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Description
i-series, ip66-rated, 5-50000 sccm mass flow controller IM50A Mass Flow Controller, IP66-rated, Metal-sealed, 5 sccm - 50 slm

Specifications

  • Full Scale Flow Range
    5 to 50,000 sccm (N2 equivalent)
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    5 to 5000 sccm: 10 to 40 psid
    10000 to 20000 sccm: 15 to 40 psid
    30000 to 50000 sccm: 25 to 40 psid
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Control Range
    2% to 100% of Full Scale
  • Typical Accuracy
    ±1% of set point for 20 to 100% Full Scale
    ±0.2% of Full Scale for 2 to 20% Full Scale
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.02% of Reading/psi
  • Typical Settling Time
    <750 msec., typical above 5% Full Scale
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10° to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • External Leak Integrity
    <1 x 10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% of Full Scale at 40 psig inlet to atmosphere
  • Wetted Materials
    316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
  • Seal Material
    Viton, Buna-N, Neoprene, Kalrez®, EPDM (Class VI), or Viton (Class VI)
  • Surface Finish
    MFC: 10µ inch average Ra (electropolished)
  • Weight
    3 lbs (1.4 kg)
  • Enclosure Rating
    IP66
  • Compliance
    CE
  • Power Requirements
    +15 to +24 VDC @ (<4 watts)
  • Flow Input Output Signal
    0 to 5 VDC
  • Analog I/O Connector
    15-pin Type "D" male, 9-pin Type "D" Male
  • Profibus Input Power Required
    +15 to +24 VDC (<4 watts)
  • Profibus Connector
    9 pin Type D male (power) and 9 pin Type D female (comm.)
  • Profibus Data Rate Switch Selection
    Set Data Rate via Profibus® - 9.6 Kbps to 12 Mbps
  • Profibus Digital I/O Network Size
    Up to 99 nodes
  • Profibus MAC ID Switches Addresses
    Station Addresses 0,0 to 9,9
  • Profibus Digital I/O Network Topology
    Master/slave

Features

Analog and Profibus® I/O

The IM50A is a digitally controlled MFC offered with analog (0 to 5 VDC or 4-20 mA) as well as digital Profibus® I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Included is a digital calibration that yields 1% of set point accuracy on the calibration gas.

Standard 3 inch Footprint

The IM50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations.

Metal Sealed with Electropolished Internal Surface Finish

The IM50A metal sealed MFC with its electropolished internal surface finish is well suited for use in high purity process applications. The IM50A is also available in an mass flow meter version that is not electropolished.

Percent of Setpoint Accuracy

Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range.  Set point accuracy enables precise process control vs accuracy stated relative to full scale.  For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.

Embedded User Interface

An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.

Patented Thermal Sensor

A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.

Resources

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