LIQUOZON® Single Compact 5-95 ppm, 20 lpm Ozone Water Delivery System

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liquozon single 20 slm ozone water delivery system

Overview

The compact LIQUOZON® Single Ozonated Water Delivery System was designed for low flow applications with ozone concentrations up to 95 ppm such as wet wafer cleaning, contaminant removal, surface conditioning and oxide growth. The small footprint of the Single Series makes it uniquely suited to single wafer applications, as well as many immersion applications. As part of the production proven family of LIQUOZON systems, the Single Series also has the same highly reliable ozone generating and contacting technology.

Up to 95 ppm dissolved ozone
Ozonated water flow up to 20 lpm
Constant ozone concentration and operating pressure at varying flow rates
Ultra-clean for semiconductor processing applications
Extremely compact size of only 400 x 500 x 1200 mm

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		Compare	Model	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Type	Ozone Concentration	Flow Rate	Availability	Featured Item	Price		Brand
		LIQUOZON-SINGLE Ozonated Water Delivery System, 1-channel, 5-95 ppm, 20 lpm, LIQUOZON® Single Contact Us	LIQUOZON-SINGLE Ozonated Water Delivery System, 1-channel, 5-95 ppm, 20 lpm, LIQUOZON® Single	UNIVERSAL	0.0	1.0	0.0		0.0	Ozone Water Delivery System	5 - 95 ppm	0.5 - 10 lpm	Contact Us

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Specifications

Type

LIQUOZON® Single 20 slm Ozone Water Delivery System
Ozone Concentration

5 - 95 ppm
Flow Rate

0.5 - 20 lpm
Operating Pressure

Constant set point configurable from 1.0 to 2.5 bar_gauge (15-36 psig)
Closed-loop controlled, nominal pressure: 2.5 bar_gauge (36 psig)
Feed Gas

O2
Feed Gas Quality

Oxygen, grade 4 (purity > 99.99%) or better
Feed Gas Inlet Pressure

4.5-7.6 bar_gauge (65-110 psig)
Dopant Gas

CO2
Dopant Gas Quality

Carbon Dioxide, grade 4.5 (purity > 99.995%) or better
Dopant Gas Flow Rate

Typically 0.15 slm
Dopant Gas Inlet Pressure

5.0-7.6 bar_gauge (73 - 110 psig)
UPW Pressure

1.8-5.0 bar_gauge (26 - 73 psig), min. 0.8 bar (12 psi) above system operating pressure

UPW Purity

Purity according to process demands
UPW Temperature

15 - 25°C (59 - 77°F)
Cooling Water Flow Recommended

14-0041-222: Typically 1.5 L/min (0.4 gpm)
14-0042-222: Typically 2.3 L/min (0.61 gpm)
14-0044-222: Typically 3.7 L/min (0.98 gpm)
Cooling Water Pressure

2.0-5.0 bar_gauge (29 - 73 psig)
Cooling Water Temperature

17 - 23°C (63 - 73°F), rated 20°C (68°F)
Cooling Water Quality

Demineralized (Resistivity > 50 kΩ cm), 100µm filtered
Ambient Temperature

Max. 35°C (95°F)
Control Interfaces

Discrete communication, RS232
Power

14-0041-222: 3/PE~, 208 VAC, 50/60 Hz 0.500 kVA
14-0042-222: 3/PE~, 208 VAC, 50/60 Hz 0.850 kVA
14-0044-222: 3/PE~, 208 VAC, 50/60 Hz 1.600 kVA
Dimensions

412 x 512 x 1215 mm (16.2 x 20.2 x 47.8 inches )
Weight

135 kg (298 lbs.)
Compliance

CE, SEMI S2-0302, SEMI F47, SEMI S2, UL 61010-1

Specifications

Type

LIQUOZON® Single 20 slm Ozone Water Delivery System
Ozone Concentration

5 - 95 ppm
Flow Rate

0.5 - 20 lpm
Operating Pressure

Constant set point configurable from 1.0 to 2.5 bar_gauge (15-36 psig)
Closed-loop controlled, nominal pressure: 2.5 bar_gauge (36 psig)
Feed Gas

