Compare Model Drawings, CAD & Specs Full Scale Flow Range Fitting Type Seal Material Analog Connector Availability Price
$1,675
3 Weeks
10 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
3 Weeks
$1,675
3 Weeks
100 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
3 Weeks
$1,675
3 Weeks
1000 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
3 Weeks
$1,675
3 Weeks
20 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
3 Weeks
$1,675
3 Weeks
200 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
3 Weeks
$1,675
3 Weeks
2000 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
3 Weeks
$1,675
3 Weeks
50 sccm 4VCR Male Viton 15-pin D-sub (tied grounds)
3 Weeks
$1,675
3 Weeks
500 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
3 Weeks
$1,675
3 Weeks
5000 sccm 4 VCR male Viton 15-pin D-sub (tied grounds)
3 Weeks

Configuration Options

Description
  GE50A Mass Flow Controller, 5 sccm to 50 slm, See Available Product Options

Specifications

  • Type
    Mass Flow Controller
  • Control Range
    2% to 100% of Full Scale
  • Full Scale Flow Range
    5 - 50,000 sccm
  • Seal Material
    Viton, Buna-N, Neoprene, or Kalrez
  • Analog Connector
    9-pin or 15-pin D-subminiture
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    10 to 5000 sccm; 10 to 40 psid, 10000 to 20000 sccm; 15 to 40 psid, 30000 to 50000 sccm; 25 to 40 psid
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.02% of Reading/psi
  • Typical Settling Time
    <750 msec, typical above 5% Full Scale
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10°C to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • External Leak Integrity
    <1 x 10-09 (scc/sec He)
  • Leak Integrity Through Closed Valve
    Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
  • Wetted Materials
    316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
  • Surface Finish
    16µ inch average Ra
  • Weight
    3 lbs (1.4 kg)
  • Compliance
    CE

Features

Wide Choice of Digital and Analog Interfaces

The GE50A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The GE50A’s analog and digital I/O can easily be used to replace those same I/O types of the 1179A MFCs. All GE50As include Modbus as an available secondary I/O (excludes PROFINET® and EtherCAT®).

Standard 3 inch Footprint

The GE50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations.

All Metal Wetted Surfaces

The design of the GE50A incorporates a minimal use of elastomers. There is only one external elastomer seal and elastomer valve plug. Otherwise, all wetted surfaces are of metal. The GE50A comes standard with Viton® seals along with options for Buna, Neoprene®, EPMD or Kalrez® allowing for the device’s use with gases requiring one of these alternatives

Percent of Setpoint Accuracy

Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range.  Set point accuracy enables precise process control vs accuracy stated relative to full scale.  For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.

Embedded User Interface

An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.

Patented Thermal Sensor

A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.

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