Sign In
- Product Comparison

IP66 Multi-gas, Multi-range Metal-sealed 5-50,000 sccm Mass Flow Controllers

Overview
Products
Configuration Options
Features
Accessories
Resources
Related

i-series, ip66-rated, 5-50000 sccm mass flow controller

Overview

I-Series IM50A Mass Flow Controllers & Mass Flow Meters are a general purpose, metal-sealed instrument with an IP66-rated enclosure capable of Full Scale ranges from 5 to 50,000 sccm, N2 equivalent. They incorporate the latest in digital flow control electronics and a proven, patented thermal sensor and mechanical design.

Flow rates from 50 to 50,000 sccm
Metal sealed MFC with Teflon valve plug, MFM is all metal
Less than 750 millisecond settling time
Standard closed conductance leak rate of less than 1.0% of Full Scale

See All Features

Products

Configuration Options

		Description
		IM50A Mass Flow Controller, IP66-rated, Metal-sealed, 5 sccm - 50 slm

Show Configuration Options

IM50A Metal-sealed 50 slm Mass Flow Controllers are available with the following options.

Configuration Option	Option Code
IM50A Mass Flow Controller	IM50A
Gas (Per Semi Standard E52-0703)
Nitrogen (N₂)	013
Ammonia (NH₃)	029
Sulfur Hexafluoride (SF₆)	110
Other Gas Options	See Here
Flow Range Full Scale
5 sccm	500
10 sccm	101
20 sccm	201
50 sccm	501
100 sccm	102
200 sccm	202
500 sccm	502
1000 sccm	103
2000 sccm	203
5000 sccm	503
10000 sccm	104
20000 sccm	204
30000 sccm	304
50000 sccm	504
Fittings (compatible with)
6 mm Swagelok	M
8 mm Swagelok	E
10 mm Swagelok	P
12 mm Swagelok	F
1/8 in. Swagelok (1000 sccm or below)	A
1/4 in. Swagelok	S
1/2 in. Swagelok	K
3/8 in. Swagelok	J
2 VCR Male (1000 sccm or below)	B
4 VCR Male	R
8 VCR Male	T
C-seal surface mount	C
W-seal surface mount	H
NW16 ISO-KF	U
Connector
Profibus (1480 Compatible)	4
Profibus (1179B Compatible)	3
Analog 0 to 5 VDC (15 pin D connector)	B
Analog 4 to 20 mA (15 pin D connector)	H
Analog 0 to 5 VDC (15 pin D Connector), Brooks	E
Analog 0 to 5 VDC (15 pin D Connector), Celerity	U
Valve/Device Type
Normally Closed/Mass Flow Controller, Teflon®	M0
No Valve/Mass Flow Meter	30
Normally Open/Mass Flow Controller, Teflon®	PT
Firmware
MKS will ship firmware revision current to date	20

Specifications

Full Scale Flow Range

5 to 50,000 sccm (N2 equivalent)
Maximum Inlet Pressure

150 psig
Normal Operating Pressure Differential

5 to 5000 sccm: 10 to 40 psid
10000 to 20000 sccm: 15 to 40 psid
30000 to 50000 sccm: 25 to 40 psid
Proof Pressure

1000 psig
Burst Pressure

1500 psig
Control Range

2% to 100% of Full Scale
Typical Accuracy

±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability

±0.3% of Reading
Resolution

0.1% of Full Scale
Zero Temperature Coefficient

<0.05% of Full Scale/°C
Span Temperature Coefficient

<0.08% of Reading/°C
Inlet Pressure Coefficient

<0.02% of Reading/psi
Typical Settling Time

<750 msec., typical above 5% Full Scale
Warm-up Time

30 minutes
Operating Temperature

10° to 50°C
Storage Humidity

0 to 95% Relative Humidity, non-condensing
Storage Temperature

-20° to 80°C

External Leak Integrity

<1 x 10^-10 (scc/sec He)
Leak Integrity Through Closed Valve

<1.0% of Full Scale at 40 psig inlet to atmosphere
Wetted Materials

316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
Seal Material

Viton, Buna-N, Neoprene, Kalrez®, EPDM (Class VI), or Viton (Class VI)
Surface Finish

MFC: 10µ inch average Ra (electropolished)
Weight

3 lbs (1.4 kg)
Enclosure Rating

IP66
Compliance

CE
Power Requirements

+15 to +24 VDC @ (<4 watts)
Flow Input Output Signal

0 to 5 VDC
Analog I/O Connector

15-pin Type "D" male, 9-pin Type "D" Male
Profibus Input Power Required

+15 to +24 VDC (<4 watts)
Profibus Connector

9 pin Type D male (power) and 9 pin Type D female (comm.)
Profibus Data Rate Switch Selection

