The I-Series IM100A is a general purpose, metal-sealed MFC, with an IP66-rated enclosure is well suited for harsh environments where resistance to liquid or dust ingress is critical. It is capable of Full Scale ranges from 50 to 100 slm (N2 equivalent)
IM100A Metal-sealed 100 slm Mass Flow Controllers are available with the following options.
|IM100A Mass Flow Controller||IM100A|
|Gas (Per Semi Standard E52-0703)|
|Other Gas Options||See Here|
|Flow Range Full Scale|
|Fittings (compatible with)|
|10 mm Swagelok||P|
|12 mm Swagelok||F|
|1/2 in. Swagelok||K|
|3/8 in. Swagelok||J|
|4 VCR Male||R|
|8 VCR Male||T|
|8 VCO Male||D|
|Profibus (1480 Compatible)||4|
|Profibus (1179B Compatible)||3|
|Analog 0 to 5 VDC (15 pin D connector)||B|
|Analog 4 to 20 mA (15 pin D connector)||H|
|Analog 0 to 5 VDC (15 pin D Connector), Brooks||E|
|Analog 0 to 5 VDC (15 pin D Connector), Celerity||U|
|Mass Flow Meter||3|
|Buna Valve Plug||B|
|Neoprene Valve Plug||N|
|Viton (FDA Compliant) (Consult Factory)||W|
|Viton Valve Plug||V|
|EPDM (FDA Compliant) (Consult Factory)||R|
|EPDM Valve Plug||E|
|No Valve (MFM Option)||0|
|MKS will ship firmware revision current to date||20|
The IM100A is a digitally controlled MFC with analog (0 to 5 VDC or 4-20 mA) and digital Profibus® I/O. The digital control electronics, using the latest in MKS control algorithms, provide fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The included digital calibration yields 1% of set point accuracy on the calibration gas.
The IM100A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range without the need to modify existing gas line configurations, and now operates with flow rates up to 100 slm, N2 equivalent.
The IM100A metal sealed MFC, with its electropolished surface finish, is well suited for use in high purity process applications and is available with a normally closed valve. An mass flow meter version is also available and is not electropolished.
Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range. Set point accuracy enables precise process control vs accuracy stated relative to full scale. For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.
An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.
A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.