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Multi-gas, Multi-range, Elastomer-sealed 100 to 300 slm Mass Flow Controllers
Overview
G-Series GE250A & GE300A mass flow controllers are general purpose, elastomer-sealed MFCs suited for a wide variety of applications. The GE250A is capable of Full Scale ranges from 100 to 250 slm (N2 equivalent). The GE300A is capable of Full Scale ranges from 150 to 300 slm (N2 equivalent). Both are available with either analog I/O or digital I/O utilizing the latest control algorithms for fast and repeatable response to set point.
- Flow Rates from 100 to 300 slm
- Seal and valve plug option of Viton, Buna, Neoprene or EPDM
- Wide choice of digital (EtherCAT, DeviceNet™, Profibus®, PROFINET and RS485) or analog (0-5 VDC or 4-20 mA) I/O
- Standard closed conductance leak rate of less than 1.0% of Full Scale
- 1 to 2 second settling time
Products
Configuration Options
The following options are available for GE250AA Elastomer-sealed 100-250 slm Mass Flow Controllers
Ordering Code Example: GE250A013255T8E0020
|
Configuration Option |
Option Code |
|---|---|
| GE250A Mass Flow Controller | GE250A |
Gas (Per Semi Standard E52-0703) |
|
| Helium (He) | 001 |
| Argon = (Ar) | 004 |
| Hydrogen = (H2) | 007 |
| Nitrogen (N2) | 013 |
| Other Gas Options | See Here |
Flow Range Full Scale |
|
| 250 slm (250,000 sccm) | 255 |
Fittings (compatible with) |
|
| 12 mm tube compression | F |
| 3/8 in. tube compression | J |
| 1/2 in. tube compression | S |
| 1/2 in. tube compression (1559 replacement) | W |
| 1/2 in. NPT female | M |
| 8 VCR Male | T |
| 8 VCO Male | D |
| 8 VCR male (1559 replacement) | L |
| 8 VCO male long | Q |
Connector |
|
| EtherCAT | 8 |
| DeviceNet | 6 |
| RS485 (uses 9 pin connector) | 5 |
| Profibus (1480 Compatible) | 4 |
| Profibus (1179B Compatible) | 3 |
| Analog 0 to 5 VDC (15 pin D connector) | B |
| Analog 4 to 20 mA (15 pin D connector) | H |
Seal Materials |
|
| EPDM | E |
| Viton | V |
| Buna-N | B |
| Neoprene | N |
Valve Type |
|
| Normally closed | 0 |
| Mass Flow Meter | 3 |
Reserved |
|
| Reserved | 0 |
Firmware |
|
| MKS will ship firmware revision current to date | 20 |
The following options are available for GE300AA Elastomer-sealed 150-300 slm Mass Flow Controllers
Ordering Code Example: GE300A013305TBV0020
|
Configuration Option |
Option Code |
|---|---|
| GE300A Mass Flow Controller | GE300A |
Gas (Per Semi Standard E52-0703) |
|
| Helium (He) | 001 |
| Argon = (Ar) | 004 |
| Hydrogen = (H2) | 007 |
| Nitrogen (N2) | 013 |
| Other Gas Options | See Here |
Flow Range Full Scale |
|
| 300 slm (300,000 sccm) | 305 |
Fittings (compatible with) |
|
| 8 VCR Male | T |
| 8 VCR male (1559 replacement) | L |
| 8 VCO Male | D |
| 12 mm tube compression | F |
| 1/2 in. tube compression | S |
| 1/2 in. tube compression (1559 replacement) | W |
| 3/8 in. tube compression | J |
| 1/2 in. NPT female | M |
Connector |
|
| Analog 0 to 5 VDC (15 pin D connector) | B |
| Analog 4 to 20 mA (15 pin D connector) | H |
| Profibus (1480 Compatible) | 4 |
| Profibus (1179B Compatible) | 3 |
| RS485 (uses 9 pin connector) | 5 |
| DeviceNet | 6 |
Seal Materials |
|
| EPDM | E |
| Viton | V |
| Buna-N | B |
| Neoprene | N |
Valve Type |
|
| Normally closed | 0 |
| Mass Flow Meter | 3 |
Reserved |
|
| Reserved | 0 |
Firmware |
|
| MKS will ship firmware revision current to date | 20 |
Resources
Application Notes
- Gas Delivery in Biopharmaceutical Applications (271.8 kB, PDF)
- Gas Delivery for Low-E Glass Coating Applications (530.2 kB, PDF)
- MFCs for Gas Control in Case Hardening Processes (246.3 kB, PDF)
- Gas Delivery for Plasma Spray Coating Applications (320.8 kB, PDF)
- Sample Gas Codes for Mass Flow Controllers/Meters
Drawings And Cad
- GE250A Mass Flow Controller Dimensional Drawing (241.3 kB, PDF)
- GE300A Mass Flow Controller Dimensional Drawing (230.5 kB, PDF)
- GE250 Mass Flow Controller 3D Model Files
Literature
- GE300A Elastomer Sealed, Mass Flow Controller, 150-300 slm (260.5 kB, PDF)
- GE250A Elastomer Sealed, Mass Flow Controller, 100-250 slm (257.3 kB, PDF)
Manuals
- G-Series Mass Flow Controller/Meter DeviceNet™ Supplement (112.5 kB, PDF)
- G-Series Mass Flow Controller/Meter RS485 Supplement (149.3 kB, PDF)
- G-Series Mass Flow Controller/Meter PROFINET Communications Supplement (1 MB, PDF)
- GE250A/IE250A User Manual (1055823) (2.4 MB, PDF)
Ultra-High Velocity