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Description
  ie500a ip66-rated, elastomer-sealed 250-500 slm mass flow controller IE500A Mass Flow Controller, IP66-rated, Elastomer-sealed, 250 - 500 slm
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Specifications

  • Full Scale Flow Range
    250 - 500 slm (N2 equivalent)
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    40 to 50 psid
  • Burst Pressure
    1500 psig
  • Control Range
    2% to 100% of Full Scale
  • Typical Accuracy
    ±1% of set point for >20% to 100% Full Scale
    ±0.25% of Full Scale for 5% to 20% Full Scale
  • Repeatability
    ±0.5% of Reading
  • Resolution
    0.1% of Reading
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading./°C
  • Inlet Pressure Coefficient
    <0.08% of Reading/psi
  • Typical Settling Time
    <3 sec typical above 10% Full Scale @ 50 psi
  • Warm-up Time
    1 hour
  • Operating Temperature
    10° to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 65°C
  • External Leak Integrity
    <1 x 10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% Full Scale at 40 psia to vac (<500 mTorr)
  • Wetted Materials
    316 S.S., Elgiloy, 430FR, PTFE (Standard)
  • Seal Material
    Viton® (Class VI) or EPDM (Class VI)
  • Surface Finish
    16 µinch average Ra
  • Weight
    12.7 lbs. (5.8 kg)
  • Enclosure Rating
    IP66
  • Compliance
    CE
  • Power Requirements
    +15 to +24 VDC @ (<8 watts)
  • Flow Input Output Signal
    Voltage: 0 to 5 VDC
    Current: 4 to 20 mA
  • Analog I/O Connector
    Voltage: 15-pin Type "D" male
    Current: 15-pin Type "D" male

Features

Fast Settling Time

Settling times of 2 to 3 seconds and set point accuracies below 1% of set point exceed those of other typical high flow MFCs. Precise control is maintained down to 2% of the IE500A configured Full Scale flow range. The multi-gas/multi-range capability, along with tight performance specifications for accuracy, control range, and transient response allow users to minimize inventory of high flow MFC part numbers.

Multi-Gas / Multi-Range Capability

The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFCs embedded diagnostic interface, which requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired Full Scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow response, and store operating data for offline analysis.

IP66 Rated Enclosure

Thesre mass flow controllers are designed for use in harsh environments where resistance to liquid and dust ingress are essential. Applications include those where “hose down” may be required, such as industrial glass production where moisture and particulates are present. With its IP66 rated enclosure, these MFCs meet the stringent requirements of these aggressive environments.

Resources

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