The compact LIQUOZON® Single Ozonated Water Delivery System was designed for low flow applications with ozone concentrations up to 95 ppm such as wet wafer cleaning, contaminant removal, surface conditioning and oxide growth. The small footprint of the Single Series makes it uniquely suited to single wafer applications, as well as many immersion applications. As part of the production proven family of LIQUOZON systems, the Single Series also has the same highly reliable ozone generating and contacting technology.
Faster, Easier Installation, System Integration and Operation
Clean, Safe Alternative to Conventional Chemical Processing
Low Cost of Ownership
Ozone is an environmentally friendly alternative to many process chemicals in the semiconductor industry. It has a high redox potential, can be generated at the point-of-use and is easily converted back to oxygen. Cost of purchase, storage and disposal of many chemicals can thus be reduced considerably.
LIQUOZON Single generates ozonated deionized water (DIO3) with a pressure of up to 2.5 bargauge and a volumetric flow rate of up to 20 L/min. At low flow rates (2 L/min) dissolved ozone (O3) concentration of 95 ppm is achievable; at high flow rates (20 L/min) concentration is a maximum of 30 ppm. The LIQUOZON Single is available with different performance versions.
The integrated SEMOZON ozone gas generator converts oxygen (O2) partially into ozone (O3). In the MKS-designed contactor, O3 dissolves in ultra pure water at high efficiency. Residual undissolved O3 gas converts safely back to oxygen in the integrated ozone destruct unit. An O3 analyzer continuously measures O3 concentration in water and a control loop adjusts the power of the SEMOZON generator to ensure an accurate DIO3 output concentration.
The ozone gas generator incorporates an inlet for O2 gas and an outlet for the O2 /O3 mixture. CO2 is added to the O2 gas as a dopant to stabilize the ozone generation performance as well as to stabilize ozone in the deionized water.
LIQUOZON systems provide ozonated water at an exceptionally accurate and stable concentration. At flow rate changes, LIQUOZON Single can keep the concentration stable with only a small deviation from the set point.