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Sorry, this family of products is no longer available. For recommended replacements see mass-flow-controllers.

IP66 Multi-gas, Multi-range Metal-sealed 5-50,000 sccm Mass Flow Controllers

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i-series, ip66-rated, 5-50000 sccm mass flow controller

Overview

I-Series IM50A Mass Flow Controllers are a general purpose, metal-sealed instrument with an IP66-rated enclosure capable of Full Scale ranges from 5 to 50,000 sccm, N2 equivalent.

Specifications

Full Scale Flow Range

5-50,000 sccm (N2 equivalent)
Maximum Inlet Pressure

150 psig
Normal Operating Pressure Differential

5-5000 sccm: 10-40 psid
10000-20000 sccm: 15-40 psid
30000-50000 sccm: 25-40 psid
Proof Pressure

1000 psig
Burst Pressure

1500 psig
Control Range

2-100% of Full Scale
Typical Accuracy

±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability

±0.3% of Reading
Resolution

0.1% of Full Scale
Zero Temperature Coefficient

<0.05% of Full Scale/°C
Span Temperature Coefficient

<0.08% of Reading/°C
Inlet Pressure Coefficient

<0.02% of Reading/psi
Typical Settling Time

<750 msec., typical above 5% Full Scale
Warm-up Time

30 minutes
Operating Temperature

10° to 50°C
Storage Humidity

0-95% Relative Humidity, non-condensing
Storage Temperature

-20° to 80°C

External Leak Integrity

<1 x 10^-10 (scc/sec He)
Leak Integrity Through Closed Valve

<1.0% of Full Scale at 40 psig inlet to atmosphere
Seal Material

Viton, Buna-N, Neoprene, Kalrez®, EPDM (Class VI), or Viton (Class VI)
Wetted Materials

316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
Surface Finish

MFC: 10µ inch average Ra (electropolished)
Enclosure Rating

IP66
Power Requirements

+15 to +24 VDC @ (<4 watts)
Flow Input Output Signal

0-5 VDC
Analog I/O Connector

15-pin Type "D" male, 9-pin Type "D" Male
Profibus Input Power Required

+15 to +24 VDC (<4 watts)
Profibus Connector

9 pin Type D male (power) and 9 pin Type D female (comm.)
Profibus Data Rate Switch Selection

Set Data Rate via Profibus® - 9.6 Kbps to 12 Mbps
Profibus Digital I/O Network Size

Up to 99 nodes
Profibus MAC ID Switches Addresses

Station Addresses 0,0 to 9,9
Profibus Digital I/O Network Topology

Master/slave
Weight

3 lbs (1.4 kg)
Compliance

CE

Specifications

Full Scale Flow Range

5-50,000 sccm (N2 equivalent)
Maximum Inlet Pressure

150 psig
Normal Operating Pressure Differential

5-5000 sccm: 10-40 psid
10000-20000 sccm: 15-40 psid
30000-50000 sccm: 25-40 psid
Proof Pressure

1000 psig
Burst Pressure

1500 psig
Control Range

2-100% of Full Scale
Typical Accuracy

±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability

±0.3% of Reading
Resolution

0.1% of Full Scale
Zero Temperature Coefficient

<0.05% of Full Scale/°C
Span Temperature Coefficient

<0.08% of Reading/°C
Inlet Pressure Coefficient

<0.02% of Reading/psi
Typical Settling Time

<750 msec., typical above 5% Full Scale
Warm-up Time

30 minutes
Operating Temperature

10° to 50°C
Storage Humidity

0-95% Relative Humidity, non-condensing
Storage Temperature

-20° to 80°C

External Leak Integrity

<1 x 10^-10 (scc/sec He)
Leak Integrity Through Closed Valve

<1.0% of Full Scale at 40 psig inlet to atmosphere
Seal Material

Viton, Buna-N, Neoprene, Kalrez®, EPDM (Class VI), or Viton (Class VI)
Wetted Materials

316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
Surface Finish

MFC: 10µ inch average Ra (electropolished)
Enclosure Rating

IP66
Power Requirements

+15 to +24 VDC @ (<4 watts)
Flow Input Output Signal

0-5 VDC
Analog I/O Connector

15-pin Type "D" male, 9-pin Type "D" Male
Profibus Input Power Required

+15 to +24 VDC (<4 watts)
Profibus Connector

9 pin Type D male (power) and 9 pin Type D female (comm.)
Profibus Data Rate Switch Selection

Set Data Rate via Profibus® - 9.6 Kbps to 12 Mbps
Profibus Digital I/O Network Size

Up to 99 nodes
Profibus MAC ID Switches Addresses

Station Addresses 0,0 to 9,9
Profibus Digital I/O Network Topology

Master/slave
Weight

3 lbs (1.4 kg)
Compliance

CE

Accessories

Description	Compatibility	Avail.	Price
100016745 Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 25 ft.	UNIVERSAL	1 Week	$144
CB147-12-10 Cable, Mass Flow Controller, DB9, 10 ft.	UNIVERSAL	15 Weeks	$83
100016744 Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 10 ft.	UNIVERSAL	1 Week	$94
CB259-5-10 Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft.	UNIVERSAL	8 Weeks	$90
CB147-1-10 Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft.	UNIVERSAL	8 Weeks	$101
100016746 Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 50 ft.	UNIVERSAL	8 Weeks	$249
100019087 Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 10 ft.	UNIVERSAL	10 Weeks	$105
100019088 Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 25 ft.	UNIVERSAL	8 Weeks	$168
RCBDMFC-1-10 Cable, Mass Flow Controller, 246, 247 or 660 Controllers, RoHS, DB15, 10 ft.	UNIVERSAL	8 Weeks	$130
100019089 Mass Flow Controller Cable, 946 Controller, DB9 to HD15, 50 ft.	UNIVERSAL	1 Week	$462
RCBDMFC-4-10 Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, RoHS, DB15, 10 ft.	UNIVERSAL	8 Weeks	$157
RCBDMFC-3-10 Cable, Mass Flow Controller, RoHS, DB9, 10 ft.	UNIVERSAL	8 Weeks	$211