Configuration Options

Description
  GM100A Mass Flow Controller, Multi-gas, Multi-range, Metal-sealed, 50-100 slm

Specifications

  • Control Range
    2% to 100% of Full Scale
  • Full Scale Flow Range
    50,000 - 100,000 sccm (N2 equivalent)
  • Flow Input Output Signal
    Voltage: (0 to 5 VDC) 15 pin Type "D" male, 9 pin Type "D" male, Current: (4 to 20 mA) 15 pin Type "D" male
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    50,000 - 100,000 sccm; 40 to 80 psid
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ± 1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.02% of Reading/psi
  • Typical Settling Time
    <750 msec., typical above 10% Full Scale
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10° to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • External Leak Integrity
    <1 x 10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% of Full Scale at 40 psig inlet to atmosphere
  • Wetted Materials
    316L Stainless Steel VAR, 316 Stainless Steel, Elgiloy®, Nickel
  • Surface Finish
    10µ inch average Ra
  • Weight
    3 lbs (1.4 kg)
  • Compliance
    CE

Features

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