O2
Feed Gas Quality

Oxygen, grade 4 (purity > 99.99%) or better
Feed Gas Inlet Pressure

4.5-7.6 bar_gauge (65-110 psig)
Dopant Gas

CO2
Dopant Gas Quality

Carbon Dioxide, grade 4.5 (purity > 99.995%) or better
Dopant Gas Flow Rate

Typically 0.15 slm
Dopant Gas Inlet Pressure

5.0-7.6 bar_gauge (73 - 110 psig)
UPW Pressure

1.8-5.0 bar_gauge (26 - 73 psig), min. 0.8 bar (12 psi) above system operating pressure

UPW Purity

Purity according to process demands
UPW Temperature

15 - 25°C (59 - 77°F)
Cooling Water Flow Recommended

14-0041-222: Typically 1.5 L/min (0.4 gpm)
14-0042-222: Typically 2.3 L/min (0.61 gpm)
14-0044-222: Typically 3.7 L/min (0.98 gpm)
Cooling Water Pressure

2.0-5.0 bar_gauge (29 - 73 psig)
Cooling Water Temperature

17 - 23°C (63 - 73°F), rated 20°C (68°F)
Cooling Water Quality

Demineralized (Resistivity > 50 kΩ cm), 100µm filtered
Ambient Temperature

Max. 35°C (95°F)
Control Interfaces

Discrete communication, RS232
Power

14-0041-222: 3/PE~, 208 VAC, 50/60 Hz 0.500 kVA
14-0042-222: 3/PE~, 208 VAC, 50/60 Hz 0.850 kVA
14-0044-222: 3/PE~, 208 VAC, 50/60 Hz 1.600 kVA
Dimensions

412 x 512 x 1215 mm (16.2 x 20.2 x 47.8 inches )
Weight

135 kg (298 lbs.)
Compliance

CE, SEMI S2-0302, SEMI F47, SEMI S2, UL 61010-1

Features

Faster, Easier Installation, System Integration and Operation

Simple operation via Touch Screen
No analyzer or cabinet drain connection required

Clean, Safe Alternative to Conventional Chemical Processing

High redox potential of ozone
Can be generated at point-of-use
Green chemical easily converted back to oxygen

Low Cost of Ownership

Reduced chemical consumption and disposal costs
Lower UP water consumption
Low O₂ , CDA, cooling water and exhaust consumption
Supports single or multiple process tools for maximum efficiency

Proven Reliability

Industry leading ozone generating technology
MTBF > 20,000 hours

Environmentally Friendly Alternative

Ozone is an environmentally friendly alternative to many process chemicals in the semiconductor industry. It has a high redox potential, can be generated at the point-of-use and is easily converted back to oxygen. Cost of purchase, storage and disposal of many chemicals can thus be reduced considerably.

Concentration and Flow Performance

LIQUOZON Single generates ozonated deionized water (DIO₃) with a pressure of up to 2.5 bargauge and a volumetric flow rate of up to 20 L/min. At low flow rates (2 L/min) dissolved ozone (O₃) concentration of 95 ppm is achievable; at high flow rates (20 L/min) concentration is a maximum of 30 ppm. The LIQUOZON Single is available with different performance versions.

System Design and Configuration

The integrated SEMOZON ozone gas generator converts oxygen (O₂) partially into ozone (O₃). In the MKS-designed contactor, O₃ dissolves in ultra pure water at high efficiency. Residual undissolved O₃ gas converts safely back to oxygen in the integrated ozone destruct unit. An O₃ analyzer continuously measures O₃ concentration in water and a control loop adjusts the power of the SEMOZON generator to ensure an accurate DIO3 output concentration.

The ozone gas generator incorporates an inlet for O₂ gas and an outlet for the O₂ /O₃ mixture. CO₂ is added to the O₂ gas as a dopant to stabilize the ozone generation performance as well as to stabilize ozone in the deionized water.

System Response and Accuracy

LIQUOZON systems provide ozonated water at an exceptionally accurate and stable concentration. At flow rate changes, LIQUOZON Single can keep the concentration stable with only a small deviation from the set point.