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high accuracy in-situ mass flow verifier devicenet
Mass Flow Verifier, 1% of Reading Accuracy, 5 - 3000 sccm

Specifications

  • Mass Flow Verification Accuracy
    ±1.0% of Reading
  • Mass Flow Verification Range
    5 - 3000 sccm (N2 equivalent)
  • Repeatability
    ±0.5% of Reading
  • Reproducibility
    ±0.3% of Reading
  • Pressure Range
    100 Torr
  • Pressure Accuracy
    0.25% of Reading
  • Proof Pressure
    45 psia
  • Burst Pressure
    150 psig
  • Minimum Penumatic Air Supply Pressure
    80 psig
  • Maximum Penumatic Air Supply Pressure
    100 psig
  • Span Temperature Coefficient
    <0.002% Reading/°C
  • Warm-up Time
    60 minutes
  • Operating Temperature
    10° to 40°C
  • Temperature Display
    0 - 100°C
  • Temperature Accuracy
    ± 2°C
  • Temperature Resolution
    0.1°C
  • Storage Humidity
    0 to 95% RH non-condensing
  • Storage Temperature
    -20° to 60°C
  • Control Interface
    DeviceNet: 5-pin DeviceNet Micro Connector Type, EtherCAT: Dual RJ-45 (Comm.) M8 Male 5pin (PWR)
  • Diagnostic Interface
    Ethernet RJ-45 female
  • Input Voltage
    11 to 25 VDC
  • Gas Supply Fitting
    Swagelok® compatible 8-VCR® female, rotatable
  • Vacuum Supply Fitting
    Swagelok® compatible 8-VCR® male type, rotatable
  • Pneumatic Air Supply Fitting
    1/8 inch one-touch quick connect tube
  • External Leak Integrity
    <1 x 10-9 scc/sec He
  • Wetted Materials
    316L SST passivated, Inconel, Incoloy
  • Seal Material
    316 SST nickel plated
  • Valve Seat Material
    PCTFE with Elgiloy® Diaphragm
  • Surface Finish
    <32 µ inches Ra
  • Dimensions
    6.98 x 10.0 x 10.0 in.
  • Weight
    23.9 lbs
  • Compliance
    CE

Features

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