High cycle valves are a small vacuum valve expressly designed for long life in demanding applications. It has a small profile, is light, low in cost and is easy to maintain. The High Cycle Valve can be purchased with a high conductance stainless body or without (internal configuration) if being designed to fit directly into the product, for example, a load lock chamber.
HCV Vacuum Isolation Valves are available with the following options.
|Configuration Option||Option Code|
|HCV Vacuum Isolation Valve||HCV|
|Normally Closed Pneumatic (No Limit Switch)||CN|
|Normally Closed Pneumatic (Limit Switch)||CL|
|24 VAC 50/60 Hz||24A|
|120 VAC 50/60 Hz||120|
|240 VAC 50/60 Hz||240|
|1/8 inch NPT||None|
Manufactured using superior techniques and high quality materials, the High Cycle Valve is extremely durable and dependable. Lifetime can be extended to 10,000,000 cycles, greatly increasing system uptime and lowering maintenance cost. A new formed stainless steel bellows prevents outgassing, virtual leaks and particle entrapment, extending the cycle life of the valve. The bellows stroke length is optimized to ensure a longer cycle life while maintaining a high conductance. Another standard feature, a TIG fusion welded vacuum grade body made of high-grade, corrosion resistant, 304 stainless steel, creates fewer entrapment areas, resulting in less contamination buildup. In the event of power loss, a high-grade reliable heavy-duty spring will automatically close the valve.
The High Cycle Valve is available in angle, inline and internal only configurations. Port sizes include NW 25, NW 40 and NW 50 using maximum internal diameters for greater conductance. Internal configuration can be used to integrate directly into the chamber reducing the footprint of new tools. For leaktight operation, elastomer seals are available in Viton® for typical vacuum operating conditions, or in Kalrez® or Chemraz® for higher temperature conditions and increased chemical resistance. Options for the High Cycle Valve include an air solenoid for electro-pneumatic control of the valve and a limit switch assembly for remote “open or closed” position indication.