The G-Series GM100A digitally-controlled mass flow controller is available with either analog (0 to 5 VDC or 4 to 20 mA) or RS485, Profibus™, EtherCAT®, PROFINET, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
The following options are available for GM100A Metal-sealed 50-100 slm Mass Flow Controllers
Ordering Code Example: GM100A013105T6MB020
|GM100A Mass Flow Controller||GM100A|
Gas (Per Semi Standard E52-0703)
|Sulfur Hexafluoride (SF6)||110|
|Other Gas Options||See Here|
Flow Range Full Scale
Fittings (compatible with)
|10 mm Swagelok||P|
|12 mm Swagelok||F|
|1/2 in. Swagelok||K|
|3/8 in. Swagelok||J|
|4 VCR Male||R|
|8 VCR Male||T|
|8 VCO Male||D|
|RS485 (uses 9 pin connector)||5|
|Profibus (1480 Compatible)||4|
|Profibus (1179B Compatible)||3|
|Analog 0 to 5 VDC (9 pin D connector)||A|
|Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds||L|
|Analog 0 to 5 VDC (15 pin D connector)||B|
|Analog 0 to 5 VDC (15 pin D connector), Tied Grounds||M|
|Analog 4 to 20 mA (15 pin D connector)||H|
|Analog 0 to 5 VDC (15 pin D Connector), Brooks||E|
|Analog 0 to 5 VDC (15 pin D Connector), Celerity||U|
|Analog 0 to 5 VDC (15 pin D connector), 1179B 24 VDC Pinout||K|
|Mass Flow Meter||3|
|Buna Valve Plug||B|
|Neoprene Valve Plug||N|
|Viton Valve Plug||V|
|EPDM Valve Plug||E|
|No Valve (MFM Option)||0|
|MKS will ship firmware revision current to date||20|
The GM100A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The GM100A’s analog and digital I/O can easily be used to replace those same I/O types of the 1179A MFCs. All GM100As include Modbus as an available secondary I/O (excludes PROFINET® and EtherCAT®).
The GM100A utilizes the standard 3 inch footprint most often used by mass flow controllers in the 5 sccm to 50 slm flow rate range without the need to modify existing gas line configurations, and now operates with flow rates up to 100 slm, N2 equivalent.
The GM100A metal sealed MFC features a 10 µ inch electropolished 316L surface finish which enables this mass flow controller for use with use in high purity applications.
Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range. Set point accuracy enables precise process control vs accuracy stated relative to full scale. For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.
An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.
A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.