Configuration Options

Description
  i-series, ip66-rated, 5-50000 sccm mass flow controller IE50A Mass Flow Controller, IP66-rated, Elastomer-sealed, 5 sccm - 50 slm

Specifications

  • Full Scale Flow Range
    5 - 50000 sccm Full Scale (N2 equivalent)
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    5 to 5000 sccm: 10 to 40 psid, 10000 to 20000 sccm: 15 to 40 psid, 30000 to 50000 sccm: 25 to 40 psid
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Control Range
    2% to 100% of Full Scale
  • Typical Accuracy
    ±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.02% of Reading/psi
  • Typical Settling Time
    <750 msec., typical above 5% Full Scale
  • Warm-up Time
    30 min
  • Operating Temperature
    10° to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • External Leak Integrity
    <1 x 10-09 (scc/sec He)
  • Leak Integrity Through Closed Valve
    Up to 10K valve <0.1% of Full Scale at 40 psig to atmosphere, 20K - 50K valve <1.0% of Full Scale at 40 psig to atmosphere
  • Wetted Materials
    316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
  • Seal Material
    Viton, Buna-N, Neoprene, Kalrez®, or EPDM
  • Surface Finish
    16µ inch average Ra
  • Weight
    3 lbs (1.4 kg)
  • Enclosure Rating
    IP66
  • Compliance
    CE
  • Power Requirements
    +15 to +24 VDC @ (<4 watts)
  • Flow Input Output Signal
    0 to 5 VDC
  • Analog I/O Connector
    15-pin Type "D" male, 9-pin Type "D" Male
  • Profibus Input Power Required
    +15 to +24 VDC (<4 watts)
  • Profibus Connector
    9 pin Type D male (power) and 9 pin Type D female (comm.)
  • Profibus Data Rate Switch Selection
    Set Data Rate via Profibus®
  • Profibus Digital I/O Network Size
    Up to 99 nodes
  • Profibus MAC ID Switches Addresses
    Station Addresses 0,0 to 9,9
  • Profibus Digital I/O Network Topology
    Master/slave

Features

Wide Variety of Analog and Digital I/O

The IE50A is a digitally controlled MFC offered with analog (0 to 5 VDC or 4-20 mA) as well as digital Profibus® I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Included is a digital calibration that yields 1% of set point accuracy on the calibration gas.

Standard 3 inch Footprint

The IE50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations.

Minimal Use of Elastomers

The design of the IE50A incorporates a minimal use of elastomers. There is only one external elastomer seal and elastomer valve plug. Otherwise, all wetted surfaces are of metal. The IE50A comes standard with Viton® seals along with options for Buna or Neoprene® allowing for the device’s use with gases requiring one of these alternatives.

Percent of Setpoint Accuracy

Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range.  Set point accuracy enables precise process control vs accuracy stated relative to full scale.  For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.

Embedded User Interface

An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.

Patented Thermal Sensor

A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.

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