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G-Series GE250A & GE300A mass flow controllers are general purpose, elastomer-sealed MFCs suited for a wide variety of applications. The GE250A is capable of Full Scale ranges from 100 to 250 slm (N2 equivalent). The GE300A is capable of Full Scale ranges from 150 to 300 slm (N2 equivalent). Both are available with either analog I/O or digital I/O utilizing the latest control algorithms for fast and repeatable response to set point.
GE250A Elastomer-sealed 250 slm Mass Flow Controllers are available with the following options.
Configuration Option |
Option Code |
---|---|
GE250A Mass Flow Controller | GE250A |
Gas (Per Semi Standard E52-0703) | |
Helium (He) | 001 |
Argon = (Ar) | 004 |
Hydrogen = (H2) | 007 |
Nitrogen (N2) | 013 |
Other Gas Options | See Here |
Flow Range Full Scale | |
250 slm (250,000 sccm) | 255 |
Fittings (compatible with) | |
12 mm tube compression | F |
3/8 in. tube compression | J |
1/2 in. tube compression | S |
1/2 in. tube compression (1559 replacement) | W |
1/2 in. NPT female | M |
8 VCR Male | T |
8 VCO Male | D |
8 VCR male (1559 replacement) | L |
8 VCO male long | Q |
Connector | |
EtherCAT | 8 |
DeviceNet | 6 |
RS485 (uses 9 pin connector) | 5 |
Profibus (1480 Compatible) | 4 |
Profibus (1179B Compatible) | 3 |
Analog 0 to 5 VDC (15 pin D connector) | B |
Analog 4 to 20 mA (15 pin D connector) | H |
Seal Materials | |
EPDM | E |
Viton | V |
Buna-N | B |
Neoprene | N |
Valve Type | |
Normally closed | 0 |
Mass Flow Meter | 3 |
Reserved | |
Reserved | 0 |
Firmware | |
MKS will ship firmware revision current to date | 20 |