Configuration Options

Description
  i-series, ip66-rated, 5-50000 sccm mass flow controller IM50A Mass Flow Controller, IP66-rated, Metal-sealed, 5 sccm - 50 slm

Specifications

  • Full Scale Flow Range
    5 to 50,000 sccm (N2 equivalent)
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    5 to 5000 sccm: 10 to 40 psid
    10000 to 20000 sccm: 15 to 40 psid
    30000 to 50000 sccm: 25 to 40 psid
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Control Range
    2% to 100% of Full Scale
  • Typical Accuracy
    ±1% of set point for 20 to 100% Full Scale
    ±0.2% of Full Scale for 2 to 20% Full Scale
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.02% of Reading/psi
  • Typical Settling Time
    <750 msec., typical above 5% Full Scale
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10° to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • External Leak Integrity
    <1 x 10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% of Full Scale at 40 psig inlet to atmosphere
  • Wetted Materials
    316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
  • Seal Material
    Viton, Buna-N, Neoprene, Kalrez®, EPDM (Class VI), or Viton (Class VI)
  • Surface Finish
    MFC: 10µ inch average Ra (electropolished)
  • Weight
    3 lbs (1.4 kg)
  • Enclosure Rating
    IP66
  • Compliance
    CE
  • Power Requirements
    +15 to +24 VDC @ (<4 watts)
  • Flow Input Output Signal
    0 to 5 VDC
  • Analog I/O Connector
    15-pin Type "D" male, 9-pin Type "D" Male
  • Profibus Input Power Required
    +15 to +24 VDC (<4 watts)
  • Profibus Connector
    9 pin Type D male (power) and 9 pin Type D female (comm.)
  • Profibus Data Rate Switch Selection
    Set Data Rate via Profibus® - 9.6 Kbps to 12 Mbps
  • Profibus Digital I/O Network Size
    Up to 99 nodes
  • Profibus MAC ID Switches Addresses
    Station Addresses 0,0 to 9,9
  • Profibus Digital I/O Network Topology
    Master/slave

Features

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