IE500A Elastomer-sealed 500 slm Mass Flow Controllers are available with the following options.
|IE500A Mass Flow Controller||IE500A|
|Gas (Per Semi Standard E52-0703)|
|Argon = (Ar)||004|
|Hydrogen = (H2)||007|
|Other Gas Options||See Here|
|Flow Range Full Scale|
|500 slm (500,000 sccm)||505|
|1000 slm (1,000,000 sccm)||106|
|Fittings (compatible with)|
|12 mm tube compression||F|
|1/2 in. tube compression||S|
|3/4 in. tube compression||Z|
|1/2 in. NPT female||M|
|3/4 in. NPT female||N|
|8 VCR Male||T|
|8 VCO Male||D|
|RS485 (9 pin connector)||5|
|Analog 0 to 5 VDC (15 pin D connector)||B|
|Analog 4 to 20 mA (15 pin D connector)||G|
|EPDM (FDA Compliant)||R|
|Viton (FDA Compliant)||W|
|Mass Flow Meter||3|
|MKS will ship firmware revision current to date||20|
Settling times of 2 to 3 seconds and set point accuracies below 1% of set point exceed those of other typical high flow MFCs. Precise control is maintained down to 2% of the IE500A configured Full Scale flow range. The multi-gas/multi-range capability, along with tight performance specifications for accuracy, control range, and transient response allow users to minimize inventory of high flow MFC part numbers.
The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFCs embedded diagnostic interface, which requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired Full Scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow response, and store operating data for offline analysis.
Thesre mass flow controllers are designed for use in harsh environments where resistance to liquid and dust ingress are essential. Applications include those where “hose down” may be required, such as industrial glass production where moisture and particulates are present. With its IP66 rated enclosure, these MFCs meet the stringent requirements of these aggressive environments.