High Flow Isolation Valves (HFVs) are high conductance vacuum valves designed for high performance where reliable isolation is needed. The HFVs have a smaller profile, and are lighter, lower in cost, and easier to maintain than similar valves on the market. Lifetime can extend to 1,000,000 cycles for all sizes, greatly increasing system uptime. An edge welded stainless steel bellows prevents outgassing and virtual leaks. The HFVs are designed to be easily and completely disassembled in the field, lowering the cost of replacing parts.
HFV High Flow Vacuum Isolation Valves are available with the following options.
|Configuration Option||Option Code|
|HFV Vacuum Isolation Valve||V|
|No Limit Switch||N|
|24 VAC 50/60 Hz||24A|
|120 VAC 50/60 Hz||120|
|240 VAC 50/60 Hz||240|
|1/4 in. Tube Fittings||T25|
|1/4 in. Tube Fittings||T38|
|1/4 in. NPT Ports||None|
HFVs are available with MKS heater solutions which ensure uniform internal temperature profiles to minimize condensation of process gases. An Ultem insulating barrier between the Festo™ actuator and valve body keeps heat inside the valve and away from the actuator. To accommodate process needs for high temperature or chemical resistance, a variety of elastomer seals are offered, including, Viton®, Chemraz®, and Kalrez®. Like all MKS isolation valves the HFV is offered with air solenoids for pneumatic actuation and limit switches for remote indication of the valve’s position.