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Ozonated Water Delivery System, Optional Recirculation, LIQUOZON® PrimO3
LIQUOZON-PRIMO3 Ozonated Water Delivery System, Optional Recirculation, LIQUOZON® PrimO3


  • Type
    LIQUOZON® PrimO3 Ozonated Water Delivery System
  • Ozone Concentration
    8 - 115 ppm@2 L/min, depending on configuration
  • Flow Rate
    2 - 60 L/min, depending on configuration
  • Operating Pressure
    Without DIO3 Out Pump: Adjustable range 1.0 to 3.0 barg (depends on UPW supply pressure)
    With DIO3 Out Pump: Adjustable range 1.4 to 3.7 barg (depends on UPW supply and system pressure)
  • Feed Gas
  • Feed Gas Quality
    ≥ Grade 4 (purity ≥ 99.99 %), dew point < -40°C
  • Feed Gas Flow Rate
    5 - 9 slm (typical)
  • Feed Gas Inlet Pressure
    4.5 - 7.6 barg (0.45 - 0.76 MPag, 65 - 110 psig)
  • Dopant Gas
  • Dopant Gas Quality
    ≥ Grade 4.5 (purity ≥ 99.995 %) or better
  • Dopant Gas Flow Rate
    0.15 - 0.2 slm (typical)
  • Dopant Gas Inlet Pressure
    5.0 - 7.6 barg (0.50 - 0.76 MPag, 73 - 110 psig)
  • UPW Quality
    Half Life Time of O3 in UPW > 12 min @ 20°C
  • UPW Pressure
    1 - 5 barg (0.1 - 0.5 MPag, 14.5 - 73 psig) at least 0.8 bar higher than system pressure; Various pump options have divergent pressure requirements. (full flow)
  • UPW Temperature
    15 - 25°C (59 - 77°F), rated 20°C (68°F)
  • Cooling Water Flow Recommended
    3.0 - 7.0 L/min (0.8 - 1.8 gpm) typical
  • Cooling Water Pressure
    max. 5.0 barg (0.50 MPag, 73 psig)
    differential pressure > 2 - 3 bar (depending on type)
  • Cooling Water Temperature
    17 - 23°C (63 - 73°F), rated 20°C (68°F)
  • Cooling Water Quality
    Demineralized, filtration ≤ 20µm
  • Liquid Wetted Surfaces
    PFA, PTFE, quartz glass Gas
  • Wet Module Material
    316L stainless steel, PFA, PTFE
  • Control Interfaces
    Binary in/out (dry contacts), RS232, analog out
  • Power
    3/PE~, 200-208 V ±10 %, 50/60 Hz, 850 - 5750 W
  • Dimensions
    Coated steel, approx 612 x 612 x 1,805 mm (24.1 x 24.1 x 71.1 inches)
    Systems with ReClaim option or roof/bottom facility connections: 612 x 908 x 1,805 mm (24.1 x 35.7 x 71.1 inches)
    (W x H x D)
    Overall height including exhaust duct and adjustable feet: Approx. 2200 mm (87 inches)
  • Weight
    254 kg - 425 kg, (approximate; depending on type)
  • Compliance
    CE, SEMI S2-0302, SEMI F47


LIQUOZON® PrimO3 System

The LIQUOZON PrimO3 system delivers ozonated ultra pure water (DIO3) at a pressure of up to 3.7 barg (0.37 MPag) and at flow rates of up to 32 L/min, (60 L/min with XF High Flow Option). The integrated analyzer for dissolved ozone is used for accurate closed loop control of the DIO3 concentration. The XF mixing function not only increases the flow rate, but improves the concentration control accuracy and gives the advantage of very fast setpoint changes.

An internal, single-channel ozone gas monitor, which shuts down the LIQUOZON PrimO3 should an ozone leak occur, is available as an option. The optional UPW inlet booster pump allows operation with low UPW facility supply pressure, for systems without ReClaim function.

In order to reduce the environmental impact and to lower the cost of ownership, the system supports two different types of recirculation concepts:

The recirculation of pressurized DIO3 through a loop with automatic controlled return flow to the LIQUOZON and, with the ReClaim option, the pressureless DIO3 return flow to the LIQUOZON of up to 40 L/min, controlled by the TOOL. Thereby, a UPW pump is not required.

The ReClaim unifies the advantages of the XF mixing function with the potential UPW savings of a recirculation concept.

Concentration and Flow Performance

The regular DiO3 flow rate and the type of ozone gas generator define mainly the DiO3 concentration range (see diagram). The specifications refer to a UPW temperature of 20°C at a system pressure of 1.8 - 2.5 barg. At higher UPW temperature or at lower system pressure the maximum performance will decrease.

The LIQUOZON PrimO3 is designed to deliver a constant ozonein-water concentration under stable controlled pressure even for varying DIO3 demands.

Ozone Generation Performance

LIQUOZON PrimO3 incorporates an ozone gas generator with (depending on the performance requirement) 2, 4 or 10 ozone cells based on MKS SEMOZON AX technology.

SEMOZON AX generators produce ozone from oxygen by dielectric barrier discharge. A small amount of high-purity carbon dioxide (CO2) is used as a dopant gas. The CO2 considerably increases the lifetime of ozone in the UPW. With CO2 there is no possibility of formation of NOx compounds and resultant metal contamination. Highly efficient transfer of O3 gas into the UPW is accomplished by special MKS designed ozone contactors. The surplus O3 gas is converted back to O2 in the integrated ozone gas destruct unit.

High-quality, ozone resistant materials and the unique doping technique ensure ultra-clean ozonated water delivery for highpurity semiconductor and flat panel applications.

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