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HFV High Flow Bellows Vacuum Isolation Valves
Overview
High Flow Isolation Valves (HFVs) are high conductance vacuum valves designed for high performance where reliable isolation is needed. The HFVs have a smaller profile, and are lighter, lower in cost, and easier to maintain than similar valves on the market. Lifetime can extend to 1,000,000 cycles for all sizes, greatly increasing system uptime. An edge welded stainless steel bellows prevents outgassing and virtual leaks. The HFVs are designed to be easily and completely disassembled in the field, lowering the cost of replacing parts.
- NW160 - NW250
- High conductance design, to meet the high flow requirements of large fore lines, coaters, and flat panel display
- 1,000,000 cycle rating (clean environments)
- Can be mounted vertically or horizontally to accommodate footprint requirements
Products
Configuration Options
HFV High Flow Vacuum Isolation Valves are available with the following options.
| Configuration Option | Option Code |
|---|---|
| HFV Vacuum Isolation Valve | V |
| Flange Size | |
| NW160 | 160 |
| NW200 | 200 |
| NW250 | 250 |
| Body Configuration | |
| Angle | A |
| Inline | I |
| Flange Type | |
| ISO-MF | M |
| Limit Switch | |
| Limit Switch | L |
| No Limit Switch | N |
| Seal Type | |
| Viton® | V |
| Kalrez® | K |
| Chemraz® | Z |
| Heater | |
| No Heater | XXX |
| Solenoid | |
| 12 VDC | 12D |
| 24 VDC | 24D |
| 24 VAC 50/60 Hz | 24A |
| 120 VAC 50/60 Hz | 120 |
| 240 VAC 50/60 Hz | 240 |
| 1/4 in. Tube Fittings | T25 |
| 1/4 in. Tube Fittings | T38 |
| 1/4 in. NPT Ports | None |
Specifications
-
TypeHigh Conductance Vacuum Valves
-
Vacuum RangeAtmosphere to 1.0 x 10-9 Torr
-
Body ConfigurationAngle, Inline
-
Port SizeNW160, NW200, NW250
-
Helium Leak Rate1.0 x 10-9 std cc/sec
-
Cylinder Air Pressure90 psig ±30 psig
-
Limit Switch Rating5A - 250 VAC
-
Single Pole, Single Throw5A - 30 VDC
-
Closing Time0.630 - 0.750, depending on configuration
-
Typical Life1,000,000 cycles
-
Weight28 - 55 pounds, depending on configuration
Features
Applications
HFV valves are ideally suited for semiconductor manufacturing, flat panel tools, solar tools, coaters and general high flow (large pump line diameter) manufacturing applications.
Conductance Curve Chart
Heated Valves
HFVs are available with MKS heater solutions which ensure uniform internal temperature profiles to minimize condensation of process gases. An Ultem insulating barrier between the Festo™ actuator and valve body keeps heat inside the valve and away from the actuator. To accommodate process needs for high temperature or chemical resistance, a variety of elastomer seals are offered, including, Viton®, Chemraz®, and Kalrez®. Like all MKS isolation valves the HFV is offered with air solenoids for pneumatic actuation and limit switches for remote indication of the valve’s position.
Ultra-High Velocity 