I-Series IM50A Mass Flow Controllers & Mass Flow Meters are a general purpose, metal-sealed instrument with an IP66-rated enclosure capable of Full Scale ranges from 5 to 50,000 sccm, N2 equivalent. They incorporate the latest in digital flow control electronics and a proven, patented thermal sensor and mechanical design.
IM50A Metal-sealed 50 slm Mass Flow Controllers are available with the following options.
|IM50A Mass Flow Controller||IM50A|
|Gas (Per Semi Standard E52-0703)|
|Sulfur Hexafluoride (SF6)||110|
|Other Gas Options||See Here|
|Flow Range Full Scale|
|Fittings (compatible with)|
|6 mm Swagelok||M|
|8 mm Swagelok||E|
|10 mm Swagelok||P|
|12 mm Swagelok||F|
|1/8 in. Swagelok (1000 sccm or below)||A|
|1/4 in. Swagelok||S|
|1/2 in. Swagelok||K|
|3/8 in. Swagelok||J|
|2 VCR Male (1000 sccm or below)||B|
|4 VCR Male||R|
|8 VCR Male||T|
|C-seal surface mount||C|
|W-seal surface mount||H|
|Profibus (1480 Compatible)||4|
|Profibus (1179B Compatible)||3|
|Analog 0 to 5 VDC (15 pin D connector)||B|
|Analog 4 to 20 mA (15 pin D connector)||H|
|Analog 0 to 5 VDC (15 pin D Connector), Brooks||E|
|Analog 0 to 5 VDC (15 pin D Connector), Celerity||U|
|Normally Closed/Mass Flow Controller, Teflon®||M0|
|No Valve/Mass Flow Meter||30|
|Normally Open/Mass Flow Controller, Teflon®||PT|
|MKS will ship firmware revision current to date||20|
The IM50A is a digitally controlled MFC offered with analog (0 to 5 VDC or 4-20 mA) as well as digital Profibus® I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Included is a digital calibration that yields 1% of set point accuracy on the calibration gas.
The IM50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations.
The IM50A metal sealed MFC with its electropolished internal surface finish is well suited for use in high purity process applications. The IM50A is also available in an mass flow meter version that is not electropolished.
Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range. Set point accuracy enables precise process control vs accuracy stated relative to full scale. For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.
An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.
A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.