Multi-gas, Multi-range, Elastomer-sealed 100 to 300 slm Mass Flow Controllers
Overview
G-Series GE250A & GE300A mass flow controllers are general purpose, elastomer-sealed MFCs suited for a wide variety of applications. The GE250A is capable of Full Scale ranges from 100 to 250 slm (N2 equivalent). The GE300A is capable of Full Scale ranges from 150 to 300 slm (N2 equivalent). Both are available with either analog I/O or digital I/O utilizing the latest control algorithms for fast and repeatable response to set point.
- Flow Rates from 100 to 300 slm
- Seal and valve plug option of Viton, Buna, Neoprene or EPDM
- 1 to 2 second settling time
- Standard closed conductance leak rate of less than 1.0% of Full Scale
Products
Product Options
GE250A Elastomer-sealed 250 slm Mass Flow Controllers are available with the following options.
|
Configuration Option |
Option Code |
|---|---|
| GE250A Mass Flow Controller | GE250A |
| Gas (Per Semi Standard E52-0703) | |
| Helium (He) | 001 |
| Argon = (Ar) | 004 |
| Hydrogen = (H2) | 007 |
| Nitrogen (N2) | 013 |
| Other Gas Options | See Here |
| Flow Range Full Scale | |
| 250 slm (250,000 sccm) | 255 |
| Fittings (compatible with) | |
| 12 mm tube compression | F |
| 3/8 in. tube compression | J |
| 1/2 in. tube compression | S |
| 1/2 in. tube compression (1559 replacement) | W |
| 1/2 in. NPT female | M |
| 8 VCR Male | T |
| 8 VCO Male | D |
| 8 VCR male (1559 replacement) | L |
| 8 VCO male long | Q |
| Connector | |
| EtherCAT | 8 |
| DeviceNet | 6 |
| RS485 (uses 9 pin connector) | 5 |
| Profibus (1480 Compatible) | 4 |
| Profibus (1179B Compatible) | 3 |
| PROFINET | 9 |
| Analog 0 to 5 VDC (15 pin D connector) | B |
| Analog 4 to 20 mA (15 pin D connector) | H |
| Seal Materials | |
| EPDM | E |
| Viton | V |
| Buna-N | B |
| Neoprene | N |
| Valve Type | |
| Normally closed | 0 |
| Mass Flow Meter | 3 |
| Reserved | |
| Reserved | 0 |
| Firmware | |
| MKS will ship firmware revision current to date | 20 |
Features
Conductively Cooled Design
The patented conductively cooled design of the plasma tube supports high throughput and high power (up to 3kW) operation. The wide process window allows for AX7610 use in multiple applications, ranging from fast PR and polymer removal from 300mm wafers to fine-control low-k or atomic layer CVD processes.
Resources
Application Notes
- Gas Delivery in Biopharmaceutical Applications (271.8 kB, PDF)
- Gas Delivery for Low-E Glass Coating Applications (530.2 kB, PDF)
- MFCs for Gas Control in Case Hardening Processes (246.3 kB, PDF)
- Gas Delivery for Plasma Spray Coating Applications (320.8 kB, PDF)
Drawings And Cad
- GE250A Mass Flow Controller Dimensional Drawing (241.3 kB, PDF)
- GE300A Mass Flow Controller Dimensional Drawing (230.5 kB, PDF)
- GE250 Mass Flow Controller 3D Model Files
Literature
- GE300A General Purpose Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller (260.5 kB, PDF)
- GE250A General Purpose Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller (257.3 kB, PDF)
Manuals
- G-Series Mass Flow Controller DeviceNet™ Supplement (112.5 kB, PDF)
- G-Series Mass Flow Controller RS485 Supplement (149.3 kB, PDF)
- G-Series Mass Flow Controller Profibus Supplement (86.9 kB, PDF)
Ultra-High Velocity