Model Drawings, CAD & Specs Body Configuration Seal Nose Seal Availability Price
Diagnostic Access Valve, In Situ, Left-handed, Viton Seal, Viton Nosepiece
$815
3 Weeks
Left-handed Viton Viton
3 Weeks
Diagnostic Access Valve, In Situ, Left-handed, Chemraz Seal, Chemraz Nosepiece
$1,025
3 Weeks
Left-handed Chemraz Chemraz
3 Weeks
Diagnostic Access Valve, In Situ, Left-handed, Copper Seal, Viton Nosepiece
$910
3 Weeks
Left-handed Copper Viton
3 Weeks
Diagnostic Access Valve, In Situ, Left-handed, Copper Seal, Chemraz Nosepiece
$1,050
3 Weeks
Left-handed Copper Chemraz
3 Weeks
Diagnostic Access Valve, In Situ, Right-handed, Viton Seal, Viton Nosepiece
$815
3 Weeks
Right-handed Viton Viton
3 Weeks
Diagnostic Access Valve, In Situ, Right-handed, Chemraz Seal, Chemraz Nosepiece
$1,025
3 Weeks
Right-handed Chemraz Chemraz
3 Weeks
Diagnostic Access Valve, In Situ, Right-handed, Copper Seal, Viton Nosepiece
Right-handed Copper Viton
Diagnostic Access Valve, In Situ, Right-handed, Copper Seal, Chemraz Nosepiece
Right-handed Copper Chemraz

Specifications

  • Type
    Diagnostic Access Valve
  • Seal
    Copper, Viton®, or Chemraz®
  • Nose Seal
    Viton® or Chemraz®
  • Control Port Options
    1/8 in. tube
  • Access Port
    KF-NW16
  • Gauge Port
    8 VCR® male
  • Chamber Port
    8 VCR® female

Features

Diagnostics Access Valve Design

The IDA Valve joins a pneumatically actuated primary valve with a manually actuated secondary valve, both based on the MKS Cv Valve design. Functionally, it resembles a pair of two-way valves joined by a tee where V1 is the primary valve and V2 is the secondary valve. This configuration allows for two standard, mirror-image port orientations for your system: a left-oriented body and a rightoriented body.

Applications

The IDA™ Valve (In-situ Diagnostics Access Valve) is a multi-purpose, multi-port, dual valve designed to replace the standard isolation valve used in capacitance manometer and other types of gauge isolation in the semiconductor industry. It is an extension of the proven family of compact, high conductance modular MKS Cv™ Valves.

Gauge Operation

As shown in the Figure, with Vl open and V2 closed, the gauge operates the same as most systems having an ordinary isolation valve in series with the high accuracy manometer.

Gauge Isolation

For gauge isolation, Vl is closed as shown in the figure. In retrofitting system designs having an ordinary isolation valve, no procedural or computer software changes are required.

Gauge Diagnostics and Calibration Verification

In the figure, the gauge is isolated from the process chamber (Vl closed). Valve V2 is then opened, creating a short, high conductance access path for in-situ gauge zeroing or calibration. This can be done via a high quality leak detector/high vacuum system or a complete transportable calibration system.

System Diagnostics

As shown in the figure, both valves are open to access the process chamber in a static or dynamic process mode with the gauge enabled for various diagnostic practices. By using port F3 in this way, the need, and subsequently the cost, for another valve and port is eliminated.

Left or Right Orientations

On the x-y-z axis to the bottom left, a right-oriented valve body is shown as an example. Ports F1, F2, and F3 (process chamber, gauge, and reference/access ports, respectively) correspond to the axes as follows:

  1. A right-oriented valve body has its three vacuum ports, F1, F2, and F3, aligned with the +x, +y, and +z axes, respectively.
  2. A left-oriented valve body has its three vacuum ports, F1, F2, and F3, aligned with the +x, -y, and +z axes, respectively.

Need help?

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