Specifications

  • Type
    LIQUOZON® HeliO3 Ozone Water Delivery System
  • Ozone Generator
    AX8407LS-D-01
  • Ozone Concentration
    12 - 49 ppm
  • Flow Rate
    60 lpm, higher flow rates possible in bypass mode
  • Feed Gas
    O2
  • Feed Gas Quality
    ≥Grade 4.0 (purity ≥99.99%), dew point <-40°C
  • Feed Gas Flow Rate
    ≤8 slm, typ. 4.8 slm, according to SEMI E12 (0°C / 1.01325 bar) standard
  • Feed Gas Inlet Pressure
    4.5-7.6 barg (0.45-0.76 MPag, 65-110 psig)
  • Dopant Gas
    CO2
  • Dopant Gas Quality
    ≥Grade 4.5 (purity . 99.995%) dew point ≥40°C
  • Dopant Gas Flow Rate
    ≤0.3 slm, typ. 0.2 slm, according to SEMI E12 (0°C / 1.01325 bar) standard
  • Dopant Gas Inlet Pressure
    5.0-7.6 barg (0.50-0.76 MPag, 73-110 psig)
  • N2 Dopant Gas Purity Required
    ≥Grade 4.0 (purity ≥99.99%), dew point <-40°C
  • N2 Dopant Gas Pressure Required
    4.5-7.6 barg (0.45-0.76 MPag, 65-110 psig)
  • N2 Dopant Gas Standard Flow Rate Required
    ≤0.8 sccm, typ. 0.5 sccm, according to SEMI E12 (0°C / 1.01325 bar)
  • Compressed Dry Air Standard Flow Rate Required
    ≤10 slm, typ. 2 slm, according to SEMI E12 (0°C / 1.01325 bar)
  • Compressed Dry Air Purity Required
    Filtrated (free of oils & particles)
  • Compressed Dry Air Pressure Required
    5.2-8.2 barg (0.52-0.82 MPag, 75-119 psig)
  • Cooling Water Flow Recommended
    Typ. 3.8 L/min
  • Cooling Water Pressure
    Max. 5.0 barg (0.5 MPag, 73 psig)
  • Cooling Water Temperature
    17 - 23°C, rated 20°C
  • Cooling Water Differential Pressure Required
    ≥2.0 bar (0.2 MPa, 29 psi)
  • Cooling Water Quality
    Demineralized, filtrated (≤20µm)
  • Cooling Water Resistivity (Conductivity) Required
    50-3000 kΩ-cm (20 - 0.33 µS/cm)
  • Cooling Water pH Value Required
    7.0 - 8.0
  • Gas Module
    12-14100-01300-2M00
  • Gas Module Material
    Coated steel
  • Gas Module Power Supply Frequency
    50-60 Hz
  • Gas Module Power Supply Class of Protection
    IP 40
  • Gas Module Power Supply Collective Apparent power
    2000 VA
  • Gas Module Power Supply Phases
    3/N/PE~
  • Gas Module Power Supply RMS Full Load Phase Current
    Max. 3.8 A
  • Gas Module Power Supply Collective True Power
    1980 W
  • Gas Module Power Supply Voltage
    400 V ±10%
  • Wet Module
    12-21A-1000A-0000
  • Wet Module Material
    PP
  • Wetted Surfaces
    Gas: 316L stainless steel, PFA, PTFE
    Liquid: PFA, PTFE, FFKM
  • Wet Module - Process Liquid IN - supplied from TOOL
    Deionized ozonized water with HF and HCl up to 10 wt% each, free of silicon wafer fragments
    Pressure: 0.5-2.5 barg (0.05-0.25 MPag, 7-36 psig)
    Temperature: 15 - 50°C
    Flow Rate: Max. 60 L/min
  • Control Interfaces
    Binary in/out (dry contacts), RS232, RS485, USB
  • Compliance
    CE, SEMI S2-0302, SEMI F47

Resources

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