The G-Series GV50A digitally-controlled mass flow controller is available with either RS485, Profibus™, EtherCAT®, PROFINET, or DeviceNet™ I/O. The digital control electronics use the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 600 to 800 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
GV50A Elastomer-sealed 50 slm Mass Flow Controllers are available with the following options.
|GV50A Mass Flow Controller||GV50A|
|Gas (Per Semi Standard E52-0703)|
|Sulfur Hexafluoride (SF6)||110|
|Other Gas Options||See Here|
|Flow Range Full Scale|
|Fittings (compatible with)|
|6 mm Swagelok||M|
|8 mm Swagelok||E|
|10 mm Swagelok||P|
|12 mm Swagelok||F|
|1/8 in. Swagelok (1000 sccm or below)||A|
|1/4 in. Swagelok||S|
|1/2 in. Swagelok||K|
|3/8 in. Swagelok||J|
|2 VCR Male (1000 sccm or below)||B|
|4 VCR Male||R|
|8 VCR Male||T|
|4 VCO Male||G|
|8 VCO Male||D|
|RS485 (uses 9 pin connector)||5|
|Profibus (1480 Compatible)||4|
|Profibus (1179B Compatible)||3|
|Analog 0 to 5 VDC (9 pin D connector)||A|
|Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds||L|
|Analog 0 to 5 VDC (15 pin D connector)||B|
|Analog 0 to 5 VDC (15 pin D connector), Tied Grounds||M|
|Analog 4 to 20 mA (15 pin D connector)||H|
|Analog 0 to 5 VDC (15 pin D Connector), Brooks||E|
|Analog 0 to 5 VDC (15 pin D Connector), Celerity||U|
|MKS will ship firmware revision current to date||20|
The GV50A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The GV50A’s analog and digital I/O can easily be used to replace those same I/O types of the 2179A MFCs. All GV50As include Modbus as an available secondary I/O (excludes PROFINET® and EtherCAT®).
The GV50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations.
The design of the GV50A incorporates a minimal use of elastomers. There is only one external elastomer seal and elastomer valve plug. Otherwise, all wetted surfaces are of metal. The GV50A comes standard with Viton® seals along with options for Buna, Neoprene®, EPMD or Kalrez® allowing for the device’s use with gases requiring one of these alternatives.
Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range. Set point accuracy enables precise process control vs accuracy stated relative to full scale. For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.
An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.
A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.