The LIQUOZON® HeliO3 is specially designed for solar applications such as cleaning, surface conditioning and oxide growth. The ozonated water delivery system is a powerful source for wet processing with ozone and/or chemical mixtures such as acids with ozone. The system is comprised of at least two modules: a self-contained stand-alone Gas Module and a Wet Module that integrates in the customer’s TOOL. Several combinations including closed loop control and special safety features are available. The LIQUOZON HeliO3 is designed to operate in either single
System Integration and Operation
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The LIQUOZON HeliO3 delivers dissolved ozone at flow rates of up to 60 L/min. The accuracy of the DIO3 concentration is ensured by a closed loop control. The unit is designed as a modular system which provides all required interfaces and controls in the Gas Module and offers easy integration of the Wet Module into the wet processing tool. It is possible to operate the system either in single pass mode or in recirculation mode.
For industrial applications it is recommended that the system be operated in the recirculation mode as this reduces consumption of water and energy for the ozone production. The process liquid is circulating between the LIQUOZON HeliO3 Wet Module and the process application while the LIQUOZON compensates the losses of ozone caused by ozone consumption, out-gassing and ozone decay. The circulating process liquid can contain HF and HCl with concentration up to 10 wt% which may offer additional options for the wet process such as cleaning, etching, drying and surface conditioning.
The specified maximum ozone-in-water concentration at the outlet of the LIQUOZON HeliO3 is shown in the Performance Single-Path Operation graph. The specifications refer to standard conditions see notes on table “performance summary and facility requirements”.
One of the main characteristics of the LIQUOZON HeliO3 is the amount of dissolved ozone added to the DI-Water, as shown in the Ozone Production Recirculation Operation graph. The resulting performance depends both on the specific tool configuration and the process recipe. Therefore the performance data for the recirculation are typical values. It is assumed the LIQUOZON HeliO3 is connected to a typical batch type bath and a volume of 220 L is circulated with a temperature of 20°C. The internal closed loop control allows a fast and precise adjustment of the dissolved O3 output concentration at the point-of-use. The LIQUOZON HeliO3 is designed to deliver a constant O3-in-water concentration in pass through mode with low pressure drop. According to the performance requirements different types of LIQUOZON HeliO3 can be chosen.
LIQUOZON HeliO3 has a modular design with a basic configuration and several options.
The ozone gas is produced by the integrated MKS SEMOZON ozone generator through partial conversion of oxygen O2 into O3. Different ozone gas sources, including the highly reliable SEMOZON AX8407 series which produces ozone from oxygen by dielectric barrier discharge, can be chosen based on the performance requirements. The transfer of O3 from the gas phase into the deionized water is accomplished by special MKS designed ozone contactors. The accuracy of the DIO3 concentration is ensured by a closed loop control.
The system is compatible with acids. Liquid wetted surfaces are PFA, PTFE and FFKM. Gas wetted surfaces are 316L stainless steel, PFA and PTFE.
The system is configurable in several options e.g.: