Specifications

  • Type
    Vacuum Pressure Transducer
  • Sensor Type
    Capacitance Manometer with Etch Baffle Sensor
  • Measurement Type
    Absolute
  • Sensor Temperature
    Controlled to 100°C
  • Full Scale Pressure Ranges
    0.05, 0.1, 0.25, 1, 2, 10, 20, and 100 Torr
  • Accuracy
    0.25% of Reading
    0.5% for <1 Torr and 0.05 Torr
  • Analog Output
    0 - 10 VDC into >10K Ω load
  • Zero Temperature Coefficient
    0.002% of Full Scale/°C for 1-100 Torr ranges
    0.01% Full Scale/°C for 0.1 Torr
    0.02% Full Scale/°C for 0.05 Torr
  • Span Temperature Coefficient
    0.02% of Reading/°C
  • Operating Temperature Range
    15° to 50°C
  • Volume
    6.3 cc
  • Warm-up Time
    2 hours for 1 Torr and higher
    4 hours for <1 Torr
  • Overpressure Limit
    45 psia (310 kPa) or 120% Full Scale, whichever is greater
  • Materials Exposed to Process Gases
    Inconel®
  • Power Requirements
    ±15 VDC ±5% @ 0.6 Amps (maximum)
  • Compliance
    CE

Resources

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