Compare Model Drawings, CAD & Specs Frequency Dynamic Power Range Interface Availability Price
elite rf plasma generator
RF Plasma Generator, 300 W, 13.56 MHz, 25-pin Analog Interface, Half Rack
13.56 MHz ±0.005% 1 - 300 W 25 pin Analog, RS232
elite rf plasma generator
RF Plasma Generator, 300 W, 13.56 MHz, DeviceNet & Analog, Half Rack
13.56 MHz ±0.005% 1 - 300 W DeviceNet, 25 pin Analog, RS232
elite rf plasma generator
RF Plasma Generator, 600 W, 13.56 MHz, 25-pin Analog Interface, Full Rack
13.56 MHz ±0.005% 1 - 600 W 25 pin Analog, RS232
elite rf plasma generator
RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Full Rack
13.56 MHz ±0.005% 1 - 600 W DeviceNet, 25 pin Analog, RS232
elite rf plasma generator
RF Plasma Generator, 600 W, 13.56 MHz, Profibus Interface, Full Rack
13.56 MHz ±0.005% 1 - 600 W Profibus, RS232
elite rf plasma generator
RF Plasma Generator, 600 W, 13.56 MHz, 25-pin Analog Interface, Half Rack
13.56 MHz ±0.005% 1 - 600 W 25 pin Analog, RS232
elite rf plasma generator
RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Half Rack
13.56 MHz ±0.005% 1 - 600 W DeviceNet, 25 pin Analog, RS232
elite rf plasma generator
RF Plasma Generator, 600 W, 13.56 MHz, Profibus Interface, Half Rack
13.56 MHz ±0.005% 1 - 600 W Profibus, RS232
elite rf plasma generator
RF Plasma Generator, 750 W, 13.56 MHz, 25-pin Analog Interface, Full Rack
13.56 MHz ±0.005% 1 - 750 W 25 pin Analog, RS232
elite rf plasma generator
RF Plasma Generator, 750 W, 13.56 MHz, DeviceNet & Analog, Full Rack
13.56 MHz ±0.005% 1 - 750 W DeviceNet, 25 pin Analog, RS232
elite rf plasma generator
RF Plasma Generator, 750 W, 13.56 MHz, Profibus Interface, Full Rack
13.56 MHz ±0.005% 1 - 750 W Profibus, RS232

Specifications

  • Type
    elite 13.56 MHz RF Plasma Generators
  • Frequency
    13.56 MHz
  • Accuracy
    ±0.005%
  • Load Impedance Range
    200 - 750 W, depending on model
  • Harmonic Output & Distortion
    -20 to -30 dBc
  • Harmonic Output
    -30 dBc
  • Input AC Power
    Single phase, 110VAC - 253VAC, 50Hz / 60Hz
  • RF Connector
    Type N
  • Remote Digital Interface
    RS-232 via DB9F
  • Analog Interface
    25-pin DB25F
  • Cooling
    Air-cooled
  • Operating Temperature
    5 - 40°C
  • Set Point Response Time
    <10ms (analog)
  • Power Switch
    Front Panel Switch
  • AC Input Connector
    IEC Compliant Inlet
  • LED Indicators
    PWR and STAT on rear panel
  • Watts Nominal into 1.1:1
    elite 750: 750 W
    elite 600: 600 W
    elite 300: 300 W
  • Watts Nominal into 1.5:1
    elite 750: 600 W
    elite 600: 600 W
    elite 300: 300 W
  • Watts Nominal into 2:1
    elite 750: 486 W
    elite 600: 486 W
    elite 300: 300 W
  • Watts Nominal into 3:1
    elite 750: 384 W
    elite 600: 384 W
    elite 300: 300 W
  • Watts Nominal into inf:1
    elite 750: 100 W
    elite 600: 200 W
    elite 300: 200 W
  • Rack Size
    elite 750 & 600: 2U, full rack
  • Dimensions
    elite 750 & 600: 17 in. W x 15 in. D x 3.5 in. H
  • Weight
    9.2 kg
  • Compliance
    CE

Features

Low Cost of Ownership

  • Air-cooled for lower facilities cost
  • High efficiency design, DC to RF efficiency of >85% for low power consumption
  • Wide input range allows for world wide installation without the need for special transformers

Ease of Installation

  • Air cooling does not require connection to factory cooling loop
  • Compact half rack enclosure enables direct tool mounting
  • Standard IEC input connector eliminates the need for special wiring harnessing
  • Single phase, wide AC input range allows ease of installation in world wide markets with varying AC line voltages
  • Fused for operation on single or two phase systems

Exceptional Reliability

  • Integrated single board design eliminates cables and connectors
  • Patented inductive-clamp technology protects the generator from the most adverse VSWR load conditions and plasma fluctuations

Increased Value

  • Field-Programmable Gate Array (FPGA) based control leads to fast control loop and generator protection from load transients
  • Common Exciter (CEX) allows master slave operation and synchronization with other generators
  • Optional LCD display and 6-button multifunction key pad allows local operation from the front panel

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