Configuration Options

Description
  ge250a/ge300a elastomer-sealed 100-300 slm mass flow controller GE250A Mass Flow Controller, Multi-gas, Multi-range, Elastomer-sealed, 100-250 slm
  ge250a/ge300a elastomer-sealed 100-300 slm mass flow controller GE300A Mass Flow Controller, Multi-gas, Multi-range, Elastomer-sealed, 150-300 slm

Features

Conductively Cooled Design

The patented conductively cooled design of the plasma tube supports high throughput and high power (up to 3kW) operation. The wide process window allows for AX7610 use in multiple applications, ranging from fast PR and polymer removal from 300mm wafers to fine-control low-k or atomic layer CVD processes.

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