Set Data Rate via Profibus® - 9.6 Kbps to 12 Mbps
Profibus Digital I/O Network Size

Up to 99 nodes
Profibus MAC ID Switches Addresses

Station Addresses 0,0 to 9,9
Profibus Digital I/O Network Topology

Master/slave

Specifications

Full Scale Flow Range

5 to 50,000 sccm (N2 equivalent)
Maximum Inlet Pressure

150 psig
Normal Operating Pressure Differential

5 to 5000 sccm: 10 to 40 psid
10000 to 20000 sccm: 15 to 40 psid
30000 to 50000 sccm: 25 to 40 psid
Proof Pressure

1000 psig
Burst Pressure

1500 psig
Control Range

2% to 100% of Full Scale
Typical Accuracy

±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability

±0.3% of Reading
Resolution

0.1% of Full Scale
Zero Temperature Coefficient

<0.05% of Full Scale/°C
Span Temperature Coefficient

<0.08% of Reading/°C
Inlet Pressure Coefficient

<0.02% of Reading/psi
Typical Settling Time

<750 msec., typical above 5% Full Scale
Warm-up Time

30 minutes
Operating Temperature

10° to 50°C
Storage Humidity

0 to 95% Relative Humidity, non-condensing
Storage Temperature

-20° to 80°C

External Leak Integrity

<1 x 10^-10 (scc/sec He)
Leak Integrity Through Closed Valve

<1.0% of Full Scale at 40 psig inlet to atmosphere
Wetted Materials

316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
Seal Material

Viton, Buna-N, Neoprene, Kalrez®, EPDM (Class VI), or Viton (Class VI)
Surface Finish

MFC: 10µ inch average Ra (electropolished)
Weight

3 lbs (1.4 kg)
Enclosure Rating

IP66
Compliance

CE
Power Requirements

+15 to +24 VDC @ (<4 watts)
Flow Input Output Signal

0 to 5 VDC
Analog I/O Connector

15-pin Type "D" male, 9-pin Type "D" Male
Profibus Input Power Required

+15 to +24 VDC (<4 watts)
Profibus Connector

9 pin Type D male (power) and 9 pin Type D female (comm.)
Profibus Data Rate Switch Selection

Set Data Rate via Profibus® - 9.6 Kbps to 12 Mbps
Profibus Digital I/O Network Size

Up to 99 nodes
Profibus MAC ID Switches Addresses

Station Addresses 0,0 to 9,9
Profibus Digital I/O Network Topology

Master/slave

Features

Analog and Profibus® I/O

The IM50A is a digitally controlled MFC offered with analog (0 to 5 VDC or 4-20 mA) as well as digital Profibus® I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Included is a digital calibration that yields 1% of set point accuracy on the calibration gas.

Standard 3 inch Footprint

The IM50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations.

Metal Sealed with Electropolished Internal Surface Finish

The IM50A metal sealed MFC with its electropolished internal surface finish is well suited for use in high purity process applications. The IM50A is also available in an mass flow meter version that is not electropolished.

Percent of Setpoint Accuracy

Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range. Set point accuracy enables precise process control vs accuracy stated relative to full scale. For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.

Embedded User Interface

An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.

Patented Thermal Sensor

A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.

Features

Accessories

Description	Compatibility	Avail.	Price
100016745 Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 25 ft.	UNIVERSAL	6 Weeks	$130
CB147-12-10 Cable, Mass Flow Controller, DB9, 10 ft.	UNIVERSAL	4 Weeks	$75
100016744 Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 10 ft.	UNIVERSAL	Contact Us	$84
CB259-5-10 Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft.	UNIVERSAL	4 Weeks	$76
CB147-1-10 Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft.	UNIVERSAL	Contact Us	$75
100016746 Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 50 ft.	UNIVERSAL	6 Weeks	$225
100019087 Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 10 ft.	UNIVERSAL	6 Weeks	$84
100019088 Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 25 ft.	UNIVERSAL	Contact Us	$130
RCBDMFC-1-10 Cable, Mass Flow Controller, 246, 247 or 660 Controllers, RoHS, DB15, 10 ft.	UNIVERSAL	3 Weeks	$75
100019089 Mass Flow Controller Cable, 946 Controller, DB9 to HD15, 50 ft.	UNIVERSAL	Contact Us	$225
RCBDMFC-4-10 Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, RoHS, DB15, 10 ft.	UNIVERSAL	Contact Us
RCBDMFC-3-10 Cable, Mass Flow Controller, RoHS, DB9, 10 ft.	UNIVERSAL	Contact Us