Overview

High Flow Isolation Valves (HFVs) are high conductance vacuum valves designed for high performance where reliable isolation is needed. The HFVs have a smaller profile, and are lighter, lower in cost, and easier to maintain than similar valves on the market. Lifetime can extend to 1,000,000 cycles for all sizes, greatly increasing system uptime. An edge welded stainless steel bellows prevents outgassing and virtual leaks. The HFVs are designed to be easily and completely disassembled in the field, lowering the cost of replacing parts.

• NW160 - NW250
• High conductance design, to meet the high flow requirements of large fore lines, coaters, and flat panel display
• 1,000,000 cycle rating (clean environments)
• Can be mounted vertically or horizontally to accommodate footprint requirements
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