Configuration Options

Description
     HIGH-FLOW-VALVE Vacuum Isolation Valve, High Flow

Specifications

  • Type
    High Conductance Vacuum Valves
  • Vacuum Range
    Atmosphere to 1.0 x 10-9 Torr
  • Body Configuration
    Angle, Inline
  • Port Size
    NW160, NW200, NW250
  • Helium Leak Rate
    1.0 x 10-9 std cc/sec
  • Cylinder Air Pressure
    90 psig ±30 psig
  • Limit Switch Rating
    5A - 250 VAC
  • Single Pole, Single Throw
    5A - 30 VDC
  • Closing Time
    0.630 - 0.750, depending on configuration
  • Typical Life
    1,000,000 cycles
  • Weight
    28 - 55 pounds, depending on configuration

Features

Applications

HFV valves are ideally suited for semiconductor manufacturing, flat panel tools, solar tools, coaters and general high flow (large pump line diameter) manufacturing applications.

Conductance Curve Chart

Heated Valves

HFVs are available with MKS heater solutions which ensure uniform internal temperature profiles to minimize condensation of process gases. An Ultem insulating barrier between the Festo™ actuator and valve body keeps heat inside the valve and away from the actuator. To accommodate process needs for high temperature or chemical resistance, a variety of elastomer seals are offered, including, Viton®, Chemraz®, and Kalrez®. Like all MKS isolation valves the HFV is offered with air solenoids for pneumatic actuation and limit switches for remote indication of the valve’s position.

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