The I-series IE50A Mass Flow Controller is a general purpose, elastomer-sealed MFC well suited for use in harsh environments where resistance to liquid or dust ingress are critical. It is capable of Full Scale ranges from 5 to 50,000 sccm, N2 equivalent. It incorporates the latest in digital flow control electronics and a proven, patented thermal sensor and mechanical design.
IE50A Mass Flow Controllers are available with the following options.
|IE50A Mass Flow Controller||IE50A|
|Gas (Per Semi Standard E52-0703)|
|Sulfur Hexafluoride (SF6)||110|
|Other Gas Options||See Here|
|Flow Range Full Scale|
|Fittings (compatible with)|
|Swagelok 4 VCR male||R|
|Swagelok 4 VCO male||G|
|Swagelok 8 VCR male||T|
|6 mm Swagelok||M|
|8 mm Swagelok||E|
|Swagelok 8 VCO Male||D|
|Swagelok 2 VCR Male||B|
|10 mm Swagelok||P|
|12 mm Swagelok||F|
|Profibus (1480 Compatible)||4|
|Profibus (1179B Compatible)||3|
|Analog 0 to 5 VDC (15 pin D connector)||B|
|Analog 4 to 20 mA (15 pin D connector)||H|
|Analog 0 to 5 VDC (15 pin D Connector), Brooks||E|
|Analog 0 to 5 VDC (15 pin D Connector), Celerity||U|
|EPDM (Class VI)||R|
|Viton (Class VI)||W|
|MKS will ship firmware revision current to date||20|
The IE50A is a digitally controlled MFC offered with analog (0 to 5 VDC or 4-20 mA) as well as digital Profibus® I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Included is a digital calibration that yields 1% of set point accuracy on the calibration gas.
The IE50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations.
The design of the IE50A incorporates a minimal use of elastomers. There is only one external elastomer seal and elastomer valve plug. Otherwise, all wetted surfaces are of metal. The IE50A comes standard with Viton® seals along with options for Buna or Neoprene® allowing for the device’s use with gases requiring one of these alternatives.
Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range. Set point accuracy enables precise process control vs accuracy stated relative to full scale. For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.
An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.
A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.