easily converted back to oxygen

Low Cost of Ownership

  • Reduced chemical consumption and disposal costs
  • Low O2 , CDA, cooling water and exhaust consumption
  • Supports batch, single or multiple process tools for maximum efficiency

Concentration and Flow Performance

The specified maximum achievable ozone-in-water concentration of the LIQUOZON Stream depends on the DIO3 flow rate. The specifications refer to a UPW temperature of 20°C. At higher UPW temperatures or at a lower system pressure, the maximum performance will decrease. The internal closed loop control allows for a fast and precise adjustment of the O3 output concentration.

The LIQUOZON Stream is designed to deliver a stable O3 -in-water concentration under constant controlled pressure even for varying DIO3 demands. Several different models of the LIQUOZON Stream are available to suit the required performance.

System Flow and Configuration

The ozone gas is generated by an integrated ozone generator based on the SEMOZON AX technology through partial conversion of oxygen O2 into O3 . The transfer of O3 from the gas phase into the de-ionized water is accomplished by special MKS designed ozone contactors. The residual O3 gas is converted back to O2 in the integrated ozone gas destruct unit.

Optionally a booster pump at the UPW inlet can be integrated to lower the necessary inlet pressure. The ozone generator incorporates an inlet for O2 gas and an outlet for the O2 /O3 mixture. CO2 is added to the O2 gas as a dopant to stabilize the ozone generation performance, as well as to stabilize ozone in the de-ionized water.

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