LIQUOZON® PrimO3 Ozonated Water Delivery System is a powerful source for wet wafer processing with ozone, especially in multi chamber single wafer tools. An optional pump at the DIO3 outlet allows subfloor installation and a pressurized recirculation loop. Moreover, the reclaiming of unused pressureless DIO3 is possible with the new 'ReClaim' option.
The LIQUOZON PrimO3 system delivers ozonated ultra pure water (DIO3) at a pressure of up to 3.7 barg (0.37 MPag) and at flow rates of up to 32 L/min, (60 L/min with XF High Flow Option). The integrated analyzer for dissolved ozone is used for accurate closed loop control of the DIO3 concentration. The XF mixing function not only increases the flow rate, but improves the concentration control accuracy and gives the advantage of very fast setpoint changes.
An internal, single-channel ozone gas monitor, which shuts down the LIQUOZON PrimO3 should an ozone leak occur, is available as an option. The optional UPW inlet booster pump allows operation with low UPW facility supply pressure, for systems without ReClaim function.
In order to reduce the environmental impact and to lower the cost of ownership, the system supports two different types of recirculation concepts:
The recirculation of pressurized DIO3 through a loop with automatic controlled return flow to the LIQUOZON and, with the ReClaim option, the pressureless DIO3 return flow to the LIQUOZON of up to 40 L/min, controlled by the TOOL. Thereby, a UPW pump is not required.
The ReClaim unifies the advantages of the XF mixing function with the potential UPW savings of a recirculation concept.
The regular DiO3 flow rate and the type of ozone gas generator define mainly the DiO3 concentration range (see diagram). The specifications refer to a UPW temperature of 20°C at a system pressure of 1.8 - 2.5 barg. At higher UPW temperature or at lower system pressure the maximum performance will decrease.
The LIQUOZON PrimO3 is designed to deliver a constant ozonein-water concentration under stable controlled pressure even for varying DIO3 demands.
LIQUOZON PrimO3 incorporates an ozone gas generator with (depending on the performance requirement) 2, 4 or 10 ozone cells based on MKS SEMOZON AX technology.
SEMOZON AX generators produce ozone from oxygen by dielectric barrier discharge. A small amount of high-purity carbon dioxide (CO2) is used as a dopant gas. The CO2 considerably increases the lifetime of ozone in the UPW. With CO2 there is no possibility of formation of NOx compounds and resultant metal contamination. Highly efficient transfer of O3 gas into the UPW is accomplished by special MKS designed ozone contactors. The surplus O3 gas is converted back to O2 in the integrated ozone gas destruct unit.
High-quality, ozone resistant materials and the unique doping technique ensure ultra-clean ozonated water delivery for highpurity semiconductor and flat panel applications.