IDA™ In Situ Diagnostic Access Isolation Valves increase the accuracy of, and reduces the time needed for, gauge or capacitance manometer zeroing and calibration during preventative maintenance intervals. They also provide a process chamber access port that enables additional functions, such as system leak checks and diagnostics. Accurate, absolute pressure measurement in-situ with the IDA valve ensures uniformity and repeatability on a system and a system-to-system basis. Process system uptime and productivity are also enhanced, and costs are reduced.
|Model||Drawings, CAD & Specs||Availability||Price|
|IDA-LEV Diagnostic Access Valve, In Situ, Left-handed, Viton Seal, Viton Nosepiece||$815||
|IDA-LEZ Diagnostic Access Valve, In Situ, Left-handed, Chemraz Seal, Chemraz Nosepiece||$1,025||
|IDA-LMV Diagnostic Access Valve, In Situ, Left-handed, Copper Seal, Viton Nosepiece||$910||
|IDA-LMZ Diagnostic Access Valve, In Situ, Left-handed, Copper Seal, Chemraz Nosepiece||$1,050||
|IDA-REV Diagnostic Access Valve, In Situ, Right-handed, Viton Seal, Viton Nosepiece||$815||
|IDA-REZ Diagnostic Access Valve, In Situ, Right-handed, Chemraz Seal, Chemraz Nosepiece||$1,025||
|IDA-RMV Diagnostic Access Valve, In Situ, Right-handed, Copper Seal, Viton Nosepiece||
|IDA-RMZ Diagnostic Access Valve, In Situ, Right-handed, Copper Seal, Chemraz Nosepiece||
The IDA Valve joins a pneumatically actuated primary valve with a manually actuated secondary valve, both based on the MKS Cv Valve design. Functionally, it resembles a pair of two-way valves joined by a tee where V1 is the primary valve and V2 is the secondary valve. This configuration allows for two standard, mirror-image port orientations for your system: a left-oriented body and a rightoriented body.
The IDA™ Valve (In-situ Diagnostics Access Valve) is a multi-purpose, multi-port, dual valve designed to replace the standard isolation valve used in capacitance manometer and other types of gauge isolation in the semiconductor industry. It is an extension of the proven family of compact, high conductance modular MKS Cv™ Valves.
In the figure, the gauge is isolated from the process chamber (Vl closed). Valve V2 is then opened, creating a short, high conductance access path for in-situ gauge zeroing or calibration. This can be done via a high quality leak detector/high vacuum system or a complete transportable calibration system.
On the x-y-z axis to the bottom left, a right-oriented valve body is shown as an example. Ports F1, F2, and F3 (process chamber, gauge, and reference/access ports, respectively) correspond to the axes as follows: