IP66 Rated Multi-gas, Multi-range Elastomer-sealed 250-500 slm Mass Flow Controllers

Overview
Products
Configuration Options
Features
Accessories
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ie500a ip66-rated, elastomer-sealed 250-500 slm mass flow controller

Overview

The I-Series IE500A mass flow controller is elastomer-sealed, multi-gas/multi-range MFC with an IP66-rated enclosure designed for use in harsh industrial environments where resistance to liquid and dust ingress are essential. The IE500A is capable of Full Scale ranges from 250 slm to 500 slm (N2 equivalent). This broad flow range is enabled by the unique control valve design, which responds rapidly to set point changes while maintaining closed conductance leak rates that are well below other high flow mass flow controllers.

Flow rates from 250 to 500 slm
Seal and valve plug option of Viton, Buna, Neoprene or EPDM
Analog, RS485, Profibus™, or DeviceNet™ I/O
Standard closed conductance leak rate of less than 1.0% of Full Scale
1 to 2 second settling time

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Products

Configuration Options

		Description
		IE500A Mass Flow Controller, IP66-rated, Elastomer-sealed, 250 - 500 slm

Show Configuration Options

IE500A Elastomer-sealed 500 slm Mass Flow Controllers are available with the following options.

Configuration Option	Option Code
IE500A Mass Flow Controller	IE500A
Gas (Per Semi Standard E52-0703)
Helium (He)	001
Argon = (Ar)	004
Hydrogen = (H₂)	007
Nitrogen (N₂)	013
Other Gas Options	See Here
Flow Range Full Scale
500 slm (500,000 sccm)	505
1000 slm (1,000,000 sccm)	106
Fittings (compatible with)
12 mm tube compression	F
1/2 in. tube compression	S
3/4 in. tube compression	Z
1/2 in. NPT female	M
3/4 in. NPT female	N
8 VCR Male	T
8 VCO Male	D
Connector
DeviceNet™	6
RS485 (9 pin connector)	5
Profibus	4
Analog 0 to 5 VDC (15 pin D connector)	B
Analog 4 to 20 mA (15 pin D connector)	G
Seal Materials
EPDM (FDA Compliant)	R
Viton (FDA Compliant)	W
Valve Type
Normally closed	0
Mass Flow Meter	3
Firmware
MKS will ship firmware revision current to date	20

Specifications

Full Scale Flow Range

250 - 500 slm (N2 equivalent)
Maximum Inlet Pressure

150 psig
Normal Operating Pressure Differential

40 to 50 psid
Burst Pressure

1500 psig
Control Range

2% to 100% of Full Scale
Typical Accuracy

±1% of set point for >20% to 100% Full Scale
±0.25% of Full Scale for 5% to 20% Full Scale
Repeatability

±0.5% of Reading
Resolution

0.1% of Reading
Zero Temperature Coefficient

<0.05% of Full Scale/°C
Span Temperature Coefficient

<0.08% of Reading./°C
Inlet Pressure Coefficient

<0.08% of Reading/psi
Typical Settling Time

<3 sec typical above 10% Full Scale @ 50 psi
Warm-up Time

1 hour
Operating Temperature

10° to 50°C

Storage Humidity

0 to 95% Relative Humidity, non-condensing
Storage Temperature

-20° to 65°C
External Leak Integrity

<1 x 10 (scc/sec He)
Leak Integrity Through Closed Valve

<1.0% Full Scale at 40 psia to vac (<500 mTorr)
Wetted Materials

316 S.S., Elgiloy, 430FR, PTFE (Standard)
Seal Material

Viton® (Class VI) or EPDM (Class VI)
Surface Finish

16 µinch average Ra
Weight

12.7 lbs. (5.8 kg)
Enclosure Rating

IP66
Compliance

CE
Power Requirements

+15 to +24 VDC @ (<8 watts)
Flow Input Output Signal

Voltage: 0 to 5 VDC
Current: 4 to 20 mA
Analog I/O Connector

Voltage: 15-pin Type "D" male
Current: 15-pin Type "D" male

Specifications

Full Scale Flow Range

250 - 500 slm (N2 equivalent)
Maximum Inlet Pressure

150 psig
Normal Operating Pressure Differential

40 to 50 psid
Burst Pressure

1500 psig
Control Range

2% to 100% of Full Scale
Typical Accuracy

±1% of set point for >20% to 100% Full Scale
±0.25% of Full Scale for 5% to 20% Full Scale
Repeatability

±0.5% of Reading
Resolution

0.1% of Reading
Zero Temperature Coefficient

<0.05% of Full Scale/°C
Span Temperature Coefficient

<0.08% of Reading./°C
Inlet Pressure Coefficient

<0.08% of Reading/psi
Typical Settling Time

<3 sec typical above 10% Full Scale @ 50 psi
Warm-up Time

1 hour
Operating Temperature

10° to 50°C

Storage Humidity

0 to 95% Relative Humidity, non-condensing
Storage Temperature

-20° to 65°C
External Leak Integrity

<1 x 10 (scc/sec He)
Leak Integrity Through Closed Valve

<1.0% Full Scale at 40 psia to vac (<500 mTorr)
Wetted Materials

316 S.S., Elgiloy, 430FR, PTFE (Standard)
Seal Material

Viton® (Class VI) or EPDM (Class VI)
Surface Finish

16 µinch average Ra
Weight

12.7 lbs. (5.8 kg)
Enclosure Rating

IP66
Compliance

CE
Power Requirements

+15 to +24 VDC @ (<8 watts)
Flow Input Output Signal

Voltage: 0 to 5 VDC
Current: 4 to 20 mA
Analog I/O Connector

Voltage: 15-pin Type "D" male
Current: 15-pin Type "D" male

Features

Fast Settling Time

Settling times of 2 to 3 seconds and set point accuracies below 1% of set point exceed those of other typical high flow MFCs. Precise control is maintained down to 2% of the IE500A configured Full Scale flow range. The multi-gas/multi-range capability, along with tight performance specifications for accuracy, control range, and transient response allow users to minimize inventory of high flow MFC part numbers.

Multi-Gas / Multi-Range Capability

The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFCs embedded diagnostic interface, which requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired Full Scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow response, and store operating data for offline analysis.

IP66 Rated Enclosure

Thesre mass flow controllers are designed for use in harsh environments where resistance to liquid and dust ingress are essential. Applications include those where “hose down” may be required, such as industrial glass production where moisture and particulates are present. With its IP66 rated enclosure, these MFCs meet the stringent requirements of these aggressive environments.

Features

Accessories

Description	Compatibility	Avail.	Price
CB147-12-10 Cable, Mass Flow Controller, DB9, 10 ft.	UNIVERSAL	4 Weeks	$75
CB147-1-10 Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft.	UNIVERSAL	Contact Us	$75
CB259-5-10 Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft.	UNIVERSAL	4 Weeks	$76