Specifications

  • Type
    Mass Flow Meter (MFM)
  • Full Scale Flow Range
    5-50000 sccm (N2 equivalent)
  • Measurement Range
    0.1% to 100% of Full Scale (range on mech.)
  • Fitting Type
    Compatible with:
    Swagelok® 4 VCR® male
    0.25 in. Swagelok compression seal
    surface mounts
    Swagelok 8 VCR male
    0.125 in. Swagelok
    0.5 in. Swagelok
    6 mm Swagelok
    8 mm Swagelok
    KF16
    0.375 in. Swagelok
    12mm Swagelok
    Swagelok 2 VCR male
  • Maximum Inlet Pressure
    500 psi
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ±1% of Reading
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.02% of Reading/psi
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10-50°C
  • Storage Humidity
    0 to 95% relative humidity, non-condensing
  • Storage Temperature
    -20° to 80°C (-4° to 176° F)
  • External Leak Integrity
    <1 x 10-10 (scc/sec He)
  • Wetted Materials
    316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S.
  • Surface Finish
    10µ inch average Ra (electropolished)
  • Enclosure Rating
    IP66
  • Power Requirements
    +15 to +24 VDC @ (<2 watts)
  • Flow Input Output Signal
    Voltage (0 to 5 VDC)
    Current (4 to 20 mA)
  • Analog I/O Connector
    15 pin Type "D" male, 9 pin Type "D" male
  • Weight
    <2.5 lbs (1.1kg)
  • Compliance
    CE

Resources

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